Insulating arrangement for optical insulation of integrated components and the method of manufacture
First Claim
1. An arrangement for optical insulation of an optical component on a substrate for integrated optical devices, said arrangement comprising insulating means for insulating a substrate region from a remaining portion of the substrate, said insulating means being formed by at least two slots formed in the substrate and extending obliquely in from a substrate surface to intersect each other in the interior of the substrate to form a substrate region therebetween having a monolithic connection to the remaining portion of the substrate at least at one end, said substrate region having a size determined by the spacing of the slots at the surface of the substrate and a length defined by the length of the two slots.
1 Assignment
0 Petitions
Accused Products
Abstract
An isolating arrangement for isolating a portion of a substrate from the remaining portions of the substrate, characterized by the arrangement comprising a pair of obliquely extending slots which merge with each other in the interior of the substrate to isolate a portion or region of the substrate from the remaining portion, except at least one end of the portion extending between the slots. The slots are preferably formed by a laser-induced, wet-chemical etching and, subsequent to forming the slots, they can be filled with a material, such as metal or a ternary absorber material, to increase the isolation of the substrate region or portion.
-
Citations
6 Claims
- 1. An arrangement for optical insulation of an optical component on a substrate for integrated optical devices, said arrangement comprising insulating means for insulating a substrate region from a remaining portion of the substrate, said insulating means being formed by at least two slots formed in the substrate and extending obliquely in from a substrate surface to intersect each other in the interior of the substrate to form a substrate region therebetween having a monolithic connection to the remaining portion of the substrate at least at one end, said substrate region having a size determined by the spacing of the slots at the surface of the substrate and a length defined by the length of the two slots.
Specification