Optical pressure-sensing system using optical resonator cavity

• US 4,933,545 A
• Filed: 12/30/1985
• Issued: 06/12/1990
• Est. Priority Date: 12/30/1985
• Status: Expired due to Term

• Current Assignee: NetTest North America, Inc. (Anritsu Corporation)
• Original Assignee: MetriCor, Inc. (Constellation Software Incorporated)
• Inventors: Saaski, Elric W., Mitchell, Gordon L., Hartl, James C.
• Primary Examiner(s): PHAM, HOA Q
• Assistant Examiner(s): PHAM, HOA Q
• Application Number:
  US06/815,355
• Time in Patent Office: 1,625 Days
• Field of Search: 250/227, 250/231 P, 250/231 R, 250/226, 73/705, 73/717, 73/722
• US Class Current: 250/227.14
• CPC Class Codes: G01L 11/02 by optical means
• CPC Class Codes: G01L 9/0079 with Fabry-Perot arrangements
• CPC Class Codes: Y10S 72/705 Vehicle body or frame straightener

Abstract

An optical pressure-sensing system in which an optical beam splitter couples input light from a light source to an optically resonant pressure sensor and couples output light reflected from the sensor to a light detector. The light detector may divide the output light into bands having different wavelengths and then take the ratio of the light in one band to the light in the other band in order to provide an output that is insensitive to various spurious responses in the system. The optical beam splitter may be formed by two pairs of graded refractive index lenses. A partially reflective, partially transmissive mirror is sandwiched between the lenses of one pair, while a dichroic mirror is sandwiched between the second pair. The pairs of lenses are placed in abutting relationship to each other. The optical beam splitter may also be formed by a block of transparent material having a partially reflective, partially transmissive mirror on one edge. The optical pressure sensor is formed by a transparent substrate having a cylindrical recess and a resilient diaphragm positioned over the recess to form an optically resonant cavity. Differential pressure may be sensed by placing a second substrate having a cylindrical recess over the side of the diaphragm opposite from the first substrate. The optical pressure sensor may be specifically adapted for use as a microphone by utilizing a relatively thick cavity having a pedestal projecting from the substrate close to the diaphragm to form an optically resonant cavity. The optical pressure sensor may also sense gas density by filling the optically resonant cavity with the gas being measured having a pressure at a predetermined density and temperature that matches the pressure of the gas being measured at that same density and temperature.

Claims

1. An optical pressure-sensing system, comprising:

an airtight, optical resonator cavity formed by a substrate having a transparent base with a planar inner surface, a resilient diaphragm and a sidewall extending between said substrate and diaphragm to surround said cavity, said diaphragm having a planar inner surface facing the inner surface of said substrate, the distance between the inner surfaces of said base and diaphragm being selected so that light having a predetermined wavelength resonates in said cavity;

a light source generating light having at least one wavelength on a resonant cycle of said optical resonator;

a light detector; and

an optical system conveying light from said light source to the outer surface of the base of said substrate and the from the outer surface of the base of said substrate to said light detector so that light entering said cavity resonates at a frequency that is a fraction of the distance between the planar inner surfaces of said diaphragm and substrate, said light detector generating an electrical signal corresponding to a characteristic of the optically resonant frequency of said cavity, whereby the electrical output of said light detector varies as a function of the deflection of said diaphragm, resulting from the pressure differential across said diaphragm.

2. The optical pressure-sensing system of claim 1, further including a layer of reflective material coating the planar inner surface of said base.

3. The optical pressure-sensing system of claim 1 wherein said pressure sensor is specifically adapted to sense the density of a gas, said pressure sensor further including a gas filling said airtight cavity, said gas having a predetermined pressure at a predetermined temperature corresponding to the pressure of a gas being measured at a predetermined density and temperature.

4. The optical pressure-sensing system of claim 1 wherein the distance between the planar inner surface of base and the planar inner surface of said disphragm varies at different areas of said diaphragm thereby increasing the operating range of said sensor.

