Illuminating optical device
First Claim
1. An illuminating optical device having an optical integrator capable of receiving a light flux from a light source and substantially forming a plane light source comprising a plurality of light source images and uniformly illuminating an object, including:
- a square-pillar-like internal reflection type integrator having a plurality of reflecting surfaces capable of reflecting the light flux from said light source and forming a plurality of virtual images of said light source on a plane near the entrance surface thereof;
a fly-eye type integrator comprising a plurality of lens elements receiving the light flux from said light source and capable of forming a plurality of light source images on a plane, said lens elements being juxtaposed in proximity to one another; and
relay lens means provided between said two integrators so that the exit surface of one of said two integrators which is adjacent to the light source and the entrance surface of the other integrator which is adjacent to the object are substantially conjugate with each other.
1 Assignment
0 Petitions
Accused Products
Abstract
An illuminating optical device having an optical integrator capable of receiving a light flux from a light source and substantially forming a plane light source comprising a plurality of light source images and uniformly illuminating an object includes a square-pillar-like internal reflection type integrator having a plurality of reflecting surfaces capable of reflecting the light flux from the light source and forming a plurality of virtual images of the light source on a plane near the entrance surface thereof, a fly-eye type integrator comprising a plurality of lens elements receiving the light flux from the light source and capable of forming a plurality of light source images on a plane, the lens elements being juxtaposed in proximity to one another, and relay lens means provided between the two integrators so that the exit surface of one of the two integrators which is adjacent to the light source and the entrance surface of the other integrator which is adjacent to the object are substantially conjugate with each other.
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Citations
17 Claims
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1. An illuminating optical device having an optical integrator capable of receiving a light flux from a light source and substantially forming a plane light source comprising a plurality of light source images and uniformly illuminating an object, including:
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a square-pillar-like internal reflection type integrator having a plurality of reflecting surfaces capable of reflecting the light flux from said light source and forming a plurality of virtual images of said light source on a plane near the entrance surface thereof; a fly-eye type integrator comprising a plurality of lens elements receiving the light flux from said light source and capable of forming a plurality of light source images on a plane, said lens elements being juxtaposed in proximity to one another; and relay lens means provided between said two integrators so that the exit surface of one of said two integrators which is adjacent to the light source and the entrance surface of the other integrator which is adjacent to the object are substantially conjugate with each other. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An illuminating optical device for uniformly illuminating an object, including:
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an illuminating light source; a fly-eye type integrator comprising a plurality of lens elements parallel-disposed in proximity to one another and capable of receiving an illuminating light flux from said illuminating light source and forming a plane light source comprising a plurality of light source images; a square-pillar-like internal reflection type integrator comprising a plurality of reflecting surfaces capable of reflecting the illuminating light flux from said illuminating light source and forming a plane light source comprising a plurality of light source images; a relay lens provided on the illuminating optical path between said fly-eye type integrator and said internal reflection type integrator so that the focus position by the illuminating light flux passing through said fly-eye type integrator and the entrance surface of said internal reflection type integrator are substantially conjugate with each other; and projecting optical means for projecting the illuminating light flux from the plane light source comprising the plurality of light source images formed by said fly-eye type integrator and said internal reflection type integrator onto said object. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. An illuminating optical device for uniformly illuminating an object, including:
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illuminating light source means emitting a collimated light flux; a fly-eye type integrator comprising a plurality of lens elements parallel-disposed in proximity to one another and capable of receiving said light flux and forming a plane light source comprising a plurality of light source images in a space outside said lens elements; a relay lens provided on the optical path of the illuminating light passed through said fly-eye type integrator; an internal reflection type integrator formed into a square-pillar-like shape with a plurality of reflecting surfaces and capable of causing said plurality of light source images formed by said fly-eye type integrator to be reflected by said plurality of reflecting surfaces and further forming them into a plane light source comprising a number of light source images; and projecting optical means for projecting the illuminating light flux from the plane light source comprising said number of light source images formed by said fly-eye type integrator and said internal reflection type integrator onto said object. - View Dependent Claims (15, 16, 17)
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Specification