Environmental response control apparatus and method

• US 4,925,089 A
• Filed: 06/30/1989
• Issued: 05/15/1990
• Est. Priority Date: 06/30/1989
• Status: Expired due to Term

• Current Assignee: JC Systems Incorporated
• Original Assignee: JC Systems Incorporated
• Inventors: Chaparro, John J., De Kreek, Dirk, Holdaway, Charles R.
• Primary Examiner(s): Tanner, Harry B.
• Application Number:
  US07/374,525
• Time in Patent Office: 319 Days
• Field of Search: 236/15 BB, 236/15 BG, 236/46 R, 236/46 A, 236/46 C, 236/46 D, 236/46 E, 236/47, 236/78 B, 236/78 D, 236/91 A, 73/865.6, 62/208, 62/209, 219/492, 219/516
• US Class Current: 236/78.00D
• CPC Class Codes: C21D 11/00 Process control or regulation for heat treatments
• CPC Class Codes: G01R 31/2642 Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests

Abstract

A control apparatus for controlling the temperature of an environmental chamber within which a device is tested for thermal characteristics employs a pair of control elements connected in cascade. The first element produces a required air temperature in response to a desired temperature and to the temperature of the device; the second produces a temperature set point in response to the required and actual air temperatures. Possible stress on the device is avoided by limiting the range of required air temperature. Response is accelerated by a pass-through circuit, parallel to the first element, which responds to a change in the desired temperature by adding to the required air temperature of value proportional to the change.

Claims

1. In an environmental test system in which a device under test is contained in an environmental chamber, said environmental chamber including means responsive to a chamber control signal for setting an environmental condition within said chamber, and signal means in said chamber for providing a first signal indicative of the reaction of said device under test to said environmental condition and a second signal indicative of said condition, a control apparatus for generating said chamber control signal, said apparatus comprising:

setpoint means for generating a test condition waveform;

a first control means connected to said setpoint means and to said chamber for generating a first operating point signal in response to said first signal and to said test condition signal;

limit means connected to said first control means and responsive to the magnitude of said first operating point signal for limiting said first operating point signal to a constant magnitude value when said magnitude exceeds a particular limit; and

a second control means connected to said limit means and to said chamber for generating said chamber control signal in response to said second signal and to said first operating point signal.

2. The apparatus of claim 1, wherein said first control means includes:

a proportional-integrating controller having a first input connected to said setpoint means and a second input connected to said device under test, said proportional integrating controller for generating an operating point set signal in response to the difference between said first signal and said setpoint signal;

pass-through means connected to said setpoint means for providing a summing signal proportional to said setpoint signal; and

summing means connected to said pass-through means and to said proportional-integrating controller for combining said operating point set signal and said summing signal to produce said first operating point signal.

3. The apparatus of claim 1, wherein said first control means includes a proportional-integrating controller means for generating said first operating point signal by combining an integral of the difference between said first signal and said test condition signal with a proportional value obtained by multiplication of said difference with a constant value.

4. An environmental test system controller for controlling an environmental test chamber temperature in response to the temperature of a device under test in an environmental test chamber, said controller comprising:

a setpoint generator;

a primary controller connected to said setpoint generator and to said device for generating an operating point set signal;

a pass-through circuit connected to said setpoint generator for providing a summing signal;

summing means connected to said primary controller and to said pass-through circuit for combining said operating pointset signal and said summing signal to produce an operating point signal;

a limiting circuit connected to said summing means for limiting said operating point signal to a range between a maximum temperature signal and a minimum temperature signal; and

a secondary controller connected to said limiting circuit and to said environmental test chamber for generating a chamber temperature signal indicative of a temperature to be produced in said environmental test chamber, said secondary controller generating said chamber temperature signal in response to an operating point signal in said range and to the temperature in said environmental test chamber.

5. The controller of claim 4, wherein said setpoint generator produces a device temperature setpoint signal SP₁ and said environmental test chamber provides a device temperature signal PV₂, said primary controller including a proportional integrating controller connected to said setpoint generator and to said environmental test chamber for generating said operating point set signal as:

space="preserve" listing-type="equation">OP.sub.1a =k.sub.1 e.sub.1 +(k.sub.1 /t.sub.i1) ∫

e.sub.1 dt,

where;

OP_1a =said operating point set signal

k₁ =a constant

e₁ =f (PV₁, SP1)

t_i1 =an integral time period.

6. The controller of claim 5, wherein said pass-through circuit provides said summing signal as k₀ SP₁, wherein k₀ is a constant.

7. The controller of claim 6, wherein said summing means provides said operating point signal as:

space="preserve" listing-type="equation">OP.sub.1b =OP.sub.1a +ko SP.sub.1

wherein OP_1b is said operating point signal.

8. The controller of claim 7, wherein said limiting circuit provides said operating point signal in the form of a second setpoint signal, SP₂₁ where:

space="preserve" listing-type="equation">If OP.sub.1b>

SP1 +H.sub.TB, then SP.sub.2 =SP.sub.1 +H.sub.TB, or

space="preserve" listing-type="equation">If OP.sub.1b <

SP.sub.1 -H.sub.TC, then SP.sub.2 =SP.sub.1 -H.sub.TC,

space="preserve" listing-type="equation">Otherwise, SP.sub.2 =OP.sub.1b ; and

H_TB is a limit signal representing a maximum amount by which the temperature of said environmental test chamber is permitted to increase, and H_TC is a limit signal representing a maximum amount by which the temperature of said environmental chamber is permitted to decrease.

9. The controller of claim 8, wherein said secondary controller is a proportional-integrating-differentiating controller which generates said chamber temperature signal in response to a difference signal, e₂, wherein:

space="preserve" listing-type="equation">e.sub.2 =f(SP.sub.2, PV.sub.2); and

PV₂ is the present chamber temperature in said environmental test chamber.

10. In a system for subjecting a device under test to an environmental condition in an environmental chamber, a method for controlling said environmental condition, including the steps of:

measuring the magnitude of a characteristic of said environmental condition to produce a signal PV₂ ;

measuring an effect produced by said environmental condition upon said device to produce a signal PV₁ ;

providing a setpoint signal SP₁ to represent a desired effect to be produced upon said device by said environmental condition;

producing a first operating point representation OP₁ of said characteristic in response to SP₁ and PV₁ ;

limiting the value of OP₁ to a second setpoint value SP₂ contained in a predetermined value range representing a range of values of said environmental characteristic within which said device is subjected to allowed environmental stress;

producing a second operating point signal OP₂ in response to a difference between SP₂ and PV₂, said second operating point signal representing a change in the value of said characteristic; and

changing the magnitude value of said environmental characteristic in response to OP₂.

11. The method of claim 10, wherein said step of providing OP₁ includes:

forming a difference signal e₁ by combining SP₁ and PV₁ ;

developing a set signal by subjecting e₁ to a proportional-integration function;

providing a summing signal k₀ SP₁, where k₀ is a constant; and

producing OP₁ by arithmetically combining said set signal with k₀ SP₁.