Gas sensor

• US 4,938,928 A
• Filed: 01/30/1989
• Issued: 07/03/1990
• Est. Priority Date: 10/28/1986
• Status: Expired due to Fees

• Current Assignee: FIGARO Engineering, Inc. (New Cosmos Electric Co., Ltd.)
• Original Assignee: FIGARO Engineering, Inc. (New Cosmos Electric Co., Ltd.)
• Inventors: Ono, Kiyonori, Koda, Hiroshi, Shimabukuro, Muneharu
• Primary Examiner(s): Warden, Robert J.
• Assistant Examiner(s): ALEXANDER, LYLE
• Application Number:
  US07/303,067
• Time in Patent Office: 519 Days
• Field of Search: 422/90, 422/94, 422/95, 422/97, 422/98, 338/34-35
• US Class Current: 422/98
• CPC Class Codes: G01N 27/12 of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid , for detecting components in the fluid

Abstract

A sensor comprising a metal heat generating member formed with a heat-resistant insulating coating of Al₂ O₃ or the like over its surface, and an atmosphere-sensitive layer of SnO₂ or the like supported on the coating. The insulating coating is formed, for example, by alumina sol coating and thermal decomposition, or plasma CVD of an aluminum compound. The sensitive layer is formed, for example, by the thermal decomposition of an organic compound of tin, vacuum evaporation or sputtering of tin, or printing of SnO₂ on the heat generating member when the member is in the form of a flat plate. At least one electrode is connected to the sensitive layer for deriving an output from the layer in response to a combustible gas, humidity or the like.

Claims

1. A gas sensor consisting essentially of:

at least three planar metal outer electrodes;

a wire metal heat generating member connected to and supported by two of the three planar metal outer electrodes;

a heat resistant insulating coating formed on the wire metal heat generating member;

a gas-sensitive layer formed on the heat resistant insulating coating, electrical characteristics of the gas-sensitive layer changing with changes in an environmental gas to be sensed; and

at least one detecting electrode formed at a position selected from the group consisting essentially of the heat resistant insulating coating and the gas-sensitive layer, and said at least one detecting electrode connected to the gas-sensitive layer and directly connected to the remaining planar metal outer electrode.

2. A gas sensor defined in claim 1, wherein the at least one detecting electrode comprises a conducting film which is in contact with the gas-sensitive layer, and a conductive paste which is in contact with the conductive film and the remaining planar metal outer electrode to directly connect both the conducting film and the remaining planar metal outer electrode.

3. A gas sensor defined in claim 1, wherein the heat generating member is made of Ni-Cr alloy or Fe-Cr-Al alloy.

4. A gas sensor defined in claim 1, wherein the heat generating member is welded, at each end, to the two of the three planar metal outer electrodes.

5. A gas sensor defined in claim 1, further including a heat resistant insulating substrate, wherein the three planar metal outer electrodes are connected to the heat resistant insulating substrate and supported by the heat resistant insulating substrate on a side of the heat resistant insulating substrate which is opposite the heat generating member.

6. A gas sensor defined in claim 5, further including a housing and at least three external leads attached to the housing, and the three planar metal outer electrodes are connected to the external leads by wire bonding.