Higher order transverse mode suppression in surface acoustic wave resonators

• US 4,933,588 A
• Filed: 12/23/1988
• Issued: 06/12/1990
• Est. Priority Date: 12/23/1988
• Status: Expired due to Fees

• Current Assignee: Raytheon Company (Rtx Corporation)
• Original Assignee: Raytheon Company (Rtx Corporation)
• Inventors: Greer, James A.
• Primary Examiner(s): Budd, Mark O.
• Application Number:
  US07/289,132
• Time in Patent Office: 536 Days
• Field of Search: 310/312, 310/313 R, 310/313 B, 310/313 D, 333/151, 333/153, 333/194, 333/195, 29/25.35
• US Class Current: 310/313.00D
• CPC Class Codes: H03H 3/10 for obtaining desired frequency or temperature coefficient
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

A technique for adjusting the frequency of odd mode transverse waves propagating in a SAW device is described. A pair of localized regions of frequency determining trimming material are deposited onto selected portions of a surface wave propagating surface, to provide localized regions on said surface where the odd order transverse mode has energy maxima. These regions change the acoustic properties and hence the velocity characteristics of the surface wave propagating surface in said regions. The frequency of the odd mode transverse wave is changed accordingly and is preferably changed to match that of the fundamental transverse propagating wave. This decreases the insertion loss of the device at the fundamental frequency and eliminates the odd mode transverse wave propagation characteristic within the operating frequency range of the resonator. In a preferred embodiment, the SAW device further includes an acoustically matched piezoelectric transparent cover disposed over the surface wave propagating surface having disposed thereon a trim pad which is selectively removed to provide the localized regions and thus the localized alterations in the acoustic properties of the surface acoustic wave device.

Claims

1. A surface acoustic wave device comprising:

a base having a surface for supporting surface wave propagation including at least a transducer coupled to said surface wave propagation surface; and

means disposed on said surface wave propagation surface wherein an odd order transverse mode has maximal energy for locally changing the surface wave velocity characteristic to adjust the frequency of said odd order transverse mode to be substantially equal to that of a fundamental propagation mode.

2. The device of claim 1 wherein said means for locally changing surface wave velocity comprises a pair of spaced regions of material disposed on said surface.

3. The device of claim 2 wherein said pair of regions of material are disposed over a relatively minor portion of an acoustic aperture of said transducer.

4. The device of claim 3 wherein said odd mode transversal wave is a third order transverse wave, and the frequency thereof is reduced to be substantially equal to that of the fundamental mode.

5. The device of claim 3 wherein said regions of material are displaced away from central portions of an acoustic aperture of said transducer, towards peripherial portions of said acoustic aperture.

6. A method of adjusting the third order transverse mode frequency of a SAW resonator comprises the step of:

depositing a pair of layers of material on a corresponding pair of regions of the SAW resonator surface where said third order transverse mode has energy maxima to lower the frequency of said mode to be substantially equal to that of a fundamental propagation mode of said resonator.

7. The method of claim 6 wherein said SAW resonator includes a base which supports surface wave propagation having disposed thereon said pair of layers of material;

and

a cover having disposed thereon a pad of material from which the pair of layers were deposited.

8. The method of claim 7 wherein the depositing step further includes the step of:

directing a laser beam through the cover of said SAW resonator towards the pad to ablate from the pad selected portions thereof to form the pair of layers of material on said surface.

9. The method of claim 8 wherein the pad is comprised of three layers including a first dielectric layer disposed on the cover, a metal layer disposed on the dielectric layer, and a second dielectric disposed on the metal layer.

10. A surface acoustic wave resonator comprising:

a base having a surface which supports surface wave propagation including a pair of transducers coupled to said surface wave propagation surface;

a cover disposed over said base, enclosing said surface propagating surface, said cover comprised of a material which is optically transparent to electromagnetic energy generally in the wavelength range of about 0.185 μ

m to 4 μ

m;

a layer of material disposed on an inner portion of said cover and over said surface wave propagation surface in a region thereof disposed between said pair of transducers; and

first and second selected portions of the material of said layer disposed on said surface wave propagating surface in a region of said surface wave propagating surface where an undesired odd order transverse mode has a maximal energy to change the frequency of said odd order transverse mode.

11. The resonator of claim 10 wherein said undesired odd order transverse mode is a third order mode and the frequency thereof is reduced to be substantially equal to that of a fundamental mode.

12. The resonator of claim 11 further comprising layer disposed on and across said surface to adjust the frequency characteristics thereof, including the third order mode and fundamental mode of said device.

13. The resonator of claim 11 further comprising a third portion of the material of the layer disposed on and across said surface to adjust the frequency characteristics of said resonator, including the third order and fundamental modes.