Hermetically sealed multilayer electrical feedthru
First Claim
1. A hermetically sealed multilayered electrical connector for high-density substrates comprising,multiple vertical layers of electrical molybdenum conductors electrically separated from each other and including ends for input and output electrical connections, and at least some of the multiple layers having multiple conductors,said layers supported by a plurality of anisotropically etched anodized aluminum dielectric support pillars which are separated providing spaces between the pillars,said conductors and said spaces sealed by glass enclosing said conductors and pillars forming a hermetic glass-to-metal seal, andsaid conductors having contact portions at each end providing input and output connections to other conductors.
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Accused Products
Abstract
A method for producing miniature, planar, hermetically sealed, electrical feedthrus having multiple layers of molybdenum conductors separated by aluminum which is anodized and selectively etched for providing supports for the multilayer. The exposed molybdenum is cleaned and oxidized and sealed with glass to provide a hermetic seal. Contact portions of the molybdenum are cleaned and plated whereby the contacts will accept a contact seal.
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Citations
1 Claim
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1. A hermetically sealed multilayered electrical connector for high-density substrates comprising,
multiple vertical layers of electrical molybdenum conductors electrically separated from each other and including ends for input and output electrical connections, and at least some of the multiple layers having multiple conductors, said layers supported by a plurality of anisotropically etched anodized aluminum dielectric support pillars which are separated providing spaces between the pillars, said conductors and said spaces sealed by glass enclosing said conductors and pillars forming a hermetic glass-to-metal seal, and said conductors having contact portions at each end providing input and output connections to other conductors.
Specification
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- Resources
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Current AssigneeStovokor Technology LLC (Intellectual Ventures LLC)
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Original AssigneeMicroelectronics and Computer Technology Corporation
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InventorsPotter, Curtis N.
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Primary Examiner(s)Laroche, Eugene R.
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Assistant Examiner(s)SHINGLETON, MICHAEL B
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Application NumberUS07/151,146Time in Patent Office820 DaysField of Search357/71, 357/73, 357/54US Class Current174/251CPC Class CodesH01L 21/486 Via connections through the...
