Optical micropressure transducer

• US 4,926,696 A
• Filed: 11/19/1986
• Issued: 05/22/1990
• Est. Priority Date: 11/19/1986
• Status: Expired due to Fees

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Mehregany, Mehran, Warkentin, David J., Senturia, Stephen D., Haritonidis, Joseph H.
• Primary Examiner(s): WOODIEL, DONALD
• Application Number:
  US06/932,780
• Time in Patent Office: 1,280 Days
• Field of Search: 73/705, 73/723, 73/753, 250/231 P, 250/231 R, 250/226, 356/352, 356/357, 356/358, 29/569 L
• US Class Current: 73/705
• CPC Class Codes: G01L 9/0079 with Fabry-Perot arrangements
• CPC Class Codes: H04R 23/008 using optical signals for detecting or generating sound

Abstract

A thin diaphragm receives pressure across one side and faces a beam splitter on the other side. The beam splitter is integrally attached to the diaphragm and serves as a local optical reference plane for the entire assembly. Coherent light from a light source is partially reflected at the beam splitter. The remainder of the light is reflected from the diaphragm. The reflected beams recombine at a detection point and have a phase difference which is a function of the amount of deflection of the diaphragm. The detected recombined beams are indicative of the deflection of the diaphragm. Optical calibration of the aseembly is a function of the distance between the diaphragm and beam splitter which remains as predefined because the beam splitter is integral with the diaphragm. A vent in the small cavity formed between the diaphragm and beam splitter enables the diaphragm to sense small pressures with increased sensitivity. Through micro-fabrication techniques, the diaphragm is made sensitive to dynamic and static pressure. Detection of the thermal expansion of the assembly as well as deflection of the diaphragm enables a sensed pressure measurement as a differential between the detected thermal expansion and deflection.

Claims

1. A diaphragm transducer involving Michelson-type interferometry comprising:

a diaphragm micromachined into a substrate, the diaphragm being responsive to pressure;

an optical surface connected to the substrate with a defined gap between the diaphragm and the optical surface, wherein one of the diaphragm and the surface is a transparent member and the other is a reflective member, where said transparent member serves as a fixed local reference plane by splitting a coherent source light beam into a locally reflected beam part and a transmitted beam part, the locally reflected beam part being immediately reflected from and the transmitted beam part being transmitted through a common surface of the transparent member such that the transmitted beam part of the split source beam is reflected off said reflective member and transmitted back through the transparent member, and the locally reflected beam part of the split source beam is reflected locally off the transparent member in a direction away from the reflective member to interfere with said transmitted beam part transmitted back through the transparent member after being reflected off the reflective member, the interference being indicative of the amount of deflection of the diaphragm due to a pressure applied across the diaphragm; and

light detector means for detecting the interfering light and producing an indication of the amount of deflection.

2. A diaphragm transducer as claimed in claim 1 wherein the optical surface and diaphragm are connected so as to form an integral unit such that said optical surface and diaphragm do not move relative to each other side from deflection of the diaphragm under pressure but rather move as a unit and thereby maintain the gap as initially defined.

3. A diaphragm transducer as claimed in claim 2 wherein the optical surface is connected to the diaphragm by a substrate which serves as a spacing layer and determines the nominal dimension of the gap.

4. A diaphragm transducer as claimed in claim 1 wherein when the diaphragm is the reflective member, said diaphragm has a reflective surface comprising a metallic layer.

5. A diaphragm transducer as claimed in claim 1 wherein the light source is attached to the optical surface.

6. A diaphragm transducer as claimed in claim 5 wherein said light detector is attached to the optical surface.

7. A diaphragm transducer as claimed in claim 6 wherein said light source and light detector involve fiber optics.

8. A diaphragm transducer as claimed in claim 1 wherein the transducer is dimensioned such that the diaphragm has a diameter in the range of about 100 to 10,000 microns and has a thickness in the range of about 1 to 100 microns and the gap has a dimension in the range of about 100 to 1000 microns between the diaphragm and the optical surface.

9. A diaphragm transducer as claimed in claim 1 wherein the source light is a laser beam.

10. A diaphragm transducer as claimed in claim 9 wherein the laser is attached to the optical surface.

11. A diaphragm transducer as claimed in claim 1 further including fiber optic means to provide the coherent source light.

12. A diaphragm transducer as claimed in claim 1 wherein the light detector means includes fiber optics.

13. A diaphragm transducer as claimed in claim 1 wherein the optical surface is connected to the diaphragm leaving a small vent which allows the gap to communicate with ambient.

14. A diaphragm transducer as claimed in claim 1 wherein the light detector means includes a linear array of detectors.

15. A diaphragm transducer involving Michelson-type interferometry comprising:

a micromachined diaphragm and an optical surface positioned opposite each other across a chamber, the diaphragm and surface being integrally mounted, wherein one of the diaphragm and surface is a transparent member which serves as a fixed local reference plane by splitting a coherent light into a locally reflected beam part and a transmitted beam part and the other is a reflective member;

illuminating means for illuminating the reflective member through a common surface of the transparent member such that coherent light transmitted through the transparent member and reflected from the reflective member back through the transparent member intersects coherent light immediately reflected from the common surface of the transparent member in a direction away from the reflective member, the light intersecting at a detection area in interference relationship; and

light detector means for providing an indication of the light interference at the detection area as an indication of deformation of the diaphragm.

