Method and apparatus for recovery from low impedance condition during cathodic arc processes

• US 4,936,960 A
• Filed: 01/03/1989
• Issued: 06/26/1990
• Est. Priority Date: 01/03/1989
• Status: Expired due to Term

• Current Assignee: Advanced Energy Industries Incorporated
• Original Assignee: Advanced Energy Industries Incorporated
• Inventors: Schatz, Douglas S., Harpold, John G., Siefkes, Jerry D.
• Primary Examiner(s): Weisstuch, Aaron
• Application Number:
  US07/293,179
• Time in Patent Office: 539 Days
• Field of Search: 204/192.38, 204/298 D, 427/37, 118/723, 118/621
• US Class Current: 204/192.38
• CPC Class Codes: H01J 37/32055 Arc discharge
• CPC Class Codes: H05B 7/00 Heating by electric discharge plasma torches H05H1/26

Abstract

Techniques for recovery from a low impedance conditions during cathodic arc or electric vapor thin film processes are disclosed. Sensing of a low impedance condition is achieved followed automatically by active clearing of the cloud to return it to the proper impedance or resistance state. Active clearing is accomplished by a progressive increase in the output of bias voltage supply. Regulation of the bias voltage supply switches between voltage or power modes and a current mode of regulation. Circuitry disclosed is designed to readily modify existing power supplies to achieve the methods discussed and to linearly increase the current output by it.

Claims

1. A method of recovering from a low impedance condition during the cathodic arc processing of an item, comprising the steps of:

a. generating an ion-containing cloud by driving an arc across a source potential;

b. attracting the ions in said cloud to the item to be processed through a bias potential;

c. detecting the presence of a low impedance condition across said bias potential; and

d. automatically clearing said cloud upon the detection of said low impedance condition across said bias potential.

2. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 1 wherein said bias potential is created by a bias voltage supply and wherein said step of automatically clearing the cloud comprises the step of automatically manipulating the bias voltage supply.

3. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 2 wherein said step of manipulating the bias voltage supply comprises the steps of:

a. substantially stopping the application of power of the bias voltage supply; and

then

b. progressively increasing the application of power of the bias power supply to its prior level.

4. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claims 2 or 3 and further comprising the steps of:

a. connecting a programmable processor to control said bias voltage supply;

b. programming said processor to automatically execute the sequence of steps involving the bias voltage supply.

5. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 2 and further comprising the step of regulating the voltage of said bias voltage supply while accomplishing the step of attracting the ions and wherein said step of manipulating the bias voltage supply comprises the steps of sequentially:

a. switching to regulate the current of said bias voltage supply upon detecting the low impedance condition;

b. substantially stopping the application of current through the bias voltage supply; and

c. progressively increasing the current output by the bias power supply.

6. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 4 and further comprising the step of returning to regulating the voltage of said bias voltage supply after progressively increasing the current output by the bias voltage supply.

7. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 6 and further comprising the step of stopping the progressive increase of said current output at a set level prior to said step of returning to regulating the voltage of the bias voltage supply.

8. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 7 and further comprising the step of monitoring the voltage output of the bias voltage supply while regulating its current output.

9. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 8 wherein said step of returning to regulate the voltage is accomplished when said voltage equals 100% of the set value of the voltage prior to detecting the presence of the low impedance condition.

10. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 9 wherein the time of said progressive increase is linear.

11. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 10 wherein the time of said linear increase is adjustable.

12. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 10 wherein the time of said linear increase is from 50 ms to 550 ms.

13. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 8 wherein said step of returning to regulate the voltage is accomplished when said voltage equals 100% of the set value of the voltage prior to detecting the presence of the low impedance condition.

14. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 6 wherein said step of detecting the low impedance condition comprises the step of sensing an over-current condition in said bias voltage supply for a prescribed period of time.

15. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 14 wherein said time for sensing the over-current condition is adjustable.

16. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 14 wherein said low impedance condition is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.

17. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 14 wherein said low impedance condition is detected by sensing the overcurrent condition for 50 ms.

18. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 5 and further comprising the step of stopping the progressive increase of said current output at a set level.

19. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 5 wherein said progressive increase is linear.

20. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 5 wherein the time of said progressive increase is from 50 ms to 550 ms.

21. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 20 wherein said step of detecting the low impedance condition comprises the step of sensing an over-current condition in said bias voltage supply for a prescribed period of time.

22. A method of recovering from a low impedance condition during the cathodic arc processing of an item as a described in claim 21 wherein said time for sensing the over-current condition is adjustable.

23. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 21 wherein said low impedance is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.

24. A method of recovering from a low impedance condition during the cathodic arc processing of an item described in claim 21 wherein said low impedance condition is detected by sensing the over-current condition for 50 ms.

25. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 2 wherein said step of detecting the low impedance condition comprises the step of sensing an over-current condition in said bias voltage supply for a prescribed period of time.

26. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 16 wherein said time for sensing the over-current condition is adjustable.

27. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 16 wherein said low impedance condition is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.

28. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claim 16 wherein said low impedance condition is detected by sensing the over-current condition for 50 ms.

29. A method of recovering from a low impedance condition during the cathodic arc processing of an item as described in claims 5, 18, 8, 11,26,15, or 22 and further comprising the steps of:

a. controlling said bias voltage supply through a programmable processor; and

b. programming said processor to automatically execute the sequence of steps involving the bias voltage supply.

30. An apparatus for recovering from a low impedance condition in a cathodic arc processing system having a bias voltage supply, which affects a cloud, comprising:

a. a sensor for detecting the presence of a low impedance condition across said bias voltage supply; and

b. a means for clearing said cloud upon the detection of said low impedance condition across said bias voltage supply.

31. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 30 wherein said means for clearing the cloud comprises a controller for automatically manipulating said bias voltage supply.

32. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 31 wherein said controller comprises a programmable processor.

33. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 31 wherein said controller comprises:

a. a means for substantially stopping the application of power through the bias voltage supply; and

b. a means for progressively increasing the output of power by the bias voltage supply after said means for substantially stopping has acted upon the bias voltage supply.

34. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 31 wherein said controller comprises:

a. a voltage regulator;

b. a current regulator;

c. a regulation mode switch for switching between the voltage regulator and the current regulator;

d. a means for substantially stopping the application of current through the bias voltage supply; and

e. a means for progressively increasing the current output by the bias voltage supply.

35. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 34 and further comprising a means for stopping the progressive increase of said current output at a set level.

36. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 35 and further comprising a means for monitoring the voltage output by said bias voltage supply which operates while regulating the current output of said bias voltage supply.

37. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 36 wherein said regulation mode switch returns to the voltage mode when the value of the voltage output by said bias voltage supply is 100% of the set value of the voltage prior to detecting the presence of the low impedance condition.

38. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 34 wherein said progressive increase is linear.

39. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 38 wherein the time of said linear increase is adjustable.

40. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 39 wherein said sensor comprises a means for sensing an over-current condition in said bias voltage supply for a prescribed period of time.

41. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 40 wherein said time for sensing the over-current condition is adjustable.

42. An apparatus for recovering from a low impedance conditions in a cathodic arc processing system as described in claim 40 wherein said low impedance condition is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.

43. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 40 wherein said low impedance condition is detected by sensing the over-current condition for 50 ms.

44. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 38 wherein the time of said linear increase is from 50 ms to 550 ms.

45. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 31 wherein said sensor comprises a means for sensing an over-current condition in said bias voltage supply for a prescribed period of time.

46. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 41 wherein said time for sensing the over-current condition is adjustable.

47. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 45 wherein said low impedance condition is detected by sensing the over-current condition for a period of time from 10 ms to 5 seconds.

48. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claim 45 wherein said low impedance condition is detected by sensing the over-current condition for 50 ms.

49. An apparatus for recovering from a low impedance condition in a cathodic arc processing system as described in claims 34, 39, 46, 48, 41, or 43 wherein said controller for manipulating the bias voltage supply comprises a programmable processor which is programmed to automatically execute the functions to be accomplished by the bias voltage supply.