5. The optical pressure-sensing system of claim 1 wherein the zero differential pressure distance between the inner surfaces of said diaphragm and the base of said substrate is on the order of one micrometer, and wherein said diaphragm is ionically bonded to the sidewalls of said substrate.

6. The optical pressure-sensing system of claim 1 wherein said pressure sensor is specifically adapted for use as a microphone to respond to variations in pressure occurring at audio frequencies, said pressure sensor further including a pedestal projecting axially toward said diaphragm from the planar inner surface of said base at a location where light is conveyed to said base through said fiberoptic waveguide system, said pedestal having a planar surface that is parallel to the planar inner surface of said diaphragm and spaced from said diaphragm by a distance that is substantially less than the space between the inner surface of said diaphragm and the inner surface of said base, said sensor further including a fluid conduit extending between the optical resonator cavity and an external pressure port.

7. The optical pressure-sensing system of claim 1 wherein both surfaces of said diaphragm are planar and wherein said sensing system further includes a second substrate including a base having a planar inner surface surrounded by sidewalls, said sidewalls being pneumatically sealed to or part of said diaphragm so that said diaphragm and substrate form a second airtight cavity.

8. The optical pressure-sensing system of claim 1, further including an optical beam splitter coupling light from a first port to a third port and from said third port to a second port, said first port communicating with said light source, said second port communicating with said light detector, and said third port communicating with the base of said substrate, whereby light from said light source is coupled to the base of said substrate and from the base of said substrate to said light detector.

9. The optical pressure-sensing system of claim 5, further including a fluid conduit extending between said optical resonator cavity and an external pressure port, said conduit being formed by a radial extension of said cavity projecting into said substrate sidewall and then to an external surface.

10. The optical pressure-sensing system of claim 9 wherein said base, sidewalls and airtight cavity are formed by a cylindrical recess in said substrate, and wherein said radial extension is co-planar with the inner surface of said base, said diaphragm overlying said radial extension to isolate said radial extension from the external environment, said fluid conduit further including a passage extending in an axial direction through said substrate from an external surface of said substrate to said radial extension, thereby allowing external fluid communication with said airtight cavity without interfering with the pressure-induced deflection characteristics of said diaphragm.

11. The optical pressure-sensing system of claim 6 wherein said base, sidewalls and airtight cavity are formed by a cylindrical recess in said substrate, and wherein said fluid conduit is formed by a radial extension of said recess that is co-planar with the inner surface of said base, said diaphragm overlying said radial extension to isolate said radial extension from the external environment, said fluid conduit further including a passage extending in an axial direction from said external pressure port to said radial extension.

12. The optical pressure-sensing system of claim 11 wherein said passage extends through said diaphragm at a location where said diaphragm overlies said sidewalls.

13. The optical pressure-sensing system of claim 7, further including a first fluid conduit communicating between said first airtight cavity and an external first pressure port, and a second fluid conduit communicating between said second airtight cavity and an external second pressure port, said fluid conduits being formed by respective radial extensions of each airtight cavity projecting into the respective sidewall and then to an external surface.

14. The optical pressure-sensing system of claim 7 wherein said fiberoptic waveguide system includes a length of fiberoptic waveguide and a lens mounted between one end of said waveguide and the base of said substrate, said lens having an axis that is coaxial with the axis of said waveguide and perpendicular to the planar inner surface of said substrate base, said lens focusing light from said waveguide onto the base of said substrate.

15. The optical pressure-sensing system of claim 13 wherein said bases, sidewalls and airtight cavities are formed by respective cylindrical recesses in said first and second substrates, said diaphragm overlying said radial extensions to isolate said radial extensions from the external environment, each of said fluid conduit further including a bore extending in an axial direction through the respective substrate from an external surface of said substrate to the respective radial extension, thereby allowing external fluid communication with said airtight cavities without interfering with the pressure-induced deflection characteristics of said diaphragm.

16. The optical pressure-sensing system of claim 13, further including a layer of reflective material coating the planar inner surface of the base of said first substrate and an anti-reflective material coating the surface of said diaphragm facing toward the base of said second substrate.

