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Linear precision actuator with accelerometer feedback

  • US 4,922,159 A
  • Filed: 05/09/1988
  • Issued: 05/01/1990
  • Est. Priority Date: 05/09/1988
  • Status: Expired due to Term
First Claim
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1. An actuator comprising:

  • a housing, adapted to be to be attached to a structure, vibration of which is to be compensated;

    a displaceable proof mass supported within said housing by elastically deformable means for constraining the displacement of said proof mass;

    means, coupled to said housing, for causing an acceleration of said proof mass against which said housing and any structure attached thereto react;

    force measurement means, integrally coupled with said proof mass, for measuring characteristics of the force produced in the course of the acceleration of said proof mass, and generating an output signal representative thereof; and

    means, responsive to said output signal, for controlling the manner in which said acceleration causing means causes the acceleration of said proof mass.

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