High resolution imagery systems and methods

• US 4,936,665 A
• Filed: 10/13/1987
• Issued: 06/26/1990
• Est. Priority Date: 10/25/1987
• Status: Expired due to Term

• Current Assignee: High Resolution Optics Corporation (Acacia Research Corporation)
• Original Assignee: Theodore R. Whitney
• Inventors: Whitney, Theodore R.
• Primary Examiner(s): NOT, DEFINED
• Assistant Examiner(s): Callaghan, Terry S.
• Application Number:
  US07/108,435
• Time in Patent Office: 987 Days
• Field of Search: 350/440, 350/451, 350/162.16, 350/162.22, 350/574, 350/452, 350/437, 350/447, 350/3.7, 350/162.2, 350/167, 350/3.81, 350/96.19, 356/400
• US Class Current: 359/565
• CPC Class Codes: G02B 27/0037 with diffracting elements G02B27/0056 takes precedence; holographic optical elements G02B5/32; zone systems G02B5/1876
• CPC Class Codes: G02B 27/0075 with means for altering, e.g. increasing, the depth of field or depth of focus
• CPC Class Codes: G02B 27/4211 correcting chromatic aberrations G02B27/0056, G02B27/4222, G02B27/4227 take precedence
• CPC Class Codes: G02B 27/4222 in projection exposure systems, e.g. photolithographic systems
• CPC Class Codes: G02B 5/1876 Diffractive Fresnel lenses; Zone plates; Kinoforms G02B5/1842, G02B5/1847 take precedence; optical systems having diffractive correction means G02B27/0037; Fresnel lenses operating by refraction G02B3/08
• CPC Class Codes: G02B 5/188 Plurality of such optical elements formed in or on a supporting substrate
• CPC Class Codes: G03F 7/70066 Size and form of the illuminated area in the mask plane, e.g. reticle masking blades or blinds
• CPC Class Codes: G03F 7/70583 Speckle reduction, e.g. coherence control or amplitude/wavefront splitting
• CPC Class Codes: G03F 9/7049 Technique, e.g. interferometric

Abstract

The current limits of resolution of multi-element optical systems are exceeded by reducing the number of elements while introducing at the critical aperture a blazed transmission grating having grating rings of low bending power defined by multiple plateaus. By illuminating the optical train with monochromatic light that constitutes a multiplicity of distributed sources having a substantial temporal coherence but spatial incoherence and by varying the slopes and widths of the grating rings, local phase delays are introduced that adjust aberrations in the optical system, providing an aligned composite wavefront. The system and method may be used for presenting an image, as for a wafer stepper, or for viewing an image, as in a microscope.

Claims

1. A system for producing a highly corrected optical image comprising:

substantially monochromatic light source means providing a plurality of light sources having limited spatial coherence and substantial temporal coherence within a distributed light beam area;

an optical system within the path of the light beam and having an aperture stop; and

microlithographic phase transmission grating means at the aperture stop, the grating means including a microstructure comprising a plurality of sets of plateaus, the light beam being disposed to provide light distributed through the optical system and the sets of plateaus of the grating means.

2. The invention as set forth in claim 1 above, wherein the sets of plateaus provide incremental amounts of phase retardation in the light energy from the light source means at the aperture stop.

3. The invention as set forth in claim 2 above, wherein the sets of plateaus comprise concentric circular patterns having non-linearly varying radial widths.

4. The invention as set forth in claim 3 above, wherein the optical system has spherical type aberration and the non-linear patterns of the grating means produce a varying phase retardation as a function of radius, the phase retardation opposing and compensating the spherical type aberration of the optical system.

5. The invention as set forth in claim 4 above, wherein the optical system has a known chromatic dispersion and the chromatic dispersion in the grating means opposes that in the optical system.

6. The invention as set forth in claim 4 above, wherein the sets of non-linear patterns are configured with at least one 180°

phase change at some fraction of the dimension of the aperture stop.