17. The optical pressure-sensing system of claim 14 wherein said lens is a short focal length lens having its center positioned on a line extending along the axis of said fiberoptic waveguide, thereby minimizing incident light reflected back from said lens.

18. The optical pressure-sensing system of claim 14, further including a second lens positioned between said first lens and the end of said fiberoptic waveguide, said second lens transforming light diverging from said fiberoptic waveguide into parallel rays that are incident on said first lens, said first lens and said substrate being mounted in a first housing, and said second lens and the end of said fiberoptic waveguide being mounted in a second housing, said first and second housings being detachable, connected to each other.

19. The optical pressure-sensing system of claim 18 wherein said second lens is a graded refractive index lens.

20. The optical pressure-sensing system of claim 8 wherein said optical system includes a first fiberoptic waveguide extending from said light source to said first port of said optical beam splitter, a second fiberoptic waveguide extending from said second port of said optical beam splitter to said light detector, and a third fiberoptic waveguide extending between said third port of said optical beam splitter and the base of said substrate, whereby light is coupled from said light source to the base of said substrate through said first and third fiberoptic waveguides and from the base of said substrate to said light detector through said third and second fiberoptic waveguides.

21. The optical pressure-sensing system of claim 8 wherein said light source generates light at a minimum of two wavelengths on a resonant cycle of said optical resonator, and wherein said light detector comprises:

a second optical beam splitter having a first port receiving light from said second fiberoptic waveguide and coupling said light from its first port to second and third ports;

a short wavelength pass filter receiving light from the second port of said second optical beam splitter, said filter passing light from said light source of at least one wavelength to a greater degree than light from said light source having longer wavelengths;

a long wavelength pass filter receiving light from the third port of said second optical beam splitter, said filter passing light from said light source of at least one wavelength to a greater degree than light from said light source having shorter wavelengths;

first and second photodetectors receiving light from said short and long wavelength pass filters, respectively, said photodetectors generating respective electrical outputs corresponding to the amplitude of the light received by said photodetectors; and

a ratio detector receiving the electrical outputs from said first and second photodetectors and generating an electrical output corresponding to the ratio thereof, whereby the output of said ratio detector varies in amplitude according to the microshifts in the resonant frequency of said optical resonator responsive to variations in the differential pressure across said resilient diaphragm.

22. The optical pressure-sensing system of claim 8, further including a second light detector and a second light source emitting light having a range of wavelengths different from the range of wavelengths of the light emitted from said first light source, and wherein said optical beam splitter comprises a transparent rectangular block having first and second partially reflective, partially transmissive mirrors on respective opposed edges of said block, and wherein light from said first light source is directed onto said first mirror at an angle selected so that a portion of said light is reflected to the base of said substrate, and wherein light from said second light source is directed onto said second mirror from a position and at an angle that is colinear with the path of light from said first light source from said first mirror to the base of said substrate, whereby light from said second light source passes sequentially through said second and first mirrors, and wherein light from the base of said substrate is directed onto said first mirror so that at a least a portion of said light is transmitted through said first mirror into the interior of said block and is reflected from said second mirror on at least one of the edges of said block toward first and second exit ports in sequence, said first exit port being coated with a material selectively passing light having a range of wavelengths substantially corresponding to the range of wavelengths of the light emitted from said first light source and reflecting light having a range of wavelengths substantially corresponding to the range of wavelengths of the light emitted from said second light source, said first light detector being positioned adjacent said first exit port and said second light detector being positioned adjacent said second exit port, whereby said first light detector receives light from said first light source after being modulated by said optical resonator, and said second light detector receives light from said second light source after being modulated by said optical resonator.

