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Optical scanning apparatus for detecting faults on a surface

  • US 4,924,086 A
  • Filed: 10/28/1988
  • Issued: 05/08/1990
  • Est. Priority Date: 11/05/1987
  • Status: Expired due to Fees
First Claim
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1. Optical scanning apparatus for flat surfaces comprising:

  • a laser light source;

    a periodic light deflecting means illuminated by a laser beam;

    a telecentric optical scanning system for directing the laser beam, periodically swept over a specific angular range by the light deflecting means in the form of a scanning beam displaced parallel to itself at an angle of incidence other than zero towards the flat surface where a light bead arises which periodically scans the flat surface along a scanning line;

    a light receiving means for receiving the light reflected from the region of the scanning line on the surface; and

    an image forming retroreflector disposed at an angle of regular reflection and forming an image of the light bead running along the scanning line, the image being formed adjacent the light bead.

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