7. The invention as set forth in claim 4 above, wherein the sets of patterns are configured with changes in the sets of plateaus at various incremental radii to produce phase changes in the light, providing a pupil function comprising more than one annular zone.

8. The invention as set forth in claim 4 above, wherein selected ones of the patterns are partially transmissive or opaque in accordance with a selected pupil function.

9. The invention as set forth in claim 1, wherein the grating means bends the light of the wavefront passing through the aperture stop at angles limited to less than approximately 5°

.

10. The invention as set forth in claim 1 above, wherein the system includes means incorporating the light source for providing spatially dispersed point sources of light throughout an area of illumination.

11. The invention as set forth in claim 1 above, wherein the optical system and phase transmission grating means are configured to bend the light into converging planar wavefronts generating narrow elongated illumination along a central axis.

12. The invention as set forth in claim 11 above, wherein the optical system comprises at least one spherical refractive element and the phase transmission grating has a plurality of concentric multi-plateau rings of substantially periodic radial width and spacing.

13. The invention as set forth in claim 12 above, wherein the optical system comprises a microscope for viewing a specimen, the microscope including refractive elements having a degree of tolerated spherical type aberration and the grating means compensating for the spherical type aberration.

14. The invention as set forth in claim 13 above, wherein the optical system further comprises transparent cover means and the grating means further compensates for spherical aberration from the cover means.

15. The invention as set forth in claim 1 above, wherein the optical system comprises a cylindrical lens means and the phase transmission grating comprises a plurality of substantially parallel multi-plateau tracks substantially parallel to the axis about which the cylindrical lens means curves.

16. An optical system for providing a desired light distribution at a chosen surface, the system comprising:

light source means providing a wavefront of light that is temporally coherent to a selected number of waves and of limited spatial coherence;

optical lens means disposed in the path of the light for refracting the light to form a wavefront providing an approximation of the desired light distribution at the chosen surface, the wavefront having local phase variations therein arising from aberrations in the lens means; and

phase plate means including multi-level transmission grating means disposed with the optical lens means for locally phase retarding the wavefront to a substantially smaller degree than the number of waves of temporal coherence to obtain the desired wavefront and light distribution at the chosen surface.

17. The invention as set forth in claim 16 above, wherein the light source means comprises coherent light source means and means responsive to the degree of spatial coherence in the wavefront light for controllably decreasing the spatial coherence in the light from the coherent light source means.

18. An optical system for providing a desired light distribution at a chosen surface, the system comprising:

light source means comprising means for providing pulse sequences of light and providing a wavefront of light that is temporally coherent to a selected number of waves and of limited spatial coherence;

optical lens means disposed in the path of the light for refracting the light to form a wavefront providing an approximation of the desired light distribution at the chosen surface;

phase plate means disposed with the optical lens means for locally phase retarding the wavefront to a substantially smaller degree than the number of waves of temporal coherence to obtain the desired light distribution at the chosen surface;

means responsive to the light for sensing the degree of spatial coherence and;

means responsive to the sensed degree of spatial coherence for controlling the means for decreasing the same.

19. The invention as set forth in claim 18 above, wherein the means for controllably decreasing the spatial coherence comprises a pair of surfaces having randomized phase transmissive patterns in the path of the light and means for moving one of the surfaces relative to the other during the pulse sequences.

20. An optical system for providing a desired light distribution at a chosen surface, the system comprising:

coherent light source means providing a wavefront of light that is temporally coherent to in excess of about 10,000 waves and of limited spatial coherence, the light source means providing of the order of 10² point sources of light on each point at the image plane;

means for controllably decreasing the spatial coherence in the light from the light source means;

optical lens means disposed in the path of the light for refracting the light to form a wavefront providing an approximation of the desired light distribution at the chosen surface, the spherical aberration of the optical lens means being limited to about 75 waves or less maximum difference from a spherical aberration-free condition; and

phase plate means disposed with the optical lens means for locally phase retarding the wavefront to a substantially smaller degree than the number of waves of temporal coherence to obtain the desired light distribution at the chosen surface.

