Multilayer optical dielectric coating

• US 4,925,259 A
• Filed: 10/20/1988
• Issued: 05/15/1990
• Est. Priority Date: 10/20/1988
• Status: Expired due to Fees

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: United States Department of Energy (Government of the United States of America)
• Inventors: Emmett, John L.
• Primary Examiner(s): Arnold, Bruce Y.
• Application Number:
  US07/260,429
• Time in Patent Office: 572 Days
• Field of Search: 350/164, 350/166, 350/1.6
• US Class Current: 359/359
• CPC Class Codes: G02B 5/0825 the reflecting layers comprising dielectric materials only
• CPC Class Codes: G02B 5/0833 comprising inorganic materials only
• CPC Class Codes: G02B 5/0883 with a refractive index gradient rugate filters G02B5/289
• CPC Class Codes: G02B 5/285 comprising deposited thin solid films G02B5/281 - G02B5/289 take precedence; multilayered film filters for fibre optic multiplexing G02B6/29361
• CPC Class Codes: G02B 5/289 Rugate filters

Abstract

A highly damage resistant, multilayer, optical reflective coating includes alternating layers of doped and undoped dielectric material. The doping levels are low enough that there are no distinct interfaces between the doped and undoped layers so that the coating has properties nearly identical to the undoped material. The coating is fabricated at high temperature with plasma-assisted chemical vapor deposition techniques to eliminate defects, reduce energy-absorption sites, and maintain proper chemical stoichiometry. A number of differently-doped layer pairs, each layer having a thickness equal to one-quarter of a predetermined wavelength in the material are combined to form a narrowband reflective coating for a predetermined wavelength. Broadband reflectors are made by using a number of narrowband reflectors, each covering a portion of the broadband.

Claims

1. An optical interference coating resistant to damage by intense optical radiation and comprising a number of interference layers of a given parent dielectric material, wherein adjacent layers in the coating have slightly different indices of refraction produced by doping at least some of the layers with one or more dopants wherein said one or more dopants are used in small concentrations so that the coating layers substantially retain the same physical and chemical properties of the parent, undoped dielectric material and the coating layers are thereby thermomechanically and chemically compatible.

2. The optical coating of claim 1 wherein a first layer has an index of refraction n₁ and a second, adjacent layer has an index of refraction n₂ and wherein the difference between indices of refraction that is produced by using one or more dopants is between 0.1 to 15% of the value of the parent dielectric material.

3. The optical coating of claim 2 wherein the number of doped layers is greater than 100.

4. The optical coating of claim 1 wherein said coating is formed in a controlled atmosphere at a temperature sufficiently high enough to ensure that the coating and any foreign particulate contained in said coating are oxidized in order to reduce or prevent bulk and localized energy absorption in said coating when said coating is subject to high energy flux densities.

5. The optical coating of claim 4 wherein said coating has an extremely low optical absorption loss, equal to or less than a value 0.0002% of the incident light energy.

6. The coating of claim 4 wherein said oxidizing atmosphere is selected from the group of gases O₂, H₂ O, Cl₂, F₂, or combinations of these gases.

7. The coating of claim 6 wherein said oxidizing atmosphere is O₂.

8. The optical coating of claim 1 wherein each of said layers is deposited at full density in an amorphous state to reduce voids or microcrystalline defects in said coating.

9. The optical coating of claim 1 wherein said parent dielectric, undoped material is fused silica, SiO₂.

10. The optical coating of claim 1 wherein the material is doped with a doping material selected from the group of TiO₂, GeO₂, P₂ O₅, F, B₂ O₃, N, Ta₂ O₅, Al₂ O₃, Cl, Ce₂ O₃ or Sb₂ O₃.

11. The optical coating of claim 1 wherein the material is doped with a combination of GeO₂ and F.

12. The optical coating of claim 1 wherein said thin layers are formed by a chemical vapor deposition process.

13. The optical coating of claim 12 wherein said chemical vapor deposition process is plasma-assisted.

14. The optical coating of claim 13 wherein said plasma assisted chemical vapor deposition process is a high temperature process with a temperature above 1000°

C.

15. The optical coating of claim 12 wherein said chemical vapor deposition process is a high temperature process with a temperature above 1300°

C.

16. The optical coating claim 1 comprising one or more additional layers of undoped material of arbitrary thickness formed adjacent said alternating doped and undoped layers to provide a protective overcoating of undoped material for said optical coating.

17. The optical coating of claim 1 comprising additional layers of material formed adjacent said alternately doped and undoped layers, said additional layers formed sufficiently thick to provide a support substrate for said alternately doped and undoped layers.

18. A reflective optical coating highly resistant to damage by intense optical radiation and comprising a first plurality of alternating layers having different indices of refraction formed by doping at least some of said layers with one or more dopants, wherein each of said layers has a thickness of one-fourth wavelength for a first wavelength, which coating forms a first narrowband reflector for said first wavelength.

19. The optical coating of claim 18 including a second plurality of alternating doped and undoped layers formed adjacent to said first plurality of layers, each of said second plurality of layers having a thickness of one quarter-wave wavelength for a second wavelength, said second plurality of layers forming a second narrow-band reflector, the combination of said first and said second pluralities of layers forming a reflector having a bandwidth broader than the bandwidth of said first reflector or of said second reflector.

20. The optical reflective coating of claim 19 comprised of a composite stack of multilayer, narrowband reflectors applied to a fused silica envelope surrounding an intense broadband light emitting hot plasma produced by gas discharge and such coating designed to reflect wavelengths back into the plasma and transmit desired wavelengths out through the fused silica envelope.

21. The optical reflective coating of claim 20 deposited on the fused silica envelope of a broadband flashlamp light source.

22. The optical reflective coating of claim 20 deposited on the fused silica envelope of a flashlamp broadband light source used to pump a solid state laser gain medium.

23. The optical coating of claim 22 deposited on the fused silica envelope of a flashlamp, broadband light source used to pump a Neodymium-doped solid state laser gain medium and such coating designed to reflect certain predetermined wavelengths back into the plasma to be reabsorbed and re-emitted to thereby improve the conversion efficiency of electrical energy to optical energy at the desired wavelength of said flashlamp.

24. The improvement of claim 23 wherein said reflective coating reflects wavelengths in the infrared region between 950 and 1200 nm.

25. The improvement of claim 23 wherein said reflective coating reflects wavelengths in the ultraviolet region between 250 and 400 nm.

26. The improvement of claim 23 wherein said reflective coating does not reflect wavelengths in the range of 400 to 940 nm to permit transmission of optical energy matched to the pump bands of said Neodymium-doped, solid-state laser gain medium.

27. An optical coating highly resistant to damage by intense optical radiation and formed of very small stepwise incremental deposits of a dielectric material, each of said incremental deposits being doped with one or more doping materials to slightly alter the index of refraction of adjacent incremental deposits to form a predetermined stepwise profile for the index of refraction of said coating.

28. The coating of claim 27 wherein the stepwise incremental deposits are doped to provide an index of refraction approximating a sinewave.

29. The coating of claim 27 wherein said stepwise, incremental deposits have a thickness of 5-10 Angstroms.