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Piezoelectric micropump with microvalves

  • US 4,938,742 A
  • Filed: 02/04/1988
  • Issued: 07/03/1990
  • Est. Priority Date: 02/04/1988
  • Status: Expired due to Term
First Claim
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1. A pump for the displacement of a liquid, comprising:

  • a body of a silicon wafer, said wafer having a front side and a back side, said front side having an original front surface plane and said back side having an original back surface plane, while in said front side are shaped by a first means for removing from said front side a multiplicity of surface depressions in each of which at lest one rim of substantially circular shape extends from the bottom of said surface depression to said original front surface plane,and in which are shaped by a second means for removing from said backside;

    a multiplicity of troughs,and in which are shaped by a third means for removing from said backside;

    a pair of passage holes which extend from two of said troughs to said original front surface plane,a multiplicity of passage holes which extend from said troughs to said surface depressions;

    a front side glass plate with an upper and a lower surface in which a first hole for the admission of said liquid into the pump and a second hole for the removal of said liquid are made, said front side glass plate being hermetically connected with said lower surface by a joining means to said original front surface of said silicon wafer over the entire area of said original front surface, using an exclusion means to exclude said rim from being joined to said lower surface;

    a backside plate which is hermetically connected to said original backside of said silicon wafer by said joining means, with the exclusion of said troughs and said passage holes;

    a multiplicity of piezoelectric disks having a free surface and a joined surface, said joined surface being joined to said upper side of said front side glass plate, substantially such that said piezoelectric disks oppose said surface depressions;

    a multiplicity of electrodes consisting of a first set located on said free surface of said piezoelectric disks, and a second set located on said joined surface;

    a multiplicity of electric conductor connections to said sets of electrodes.

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