Laser interferometer system for monitoring and controlling IC processing

• US 4,927,485 A
• Filed: 07/28/1988
• Issued: 05/22/1990
• Est. Priority Date: 07/28/1988
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated Santa Clara CA
• Original Assignee: Applied Materials Incorporated
• Inventors: Zhang, Wesley W., Hartlage, Robert P., Cheng, David
• Primary Examiner(s): Schor, Kenneth M.
• Assistant Examiner(s): BURNS, TODD
• Application Number:
  US07/225,158
• Time in Patent Office: 663 Days
• Field of Search: 156/626, 156/345, 156/643, 156/627, 356/355, 356/357, 422/68
• US Class Current: 156/345.25
• CPC Class Codes: G01B 11/22 for measuring depth
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge

Abstract

A laser end point detector incorporating adjustable-focus, variable-orientation detection optics for monitoring different types of structures such as laser-transparent thin films, isolated trenches or holes and patterned arrays of trenches or holes is disclosed. A collector lens package comprising a laser and a focusing lens are mounted in a hole in a collector lens which is pivotally mounted for selectively focusing zero, first and higher orders of diffractions reflected from the wafer onto an associated detector to monitor the etching of different types of structures. For example, zero order diffraction signals are used to monitor the etching of large target areas in transparent thin films or of non-patterned trenches or holes. First order (or higher) diffraction signals are used for monitoring the etching of patterned features which effect a two-dimensional diffraction grating, such as the capacitor holes in dynamic random access memories.

Claims

1. A laser interferometer system for monitoring the etching of a workpiece, comprising:

a laser for providing laser light; and

for positioning a workpiece such that laser light from said laser is reflected off of said workpiece;

detecting means for detecting laser light reflected from a surface of the workpiece;

means for analyzing the detected light to monitor at least one of etch rate, etch depth and etch-through of a selected layer of the workpiece; and

, a collector lens mounting the laser within said collector lens;

means for mounting said collected lens in said interferometer system, such that said collector lens is pivotally movable relative to said workpiece surface to focus selected diffraction orders of light reflected from said workpiece surface into said detecting means.

2. The system of claim wherein said collector lens further mounts a lens within said collector lens for focusing light from the laser onto said workpiece surface.

3. A reactor system for etching a workpiece and automatically terminating etching upon reaching a given condition selected from a predetermined etch depth and etch-through of a selected layer on the workpiece, comprising:

a chamber for etching a workpiece therein, said chamber having a window formed in one wall thereof; and

a laser interferometer system mounted adjacent said window and immediately outside said chamber and comprising a laser unit oriented for directing a beam of coherent light through said window onto a layer on said workpiece;

means for positioning a workpiece such that laser light from said laser unit is reflected off of said workpiece;

detector means for detecting laser light reflected from the workpiece;

a collector lens mounting the laser unit within said collector lens;

means for mounting said collector lens in said interferometer system, said collector lens being pivotally mounted adjacent said window relative to said workpiece layer to focus selected diffraction orders of light from said workpiece layer onto said detector; and

means responsive to signals from said detector for terminating etching upon reaching a given condition selected from a given etch depth and etch-through of said selected layer.

4. The system of claim 3, wherein said collector lens further mounts a lens within said collector lens for focusing light from the laser unit onto said workpiece.