16. A diaphragm transducer as claimed in claim 15 wherein the diaphragm has a metallic surface.

17. A diaphragm transducer as claimed in claim 15 wherein the illuminating means is integrally connected to the device.

18. A diaphragm transducer as claimed in claim 17 wherein the light detector means are integrally related to the device.

19. A diaphragm transducer as claimed in claim 17 wherein the illuminating means is a laser.

20. A diaphragm transducer as claimed in claim 17 wherein the illuminating means include fiber optics.

21. A diaphragm transducer as claimed in claim 20 wherein the light detector means include fiber optics.

22. A diaphragm transducer as claimed in claim 15 wherein the illuminating means is a laser.

23. A diaphragm transducer as claimed in claim 15 wherein the illuminating means includes fiber optics.

24. A diaphragm transducer as claimed in claim 15 wherein the light detector means includes fiber optics.

25. A diaphragm transducer as claimed in claim 15 further including a vent which allows the chamber to communicate with ambient.

26. A diaphragm transducer as claimed in claim 15 wherein the light detector means include a linear array of light detectors.

27. A diaphragm transducer involving Michelson-type interferometry comprising:

a diaphragm and an end of an optic fiber, serving as a fixed local reference plane by splitting light into a locally reflected beam part and a transmitted beam part, positioned opposite each other across a gap, the diaphragm and fiber end being integrally mounted, wherein light emitted from the fiber end is reflected from the diaphragm back into the fiber end such that the reflected light intersects light which was immediately reflected at the fiber end in a direction back through the optic fiber, the intersection forming an interference indicative of the deformation of the diaphragm; and

light detecting means for providing an indication of the deformation of the diaphragm, said detecting means receiving the interference at an opposite end of the optic fiber.

28. A diaphragm transducer involving Michelson-type interferometry comprising:

a substrate having a diaphragm micromachined therein, the diaphragm being responsive to pressure;

an optical surface connected to the substrate with a defined gap between the diaphragm and the optical surface, wherein one of the diaphragm and the surface is a transparent member and the other is a reflective member, where said transparent member serves as a fixed local reference plane by splitting a coherent source light beam into a transmitted part and a locally reflected part, the transmitted part of the split beam being transmitted through the transparent member to the reflective member and reflected off said reflective member back through the transparent member and the locally reflected part of the split beam being immediately reflected off the transparent member in a direction away from the reflective member to interfere with said transmitted part transmitted back through the transparent member after being reflected off the reflective member, the interference being indicative of the amount of deflection of the diaphragm due to a pressure applied across the diaphragm, the coherent source light beam being from a light source attached to the optical surface; and

light detector means for detecting the interfering light and producing an indication of the amount of deflection.

29. A diaphragm transducer as claimed in claim 28 wherein the light detector is attached to the optical surface.

30. A diaphragm transducer involving Michelson-type interferometry comprising:

a substrate having a diaphragm micromachined therein, the diaphragm being responsive to pressure;

an optical surface connected to the substrate with a defined gap between the diaphragm and the optical surface, wherein one of the diaphragm and the surface is a transparent member and the other is a reflective member, where said transparent member serves as a fixed local reference plane by splitting a laser beam into a transmitted part and a locally reflected part, the transmitted part of the split beam being transmitted through the transparent member to the reflective member and reflected off said reflective member back through the transparent member, and the locally reflected part of the split beam being immediately reflected off the transparent member in a direction away from the reflective member to interfere with said transmitted part transmitted back through the transparent member after being reflected off the reflective member, the interference being indicative of the amount of deflection of the diaphragm due to a pressure applied across the diaphragm, the laser being attached to the optical surface; and

light detector means for detecting the interfering light and producing an indication of the amount of deflection.

31. A diaphragm transducer involving Michelson-type interferometry comprising:

a substrate having a diaphragm micromachined therein, the diaphragm being responsive to pressure;

an optical surface connected to the substrate with a defined gap between the diaphragm and the optical surface, wherein one of the diaphragm and the surface is a transparent member and the other is a reflective member, wherein said transparent member serves as a fixed local reference plane by splitting a coherent source light beam into a transmitted part and a locally reflected part, the transmitted part of the split beam being transmitted through the transparent member to the reflective member and reflected off said reflective member back through the transparent member, and the locally reflected part of the split beam being immediately reflected off the transparent member in a direction away from the reflective member to interfere with said transmitted part transmitted back through the transparent member after being reflected off the reflective member, the interference being indicative of the amount of deflection of the diaphragm due to a pressure applied across the diaphragm; and

light detector means for detecting the interfering light and producing an indication of the amount of deflection, the light detector means having a linear array of detectors.

32. A diaphragm transducer involving Michelson-type interferometry comprising:

a micromachined diaphragm and an optical surface positioned opposite each other across a chamber, the diaphragm and surface being integrally mounted, wherein one of the diaphragm and surface is a transparent member, which serves a fixed local reference plane by splitting a coherent light into a locally reflected beam part and a transmitted beam part and the other is a reflective member;

illuminating means for illuminating the reflective member through the transparent member such that coherent light reflected from the reflective member back through the transparent member intersects coherent light immediately reflected from the transparent member in a direction away from the reflective member, the light intersecting at a detection area in interference relationship; and

light detector means for providing an indication of the light interference at the detection area as an indication of deformation of the diaphragm, the light detector means including a linear array of light detectors.