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Method for fabricating three-dimensional microstructures and a high-sensitivity integrated vibration sensor using such microstructures

  • US 4,918,032 A
  • Filed: 07/08/1988
  • Issued: 04/17/1990
  • Est. Priority Date: 04/13/1988
  • Status: Expired due to Fees
First Claim
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1. A method of attaching a mass to a micromechanical cantilever beam of the type having one end rigidly attached to a substrate, a free end having an end point, and which extends above said substrate, said method comprising the steps:

  • (a) forming a layer of photoresist overlying said cantilever beam and said substrate;

    (b) hardening said photoresist layer;

    (c) forming a via in said photoresist layer to expose a portion of said cantilever beam;

    (d) transforming the surface of said photoresist layer from a hydrophobic state to a hydrophilic state;

    (e) forming a mass overlying said photoresist layer, said mass extending through said via and adhering to said exposed portion of said cantilever beam; and

    ,(f) removing said photoresist layer.

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