Pressure sensor having baffling means
First Claim
1. A pressure sensor having a ceramic diaphragm which is exposed at one of opposite surfaces thereof to a measurement fluid in an external space and deformable in response to a pressure of said measurement fluid, and strain detector means for producing an electrical output representative of an amount of deformation of the ceramic diaphragm, said pressure sensor comprising:
- a support member for fixedly supporting said ceramic diaphragm at a peripheral portion of said diaphragm, so as to allow a central working portion of said diaphragm to be deformed in response to the pressure of said measurement fluid applied thereto; and
a baffling structure disposed adjacent said one surface of said ceramic diaphragm, and including portions which cooperate with said one surface to define a chamber to which said one surface of the ceramic diaphragm is exposed, said baffling structure having at least one communication hole for communication between said chamber and said external space, said at least one communication hole including at least one aperture formed through a portion of said baffling structure which faces said one surface of the ceramic diaphragm, said at least one aperture being substantially aligned with said support member such that said one surface of said central working portion of said ceramic diaphragm is protected against direct exposure to a straightforward flow of said measurement fluid from said external space toward said central working portion of the diaphragm.
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Accused Products
Abstract
The invention relates to a pressure sensor having a ceramic diaphragm which is exposed at one of opposite surfaces thereof to a measurement fluid in an external space and deformable in response to a pressure of the measurement fluid, and a strain detector for producing an electrical output representative of an amount of deformation of the ceramic diaphragm. The ceramic diaphragm is fixedly supported at an outer portion thereof, so that a central working portion of the diaphragm is deformable in response to the pressure of the measurement fluid applied thereto. The sensor includes a baffling structure disposed adjacent the above-indicated one surface of the ceramic diaphragm. The baffling structure has portions which partially define a chamber to which the above-indicated one surface of the ceramic diaphragm is exposed. The baffling structure has at least one communication hole for communication between the chamber and the external space, such that the central working portion of the ceramic diaphragm is protected against direct exposure to a straightforward flow of the measurement fluid from the external space toward the central working portion of the diaphragm.
30 Citations
8 Claims
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1. A pressure sensor having a ceramic diaphragm which is exposed at one of opposite surfaces thereof to a measurement fluid in an external space and deformable in response to a pressure of said measurement fluid, and strain detector means for producing an electrical output representative of an amount of deformation of the ceramic diaphragm, said pressure sensor comprising:
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a support member for fixedly supporting said ceramic diaphragm at a peripheral portion of said diaphragm, so as to allow a central working portion of said diaphragm to be deformed in response to the pressure of said measurement fluid applied thereto; and a baffling structure disposed adjacent said one surface of said ceramic diaphragm, and including portions which cooperate with said one surface to define a chamber to which said one surface of the ceramic diaphragm is exposed, said baffling structure having at least one communication hole for communication between said chamber and said external space, said at least one communication hole including at least one aperture formed through a portion of said baffling structure which faces said one surface of the ceramic diaphragm, said at least one aperture being substantially aligned with said support member such that said one surface of said central working portion of said ceramic diaphragm is protected against direct exposure to a straightforward flow of said measurement fluid from said external space toward said central working portion of the diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification