Automated laminography system for inspection of electronics

• US 4,926,452 A
• Filed: 10/30/1987
• Issued: 05/15/1990
• Est. Priority Date: 10/30/1987
• Status: Expired due to Term

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Four Pi Systems Corp. (HP Inc.)
• Inventors: Adams, John A., Baker, Bruce D., Corey, Robert L., Ross, Edward W.
• Primary Examiner(s): NOT, DEFINED
• Assistant Examiner(s): NOT, DEFINED
• Application Number:
  US07/115,171
• Time in Patent Office: 928 Days
• Field of Search: 378/21, 378/22, 378/25, 378/34, 378/58, 378/137, 378/145, 378/205, 378/207, 378/206, 378/99, 250/358.1, 250/359.1, 382/8, 382/30, 382/34, 358/101, 358/111
• US Class Current: 378/22
• CPC Class Codes: G01N 23/043 using fluoroscopic examination, with visual observation or video transmission of fluoroscopic images
• CPC Class Codes: G01N 23/044 using laminography or tomosynthesis
• CPC Class Codes: G01R 31/302 Contactless testing G01R31/66 takes precedence
• CPC Class Codes: G01R 31/304 of printed or hybrid circuits G01R31/305 - G01R31/315 take precedence

Abstract

A tomographic inspection system wherein the electron beam of a microfocus X-ray tube is deflected in a circular scan pattern onto the tube anode in synchronization with a rotating detector that converts the X-ray shadowgraph into an optical image and derotates the image so as to be viewed and integrated in a stationary video camera. A computer system controls an automated positioning system that supports the item under inspection and moves successive areas of interest into view. In order to maintain high image quality, a computer system also controls the synchronization of the electron beam deflection and rotating optical system, making adjustments for inaccuracies of the mechanics of the system. The computer system can also operate under program control to automatically analyze data, measure characteristics of the item under inspection and make decisions regarding the acceptability of the item'"'"'s quality. The invention produces high resolution images in rapid succession so as to be suitable for use in conjunction with manufacturing production lines and capable of inspecting electronic devices, solder connections, printed wiring boards and other assemblies.

Claims

1. A solder connection inspection device comprising:

an X-ray source comprising;

an electron source for producing a beam of electrons;

an anode having a surface upon which said electron beam impinges; and

an electrical steering device for deflecting said electron beam to different locations on said anode surface, said steering device capable of causing said electron beam to rotate about an axis and to trace a substantially circular path upon said anode surface thus causing said X-ray source to move in a first circular pattern, said first circular pattern defining a first plane;

an X-ray detector for producing X-ray cross-sectional laminographic images of said solder connection, said detector positioned to receive X-rays produced by said X-ray source which have penetrated said solder connection, said X-ray detector comprising;

a converter screen for producing an optical image corresponding to an X-ray image formed by said penetrating X-rays;

means for moving said converter screen such that it rotates about said axis and travels along a substantially circular path defining a second circular pattern, said second circular pattern defining a second plane which is substantially parallel to said first plane;

an optical derotation device for transmitting said optical image from said rotating converter screen to a stationary optical image plane; and

a camera located at said stationary optical image plane for detecting said optical image, said camera having

an electronic output which corresponds to said optical image;

a fiducial element, which, when illuminated by said X-ray source forms a fiducial element image on said detector;

a control system which utilizes information obtained from said fiducial element image to synchronize the circular motions of said X-ray source and converter screen, such that said optical image representations of said X-ray cross-sectional laminographic images are formed at said stationary image plane, said control system comprising;

a sensor which monitors the position of said converter screen along said second circular pattern and transmits coordinates corresponding to the screen position; and

a look up table which receives said coordinates from said sensor and transmits corresponding signals to said steering device thus causing said motion of said X-ray source to be synchronized with said motion of said converter screen; and

a digital image processing system for analyzing said cross-sectional images of said solder connection, said image processing system comprising;

an image digitizer for receiving said electronic image signal from said camera and forming a digital representation of said image which corresponds to said X-ray cross-sectional image of said solder connection; and

a programmably-controlled computational section programmed to access predetermined regions of said digital image and to analyze said regions in accordance with a predetermined set of instructions for specific features indicative of particular types of solder defects.

2. An apparatus as defined in claim 1, wherein said X-ray source comprises a steerable electron beam X-ray tube.

3. An apparatus as defined in claim 1, wherein said electrical steering device comprises coils which produce magnetic fields which interact with said electron beam causing it to be deflected.

4. An apparatus as defined in claim 1, wherein said converter screen comprises a cadmium tungstate scintillation material.

5. An apparatus as defined in claim 1, wherein said cross-sectional image corresponds to a plane within said solder connection which is parallel to said first and second planes and intersects said axis of rotation.

6. An apparatus as defined in claim 5, wherein said image plane of said solder connection is located between said X-ray source and said X-ray detector such that the distance from said image plane to said first plane is less than the distance from said image plane to said second plane.

7. An apparatus as defined in claim 1, wherein said means for moving said converter screen further comprises a turntable which rotates about said axis and upon which said converter screen is mounted.

8. An apparatus as defined in claim 7, wherein said optical derotation device comprises first and second mirrors mounted in said turntable, said mirrors oriented at an angle of approximately 45°

with respect to said axis of rotation and with respect to said first and second planes.

9. An apparatus as defined in claim 8, wherein said first mirror receives said optical image from said converter screen and reflects it to said second mirror, said second mirror further reflecting said image to said stationary image plane.

10. An apparatus as defined in claim 8, wherein said second mirror intersects said axis of rotation.

11. An apparatus as defined in claim 1, wherein said camera comprises a video camera.

12. An apparatus as defined in claim 11, wherein said camera comprises a silicon intensified target image intensifier.

13. An apparatus as defined in claim 1, wherein said digital image processing system comprises multiple parallel image processors.

14. An apparatus as defined in claim 1, further comprising a positioning table for moving said circuit board.

15. A laminographic apparatus for inspecting an electrical connection comprising:

an imaging system for producing a cross-sectional image of said electrical connection, wherein said imaging system comprises;

a source of penetrating radiation at a first location for generating said cross-sectional image of said electrical connection; and

a detector at a second location for sensing the penetrating radiation representative of said cross-sectional image;

a fiducial element, which, when illuminated by said source of penetrating radiation forms a fiducial element image on said detector; and

a control system which coordinates the positions of said source of penetrating radiation and said detector utilizing information obtained from said fiducial element image.

16. An apparatus as defined in claim 15, wherein said source of penetrating radiation comprises an X-ray source and said detector comprises an X-ray detector.

17. An apparatus as defined in claim 16, wherein said imaging system produces an X-ray laminograph of said electrical connection.

18. An apparatus as defined in claim 17, wherein said X-ray laminograph is produced by the motion of said X-ray source and said X-ray detector with respect to said electrical connection, which remains stationary.

19. An apparatus as defined in claim 18, wherein said motion of said X-ray source is produced by electrical means and said motion of said X-ray detector is produced by electro-mechanical means, said X-ray source and said X-ray detector motions being synchronized and controlled by said control system, which comprises an electrical feedback system.

20. An apparatus as defined in claim 18, wherein said motions of said X-ray source and said X-ray detector are substantially circular and define a source plane and a detector plane.

21. An apparatus as defined in claim 20 wherein said source plane and said detector plane are substantially parallel.

22. An apparatus as defined in claim 16, wherein said imaging system comprises a computerized tomography system.

23. An apparatus as defined in claim 15, further comprising an image analysis system for analyzing said cross-sectional image, wherein said image analysis system searches for specific features in said cross-sectional image.

24. An apparatus as defined in claim 23, wherein said image analysis system identifies said specific features by performing predetermined tests on said cross-sectional image at predetermined locations of said image.

25. An apparatus as defined in claim 24, wherein said image analysis system identifies a solder bond bridging defect by calculating a series of differential image intensity gray values of said cross-sectional image of said solder bond along a border surrounding said solder bond image and comparing said differential gray values to a predetermined threshold gray value.

26. An apparatus as defined in claim 25, wherein said image analysis system identifies a solder bridging defect at locations along said border wherein said calculated differential image intensity gray values exceed said threshold value.

27. An apparatus as defined in claim 24, wherein said image analysis system measures the quantity of solder present at said connection by defining a region of said cross-sectional image of said connection corresponding to a portion of said connection, calculating an average image intensity for said region and comparing said average image intensity to a first and a second set of predetermined image intensity threshold values.

28. An apparatus as defined in claim 27, wherein said image analysis system identifies a missing solder defect at locations where said average intensity is less than both of said first and second sets of threshold values.

29. An apparatus as defined in claim 27, wherein said image analysis system identifies an insufficient solder defect at locations where said average intensity is less than said first set of threshold values and greater than said second set of threshold values.

