Method for preparing thin film of compound oxide superconductor by ion beam techniques
First Claim
1. In a method for preparing a thin film of superconductor composed of a compound copper oxide on a substrate employing a physical vapor deposition technique, the improvement which comprises irradiating the substrate on which evaporated particles from a vapor source are deposited with an oxygen ion beam the intensity of which is varied in time while the evaporated particles are deposited on the substrate.
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Abstract
A method for preparing a thin film of a composite copper oxide superconductor with a deposition source of the compound copper oxide, by applying an oxygen ion beam from an ion source onto a substrate while changing beam intensity during formation of the superconducting thin film, thereby to physically deposit evaporative particles from the deposition source on the substrate.
25 Citations
19 Claims
- 1. In a method for preparing a thin film of superconductor composed of a compound copper oxide on a substrate employing a physical vapor deposition technique, the improvement which comprises irradiating the substrate on which evaporated particles from a vapor source are deposited with an oxygen ion beam the intensity of which is varied in time while the evaporated particles are deposited on the substrate.
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19. In a method for preparing a thin film of a compound copper oxide superconductor on a substrate by depositing particles evaporated from a vapor source composed of constituent elements of the compound copper oxide employing a physical vapor deposition technique, the improvement which comprises irradiating said substrate on which the evaporated particles are deposited with an oxygen ion beam the intensity of which is varied over time under an acceleration potential ranging from 50 V to 40 kV, while the evaporated particles are deposited on the substrate in an atmosphere containing oxygen gas having a partial pressure between 1.0×
- 10-8 and 1.0×
10-2 Torr, and in that said substrate is heated to a temperature between 230° and
1,410°
C. during the deposition of the evaporated particles thereon.
- 10-8 and 1.0×
Specification