23. The optical pressure-sensing system of claim 8 wherein said optical beam splitter comprises first and second pairs of graded refractive index lenses, each of which has a surface that is substantially exposed and an opposed surface that is symmetrically positioned with respect to a surface of the other lens of each pair, said opposed surfaces contacting opposite faces of a partially reflective, partially transmissive mirror so that light incident on the exposed surface of each lens is coupled to a symmetrically positioned location on the exposed surface of the other lens of each pair, an exposed surface of said first pair of lenses abutting an exposed surface of a lens in the second pair of lenses, whereby said first and third ports are formed on one non-abutting exposed surface of said first pair of lens at locations that are symmetrically positioned with respect to each other, and said second port is formed on the non-abutting exposed surface of said second pair of lenses at a location that corresponds to the location of said first port.

24. The optical pressure-sensing system of claim 8, further including a second light detector communicating with a fourth port of said optical beam splitter, said optical beam splitter coupling light from said third port to said fourth port.

25. The optical pressure-sensing system of claim 8 wherein said optical beam splitter comprises a transparent rectangular block having a partially reflective, partially transmissive mirror on at least a portion of one edge thereof, and wherein light from said light source is directed onto said mirror at an angle selected so that a portion of the light from said light source is reflected to the base of said substrate, and light from the base of said substrate is directed onto said mirror so that at least a portion of said light is transmitted into the interior of said block and is reflected from at least one of the edges thereof and through an exit port on one of said edges, said light detector being positioned adjacent said exist port so that light reflected through said exit port is directed onto said light detector.

26. The optical pressure-sensing system of claim 23, further including a light dump receiving light from the abutting exposed surfaces of said first pair of lenses at a location corresponding to the location of said third port, thereby reducing the light from said light source reflected to said first and second light sensors.

27. The optical pressure-sensing system of claim 24 wherein said optical beam splitter comprises first and second pairs of graded refractive index lenses, each of which has a surface that is substantially exposed and an opposed surface that is symmetrically positioned with respect to a surface of the other lens of each pair, said opposed surfaces contacting opposite faces of a partially reflective, partially transmissive mirror so that light incident on the exposed surface of each lens is coupled to a symmetrically positioned location on the exposed surface of the other lens of each pair, an exposed surface of said first pair of lenses abutting an exposed surface on the second pair of lens, whereby said first and third ports are formed on one non-abutting exposed surface of said first pair of lenses at locations that are symmetrically positioned with respect to each other, said second port is formed on the non-abutting exposed surface of said second pair of lenses at a location that corresponds to the location of said first port, and said fourth port is formed at the abutting exposed surface of said second pair of lenses at a location that corresponds to the location of said second port.

28. The optical pressure-sensing system of claim 27, further including a light dump receiving light from the abutting exposed surface of said first pair of lenses at a location corresponding to the location of said third port, thereby reducing the light from said light source reflected to said first and second light sensors.

29. The optical pressure-sensing system of claim 25, further including a reflective coating on the exterior of said block at each area in which light is reflected from said edge.

30. The optical pressure-sensing system of claim 25 wherein a portion of the light from said light source passes through said partially reflective, partially transmissive mirror and is reflected from at least one of the edges of said block, and wherein a light-absorptive coating is placed in the exterior of said block at each area in which light from said light source is reflected from said edge.

31. The optical pressure-sensing system of claim 25, further including an aperture and ball lens positioned in sequence in the light path from said mirror to the base of said substrate to control the numerical aperture of light coupled to the base of said substrate and to reduce the light backscattered to said light detector.

32. The optical pressure-sensing system of claim 25 wherein light transmitted from the base of said substrate into the interior of said block is further reflected through a second exit port on one edge of said block, and wherein said optical pressure-sensing system further includes a second light detector receiving light from said second exit port.

33. The optical pressure-sensing system of claim 32 wherein a dichroic reflective coating is placed on the exterior of said block at said first exit port so that light from said light source of one range of wavelengths is directed through said first exist port onto said first light detector and light from said light source having another range of wavelengths is reflected by the dichroic mirror at said first exit port through said second exit port and onto said second light detector.

34. The optical pressure-sensing system of claim 14 wherein said lens is mounted in a cylindrical housing having first and second cylindrical flanges projecting away from each other, said substrate being mounted in said first flange and the end of said fiberoptic waveguide being mounted in said second flange.