30. An apparatus for producing X-ray laminographs of an object comprising:

an X-ray source wherein X-rays are produced by an electron beam impinging upon a target;

an electrical steering device for deflecting said electron beam to different portions of said target thus moving the location, wherein said X-rays are produced by said X-ray source;

an X-ray detector positioned to receive X-rays produced by said X-ray source;

means for coordinating said X-ray detector position with said X-ray source motion such that a laminographic image is formed by said detector;

a test object having a fiducial feature which forms an image of said fiducial feature on said X-ray detector when said test object is positioned between said X-ray source and said X-ray detector; and

a feedback control system which utilizes information obtained from said image of said fiducial feature on said X-ray detector for synchronizing the motion of the X-ray source with the motion of the X-ray detector.

31. An apparatus as defined in claim 30, wherein said feedback system drives said electrical steering device in response to the motion of said detector such that said image of said test object is located at a predetermined position on said X-ray detector as said X-ray detector and said X-ray source move relative to said test object.

32. An apparatus as defined in claim 30, wherein

said feedback system causes said X-ray source to traverse a first circular path about a first axis of rotation forming a first plane;

and

said means for moving said X-ray detector causes said X-ray detector to traverse a second circular path about a second axis of rotation forming a second plane.

33. An apparatus as defined in claim 32, wherein said first plane is substantially parallel to said second plane.

34. An apparatus as defined in claim 32, wherein said first axis is substantially coextensive with said second axis.

35. An apparatus as defined in claim 32, wherein said first circular path and said second circular path have substantially the same axis of rotation and wherein said first and second planes are substantially parallel.

36. A method of inspecting an electrical connection between electrical components mounted on a printed circuit board comprising the steps of:

providing a source of transmissive energy;

moving said source of transmissive energy;

providing a detector for detecting said transmissive energy;

moving said transmissive energy detector;

positioning a fiducial element between said source of transmissive energy and said detector such that said fiducial element forms an image on said detector;

controlling the motion of said transmissive energy with the motion of said detector with a feedback system that derives feedback alignment information from said fiducial element image on said detector;

producing a cross-sectional image of said electrical connection utilizing said transmissive energy, wherein said cross-sectional image represents a peripheral plane adjacent to a surface of said printed circuit board;

searching said cross-sectional image for predetermined characteristics; and

analyzing said predetermined characteristics of said cross-sectional image to determine the quality of said electrical connection.

37. A method as defined in claim 36, wherein said step of producing said cross-sectional image further comprises the steps of producing X-rays with an X-ray source and detecting X-rays with an X-ray detector.

38. A method as defined in claim 37, wherein said step of producing said cross-sectional image further comprises the step of producing an X-ray laminograph of said electrical connection.

39. A method as defined in claim 38, wherein said step of producing said X-ray laminograph further comprises the steps of moving said X-ray source and said X-ray detector with respect to said electrical connection.

40. A method as defined in claim 39, wherein said step of producing said X-ray laminograph further comprises the steps of:

moving said X-ray source by electrical means;

moving said X-ray detector by electro-mechanical means; and

synchronizing said X-ray source and said X-ray detector motions with an electrical feedback system.

41. A method as defined in claim 36, wherein said step of analyzing said cross-sectional image further comprises the step of performing predetermined tests on said cross-sectional image at predetermined locations of said image to identify said predetermined characteristics.

42. A method as defined in claim 36, wherein said step of analyzing said cross-sectional image further comprises the steps of:

calculating a series of differential image intensity gray values along a border surrounding one of said electrical connections; and

comparing said differential gray values to a predetermined threshold gray value.

43. A method as defined in claim 42, further comprising the steps of identifying locations along said border wherein said calculated differential image intensity gray values exceed said threshold value and designating said locations solder bridging defects.

44. A method of producing X-ray laminographs of an object comprising the steps of:

providing a source of X-rays wherein X-rays are produced by an electron beam impinging upon a target;

directing said electron beam to different portions of said target, thus moving a location wherein said X-rays are produced by said X-ray source;

detecting X-rays produced by said X-ray source with an X-ray detector;

moving the location of said X-ray detector;

positioning a test object having a fiducial element between said X-ray source and said X-ray detector such that said test object fiducial element forms an image on said X-ray detector; and

synchronizing the motion of said location of the production of said X-rays with the motion of said X-ray detector with a feedback system that derives feedback alignment information from said image of said test object fiducial element on said detector.

45. A method as defined in claim 44, further comprising the step of driving said feedback system in response to the motion of said detector such that said image of said test object is located at a predetermined position on said X-ray detector as said X-ray detector and said location of X-ray production move relative to said test object.