21. A system for precision imaging of light energy comprising:

means providing illumination in the form of a multiplicity of independent light sources of substantially the same wavelength throughout a beam area;

a plurality of refractive lens elements together providing light imaging with a predetermined spherical type aberration; and

transmission grating means cooperative with the refractive lens elements for phase delaying and redirection of waves from the multiplicity of independent light sources to compensate by locally varying phase retardation for the spherical type aberration of the refractive lens elements such that a compensated composite wavefront is provided.

22. The invention as set forth in claim 21 above, wherein the independent light sources are substantially spatially incoherent and temporally coherent to about the order of 10,000 waves.

23. The invention as set forth in claim 21 above, wherein the transmission grating means comprises a system of concentric multi-plateau rings, each providing incremental amounts of phase delay in the illumination passing therethrough to provide of the order of about 1/20th wave precision throughout the composite wavefront.

24. The invention as set forth in claim 23 above, wherein the multi-plateau rings have varying slopes and widths and provide progressively varying phase delays in increments of a maximum that is an integral number.

25. A system for precision adjustment of the shape of the wavefront of a beam of light energy comprising:

means providing illumination in the form of a multiplicity of light sources of substantially the same wavelengths throughout a beam area;

a plurality of refractive lens elements in the path of the beam illumination and together providing light imaging with predetermined aberration characteristics which vary symmetrically as a predetermined function of the ray height at the aperture stop, but providing a high degree of correction for aberration components which vary as the image height or as the angular orientation of the ray meridian at the aperture stop; and

transmission grating means at the aperture stop in the path of the beam illumination and cooperative with the refractive lens elements for phase delay and redirection of the illumination in accordance with a second predetermined function of the ray height at the aperture stop and compensating for the predetermined aberration characteristics of the refractive lens elements which vary symmetrically as a predetermined function of the ray height.

26. The system as set forth in claim 25 above, wherein the aperture stop symmetrical variations which are corrected by the phase plate are spherical type aberrations.

27. A system for providing a precisely compensated monochromatic image on a semiconductor wafer comprising:

a series of refractive lens elements disposed along an optical axis and having an aperture stop, the cumulative spherical type aberration being no greater than about 75 waves and the cumulative chromatic dispersion being positive;

a transmission grating disposed at the aperture stop, the grating having a plurality of rings each with multiple plateaus providing local wavefront compensation for the spherical type aberration and a compensating negative chromatic dispersion for light of a predetermined wavelength; and

illuminating means directing substantially monochromatic light along the optical axis, the substantially monochromatic light being of the predetermined wavelength and having temporal coherence of the order of 10,000 waves and being substantially spatially incoherent.

28. The system as set forth in claim 27 above, wherein the individual plateaus provide incrementally varying amounts of optical wave retardation in the locally impinging areas of light, and wherein the illuminating means provides a plurality of spatially incoherent, phase random, light sources having a bandwidth of the order of 0.03 nm in the ultraviolet region of the spectrum.

29. The system as set forth in claim 28 above, wherein the rings are varied in width and slope to provide a wavelength of optical retardation to compensate locally for wavefront variations in the composite wavefront, wherein the phase relation of the waves is varied in π

phase fashion, and wherein the transmission grating bends the light to a maximum angle of about 5°

.

30. The system as set forth in claim 28 above, wherein the plurality of rings each have progressively varying plateaus and are arranged in selected subsets in which the phase relation in the progressions of the plateaus vary at least one radial region relative to the rings to define a pupil function of at least two zones, and wherein the illuminating means comprises a pulsed laser source.

31. The system as set forth in claim 29 above, wherein the illuminating means comprises an excimer laser, etalon tuning cavity, and phase randomizer means comprising a pair of quasi-random phase plates in the path of the illumination and means for varying the spatial relationship of the light sources relative thereto.

32. The system as set forth in claim 31 above, wherein the phase randomizer means comprises means for sensing the degree of spatial coherence in the light sources, and means responsive to the sensed degree of coherence for introducing varying relative movement of the light sources between the quasi-random phase plates, and wherein the illuminating means is controllable and the system further comprises means responsive to the light energy of the illuminating means for controlling the duration of operation of the illuminating means.