35. An optical pressure sensor, comprising:

an airtight, optical resonator cavity formed by a substrate having a transparent base with a planar inner surface, a resilient diaphragm and a sidewall extending between said substrate and diaphragm to surround said cavity, said diaphragm having a planar inner surface facing the inner surface of said substrate, the distance between the inner surfaces of said base and diaphragm being selected so that light having a predetermined wavelength resonates in said cavity;

a fluid conduit extending between said optical resonator cavity and an external pressure port, said conduit being formed by a radial extension of said cavity projecting into said substrate sidewall and then to an external surface.

36. The optical pressure sensor of claim 35 wherein said base, sidewalls and airtight cavity are formed by a cylindrical recess and wherein said radial extension is co-planar with the inner surface of said base, said diaphragm overlying said radial extension to isolate said radial extension from the external environment, said fluid conduit further including a passage extending in an axial direction through said substrate from an external surface of said substrate to said radial extension, thereby allowing external fluid communication with said airtight cavity without interfering with the pressure-induced characteristics of said diaphragm.

37. The optical pressure sensor of claim 35, further including a layer of partially reflective material coating the planar inner surface of said base.

38. An optical pressure sensor comprising:

a first substrate having a transparent base with a planar inner surface;

a resilient diaphragm having a planar inner surface, the distance between the inner surfaces of said base and diaphragm being selected so that said cavity forms an optical resonator;

a first sidewall extending between said base and diaphragm and, together with said base and disphragm, forming a first airtight cavity;

a second substrate;

a second sidewall extending between said second substrate and said diaphragm on the surface opposite the surface to which said first sidewall extends so that said diaphragm, second substrate, and second sidewalls form a second airtight cavity;

first and second fluid conduits communicating between respective first and second fluid ports and said first and second airtight cavities; and

means for determining the deflection of said diaphragm solely from the optical resonance in said first airtight cavity.

39. The optical pressure sensor of claim 38 wherein said first and second fluid conduits are formed by respective arms of each airtight cavity projecting into the respective sidewall and then to an external surface.

40. The optical pressure sensor of claim 39, further including a layer of partially reflective material coating the planar inner surface of the base of said first substrate and an anti-reflective material coating the surface of said diaphragm facing toward the base of said second substrate.

41. A microphone responding to variations in pressure occurring at audio frequencies, said microphone comprising:

a substrate having a transparent base;

a pedestal mounted on and projecting axially away from the base of said substrate at a location where light is adapted to be conveyed to said base, said pedestal having a planar surface;

a resilient diaphragm having a planar inner surface mounted over the planar surface of said pedestal, the distance between the inner surface of said diaphragm and the planar surface of said pedestal being selected to form an optical resonator therebetween;

a sidewall extending between said base and diaphragm to form an airtight, optically resonant cavity surrounded by said sidewall; and

a fluid conduit extending between said airtight cavity and an external pressure port.

42. The microphone of claim 41 wherein said base, sidewall and airtight cavity are formed by a cylindrical recess in said substrate, and wherein said fluid conduit is formed by a radial extension of said recess, said diaphragm overlying said radial extension to isolate said radial extension from the external environment, said fluid conduit further including a passage extending in an axial direction from said external pressure port to said radial extension.

43. The microphone of claim 42 wherein said passage extends through said diaphragm at a location where said diaphragm overlies said sidewalls.

44. A gas density sensor specifically adapted to sense the density of a gas in an enclosed vessel, said gas density sensor comprising:

a substrate having a transparent base and a planar inner surface;

a resilient diaphragm having a planar inner surface mounted over the inner surface of said base, the distance between the inner surfaces of said base and diaphragm being selected so that said cavity forms an optical resonator; and

a sidewall extending between said base and diaphragm so that said base, diaphragm and sidewall form an airtight, optically resonant cavity, said airtight cavity being filled with a gas having a predetermined pressure at a predetermined temperature corresponding to the pressure of the gas in said vessel at a predetermined density.

45. The gas density sensor of claim 44, further including a layer of reflective material coating the planar inner surface of said base.