High spatial and time resolution measuring apparatus
First Claim
1. A high spatial and time resolution measuring apparatus for optically measuring a desired area in a specimen, said apparatus comprising:
- a stage for mounting the specimen thereon;
a light source for generating a first light;
first optical means for directing said first light from said light source to said specimen;
objective means for forming an image of second light emanating form said specimen;
a width variable slit located at the image plane of said objective means for limiting the visual field of the specimen;
relay lens means for forming an image of light emanating from said width variable slit at an image plane;
a streak tube including a photocathode at the image plane of said relay lens means, said streak tube forming a streak image of an image formed by said relay lens means on said photocathode; and
a housing for shielding said first optical means, said objective means, said width variable slit, and said relay lens from ambient light.
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Accused Products
Abstract
A high spatial and time resolution measuring apparatus for optically measuring a fine area in an object to be measured, the apparatus comprising a stage for mounting a specimen thereon, a light source for generating a first light, a first optical system for leading the first light from the light source to the specimen, an objective lens for magnifying an image of a second light from the specimen, a second optical system for imaging a part of the image in a form of a slit, a streak tube having a photocathode at a position of image formation of the second optical system for receiving the part of the image and forming a streak image thereof, a housing for shielding the first optical system, the objective lens and the second optical system from stray light.
16 Citations
27 Claims
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1. A high spatial and time resolution measuring apparatus for optically measuring a desired area in a specimen, said apparatus comprising:
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a stage for mounting the specimen thereon; a light source for generating a first light; first optical means for directing said first light from said light source to said specimen; objective means for forming an image of second light emanating form said specimen; a width variable slit located at the image plane of said objective means for limiting the visual field of the specimen; relay lens means for forming an image of light emanating from said width variable slit at an image plane; a streak tube including a photocathode at the image plane of said relay lens means, said streak tube forming a streak image of an image formed by said relay lens means on said photocathode; and a housing for shielding said first optical means, said objective means, said width variable slit, and said relay lens from ambient light. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 22, 23, 24, 25, 26, 27)
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2. A high spatial and time resolution measuring apparatus for optically measuring a desired area in a specimen, said apparatus comprising:
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a stage disposed along an optical axis for mounting the specimen thereon, said stage being inclined relative to the optical axis to prevent light reflected by said stage from propagating along said optical axis; a light source for generating a first light; first optical means for directing said first light from said light source along an optical axis to said specimen; objective means for forming an image of second light emanating from said specimen along said optical axis; a width variable slit disposed at the image plane of said objective means along said optical axis for limiting the visual field of the specimen; relay lens means disposed along said optical axis for forming an image of light emanating from said width variable slit at an image plane; a streak tube including a photocathode disposed along said optical axis at the image plane of said relay lens means, said streak tube forming a streak image of an image formed by said relay lens means on said photocathode; and a housing for shielding said first optical means, said objective means, said width variable slit, and said relay lens from ambient light. - View Dependent Claims (20, 21)
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Specification