Oscillator using H-shaped single crystal silicon vibrator
First Claim
1. In a vibrating type transducer comprisinga vibrator body comprising a silicon single crystal provided on a silicon single crystal substrate,an excitation means for exciting said vibrator body,a vibration detection means for detecting an excited vibration of said vibrator body,the improvement comprisingan H-shaped vibrator body having two first vibrators with opposite ends thereof fixed on said substrate, each being disposed in parallel with each other and a second vibrator mechanically coupled to central portions of said first vibrators,a magnetic field impression means for impressing a DC magnetic field orthogonally to said vibrator body,an excitation means for vibrating said first vibrators together with said DC magnetic field by carrying an alternate current to either the opposite ends of one of said first vibrators or, in the alternative, to the same one ends of said two first vibrators,a vibration detection means for detecting an electromotive force generated either on the opposite ends of the other of said first vibrators or, in the alternative, on the same other ends of said two first vibrators, andan amplification means connected between said excitation means and said vibration detection means.
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Abstract
A vibrating type transducer wherein an H-shaped vibrator, formed integrally with a silicon substrate and having a hollow chamber provided therearound, is kept self oscillating at its natural resonance frequency together with an amplifier. A physical quantity, such as force, pressure, differential pressure, or the like, which is applied to the silicon substrate is detected by a change in the natural frequency arising at the vibrator corresponding to the physical quantity. The invention also includes a method for manufacturing such transducer using a semiconductor technique, including steps for keeping a vacuum internally in the hollow chamber, imparting an initial tension to the vibrator, and then operating the amplifier to have stable self oscillation.
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Citations
4 Claims
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1. In a vibrating type transducer comprising
a vibrator body comprising a silicon single crystal provided on a silicon single crystal substrate, an excitation means for exciting said vibrator body, a vibration detection means for detecting an excited vibration of said vibrator body, the improvement comprising an H-shaped vibrator body having two first vibrators with opposite ends thereof fixed on said substrate, each being disposed in parallel with each other and a second vibrator mechanically coupled to central portions of said first vibrators, a magnetic field impression means for impressing a DC magnetic field orthogonally to said vibrator body, an excitation means for vibrating said first vibrators together with said DC magnetic field by carrying an alternate current to either the opposite ends of one of said first vibrators or, in the alternative, to the same one ends of said two first vibrators, a vibration detection means for detecting an electromotive force generated either on the opposite ends of the other of said first vibrators or, in the alternative, on the same other ends of said two first vibrators, and an amplification means connected between said excitation means and said vibration detection means.
Specification