33. An optical system for providing precise aspheric correction of a composite wavefront having aberrations from idealized specifications comprising:

a transmissive blazed grating plate having a microlithographic pattern of incrementally varying narrow tracks, adjacent tracks varying differentially in height, the maximum differential height of the tracks on the plate being proportioned to the ratio of one wavelength of incident monochromatic light at a selected wavelength divided by the difference of the index of refractive of the plate from unity, the widths of the tracks through the pattern being proportioned to provide local phase delay of the wavefront according to a predetermined function for the composite wavefront to effect redistribution of the microstructure of the wavefront, the widths being precise to within about 1/20th wavelength of the monochromatic light; and

means for illuminating the pattern on the plate with monochromatic light of the selected wavelength, the light having predictable periodicity and constituting multiple phase random sources.

34. The invention as set forth in claim 33 above, wherein the monochromatic light is in the ultraviolet region, wherein the tracks are concentric and arranged in periodic sequences in which heights vary progressively, wherein the minimum track widths at the minimum are of the order of 1 micron, and wherein the plate bends the light to a maximum of about 3°

.

35. The invention as set forth in claim 34 above, wherein the system further comprises a number of spherical optical elements in optical combination with the grating plate, the optical elements providing cumulative aberrations and the plate compensating for such aberrations.

36. The invention as set forth in claim 35 above, wherein the system has an aperture stop and the plate is disposed at the aperture stop, wherein the progressive patterns are arranged in subsets of different phase to provide a pupil function comprised of at least two annular zones, and wherein the cumulative aberrations in the spherical lenses that are compensated are principally spherical type aberration and chromatism.

37. The invention as set forth in claim 36 above, wherein there is a pupil function comprised of six annular zones for increase of depth of focus, and wherein the periodicity of the monochromatic light is such that the waves have temporal coherence of at least about 50 times greater than the maximum phase delay, and wherein the multiple phase random sources are such as to provide approximately 10² sources for each point being illuminated.

38. The invention as set forth in claim 37 above, wherein the wavelength of the monochromatic light is at about 248 nm, and wherein the maximum height differential between adjacent plateaus is about 0.427 microns.

39. The invention as set forth in claim 38 above, wherein the tracks are arranged in rings having 8 tracks per ring varying incrementally in 1/8th wavelength optical retardation steps from 0 to 7/8th wave height for rings within each zone.

40. A system for high resolution imagery on an object being illuminated comprising:

an optical system having an aperture stop;

first substantially monochromatic light source means of a given wavelength transmitting through the optical system;

light bending means including a first transmission grating structure disposed at the aperture stop for providing a really distributed varying wave delays in light of the first wavelength transmitted through the optical system to provide an adjusted composite wavefront, said light bending means also including a second transmission grating structure displaced from the first transmission grating structure; and

second monochromatic light source means of a second wavelength illuminating the second transmissive grating structure for alignment of the object being illuminated relative to the optical system.

41. The system as set forth in claim 40 above, wherein the first transmission grating structure is defined by a plurality of concentric tracks in an interior region of the light bending means, and wherein the second transmission grating structure is an annular pattern disposed about the interior region.

42. The system as set forth in claim 41 above, wherein the first and second transmission grating structures each comprise a plurality of concentric rings each defined by a progression of varying height plateaus on a transmissive substrate.

43. The system as set forth in claim 42 above, wherein the first monochromatic light source means operates in the ultraviolet region, and wherein the second monochromatic light source means operates in the red region, and wherein the second monochromatic light source means and the second transmission grating structure provide a finely focused reference beam at an object plane for the image defined by the first monochromatic light source means and the first transmission grating structure.

44. The system as set forth in claim 43 above, wherein the optical system further comprises aspheric means disposed along the optical path thereof for shaping the light from the second light source into an annular pupil of diameter corresponding to that of the second transmission grating structure.