Gas sensor
First Claim
1. A gas sensor consisting essentially of:
- at least three planar metal outer electrodes;
a wire metal heat generating member connected to and supported by two of the three planar metal outer electrodes;
a heat resistant insulating coating formed on the wire metal heat generating member;
a gas-sensitive layer formed on the heat resistant insulating coating, electrical characteristics of the gas-sensitive layer changing with changes in an environmental gas to be sensed; and
at least one detecting electrode formed at a position selected from the group consisting essentially of the heat resistant insulating coating and the gas-sensitive layer, and said at least one detecting electrode connected to the gas-sensitive layer and directly connected to the remaining planar metal outer electrode.
0 Assignments
0 Petitions
Accused Products
Abstract
A sensor comprising a metal heat generating member formed with a heat-resistant insulating coating of Al2 O3 or the like over its surface, and an atmosphere-sensitive layer of SnO2 or the like supported on the coating. The insulating coating is formed, for example, by alumina sol coating and thermal decomposition, or plasma CVD of an aluminum compound. The sensitive layer is formed, for example, by the thermal decomposition of an organic compound of tin, vacuum evaporation or sputtering of tin, or printing of SnO2 on the heat generating member when the member is in the form of a flat plate. At least one electrode is connected to the sensitive layer for deriving an output from the layer in response to a combustible gas, humidity or the like.
-
Citations
6 Claims
-
1. A gas sensor consisting essentially of:
-
at least three planar metal outer electrodes; a wire metal heat generating member connected to and supported by two of the three planar metal outer electrodes; a heat resistant insulating coating formed on the wire metal heat generating member; a gas-sensitive layer formed on the heat resistant insulating coating, electrical characteristics of the gas-sensitive layer changing with changes in an environmental gas to be sensed; and at least one detecting electrode formed at a position selected from the group consisting essentially of the heat resistant insulating coating and the gas-sensitive layer, and said at least one detecting electrode connected to the gas-sensitive layer and directly connected to the remaining planar metal outer electrode. - View Dependent Claims (2, 3, 4, 5, 6)
-
Specification