Laser oscillator device

• US 4,921,357 A
• Filed: 12/02/1988
• Issued: 05/01/1990
• Est. Priority Date: 04/30/1987
• Status: Expired due to Term

• Current Assignee: Fanuc Limited 3580 Shibokusa Aza-Komanba Oshinomura Minamitsuru-Gun Yamanashi Japan
• Original Assignee: Fanuc Ltd (Fanuc Corporation)
• Inventors: Egawa, Akira, Iehisa, Nobuaki, Manabe, Mitsuo, Karube, Norio, Yamazaki, Etsuo
• Primary Examiner(s): Scott, Jr., Leon
• Application Number:
  US07/283,478
• Time in Patent Office: 515 Days
• Field of Search: 378/38, 378/81, 378/87, 372/29, 372/33
• US Class Current: 372/38.04
• CPC Class Codes: H01S 3/0975 using inductive or capacitive excitation

Abstract

A laser oscillator device applies a high-frequency voltage to a plurality of discharge regions through a dielectric for producing a high-frequency discharge for laser pumping. The laser oscillator device includes a DC power supply (16), and a high-frequency power supply (18, 19, 20, 21) for converting a DC voltage into a high-frequency voltage. The DC power supply (16) and the high-frequency power supply (18, 19, 20, 21) are coupled to each other by a filter (30). The filter (30) prevents a high-frequency component from being fed back from the high-frequency power supply (18, 19, 20, 21) to prevent the laser oscillator device from operating unstably due to parasitic oscillation. Other arrangements are disclosed for preventing interference between the high-frequency power supply and the DC power supply.

Claims

1. A laser oscillator device for applying a high-frequency voltage to a plurality of discharge regions through a dielectric to produce a high-frequency discharge for laser pumping, comprising:

DC power supply means for providing a DC voltage;

high-frequency power supply means for converting the DC voltage into a high-frequency voltage including a high-frequency signal component; and

filter means for coupling said DC power supply means and said high-frequency power supply and for blocking the high-frequency signal component from being feedback to said DC power supply means to thereby stabilize said DC power supply means.

2. A laser oscillator device according to claim 1, wherein said filter means comprises an LC filter circuit.

3. A laser oscillator device according to claim 1, wherein said filter means comprises a resistor.

4. A laser oscillator device for applying a high-frequency voltage to a plurality of discharge regions through a dielectric to produce a high-frequency discharge for laser pumping, comprising:

DC power supply means for providing a DC voltage;

high-frequency power supply means for converting the DC voltage into a high-frequency voltage including a high-frequency signal component; and

coupling line means for coupling said DC power supply means and said high-frequency power supply and for blocking the high-frequency signal component from being feedback to said DC power supply means to thereby stabilize said DC power supply means, said coupling line means further including a shield grounded near said high-frequency power supply means.

5. A laser oscillator device for applying a high-frequency voltage to a plurality of discharge regions through a dielectric to produce a high-frequency discharge for laser pumping, comprising:

DC power supply means for providing a DC voltage and having an output impedance;

high-frequency power supply means for converting the DC voltage into a high-frequency voltage; and

feedback line means for feeding back a current from an input of said high-frequency power supply to said DC power supply means so as to lower the output impedance of said DC power supply means and to block the high-frequency signal component from being feedback to said DC power supply means to thereby stabilize said DC power supply means.