Accelerometric sensor with plane pendulum structure
First Claim
1. An accelerometer sensor comprising a pendulum structure having a planar test body suspended on a fixed part by at least first and second parallel blades, flexible in the plane of the said test body, so that the planar test body is able to move in translation in the said plane according to a sensitive axis substantially perpendicular to the said blades, wherein the planar test body comprises a moving support element linked to the said flexible blades and a planar test mass suspended to the said support element by at least third and fourth blades parallel to the above mentioned ones and flexible in the plane of the said test body.
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Abstract
An accelerometric sensor according to the invention comprises a plane pendulum structure presenting a test body suspended to a fixed part by at least two parallel blades, flexible in the plane of the said test body, in order to be able to move in translation in the said plane according to a sensitive axis perpendicular to the said blades. This test body comprises a moving support element linked to the said flexible blades and a test mass suspended to the said support element by at least a third and fourth blade parallel to the preceding ones and flexible in the plane of the said test body. The invention enables to reduce substantially the sensitivity to the transverse acceleration of the detection structure when it is submitted to an acceleration directed according its sensitive axis S.
13 Citations
7 Claims
- 1. An accelerometer sensor comprising a pendulum structure having a planar test body suspended on a fixed part by at least first and second parallel blades, flexible in the plane of the said test body, so that the planar test body is able to move in translation in the said plane according to a sensitive axis substantially perpendicular to the said blades, wherein the planar test body comprises a moving support element linked to the said flexible blades and a planar test mass suspended to the said support element by at least third and fourth blades parallel to the above mentioned ones and flexible in the plane of the said test body.
Specification