Ultrasonic transducer arrays and methods for the fabrication thereof

• US 4,939,826 A
• Filed: 03/04/1988
• Issued: 07/10/1990
• Est. Priority Date: 03/04/1988
• Status: Expired due to Fees

• Current Assignee: Koninklijke Philips Electronics N.V. (Koninklijke Philips N.V.)
• Original Assignee: Hewlett-Packard Company (HP Inc.)
• Inventors: Shoup, Thomas A.
• Primary Examiner(s): Steinberger, Brian S.
• Application Number:
  US07/164,273
• Time in Patent Office: 858 Days
• Field of Search: 367/130, 367/154, 367/155, 367/159, 367/160, 367/161, 367/162, 367/164, 367/165, 367/166, 367/171, 367/176, 367/157, 367/169, 367/153, 367/140, 29/25.35, 29/594, 29/595, 264/272.11, 264/272.16, 310/312, 310/322, 310/325, 310/326, 310/327, 310/334, 310/337, 310/338, 310/340, 310/345, 310/348, 310/349, 310/352, 310/353, 310/367
• US Class Current: 29/25.35
• CPC Class Codes: B06B 1/0629 Square array
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/49005 Acoustic transducer

Abstract

This invention provides a method for fabricating ultrasonic transducer arrays and various transducer arrays produced utilizing such methods. The method includes the steps of cutting a block of piezoelectric material to form a plurality of wafers, each wafer being of a predetermined thickness; forming the wafers into a spaced parallel array with a center-to-center spacing between the wafers substantially equal to one-half of the object wavelength (as this term is defined in the specification); and causing the space between the wafers to be filled with a substance having an acoustic impedance which differs from that of the piezoelectric material by an amount such that the reflection coefficient between the piezoelectric material and the substance is greater than 0.9. The predetermined thickness of the wafers may be equal to one-half the piezoelectric wavelength and the substance between the wafers may be formed at least mostly of air. A material of a depth substantially equal to the spacing between wafers required to achieve the desired periodicity may be affixed to one of the adjacent wafer surfaces of each space, and this material may either be etchable and etched away to form a precise air gap between the wafers, or the material may be formed in a pattern with substantially more area without material than with material. Alternatively, a material having the required acoustic impedance mismatch, and preferably also having a relatively high absorption coefficient, is placed between each two adjacent wafers when the wafers are formed into the array.

Claims

1. A method of fabricating an ultrasonic transducer array adapter for scanning a selected object having a predetermined object wavelength comprising the steps of:

cutting a block of piezoelectric material having a top surface in a directions perpendicular to said top surface to form a plurality of wafers, each of said wafers being of a predetermined thickness;

affixing an etchable material of predetermined depth to one side of each wafer surface except for the wafer which is to be the end wafer on the one side of the array;

forming the wafers into a spaced parallel array with each adjacent pair of wafers in the array being spaced by a layer of affixed material, the predetermined thickness for etchable material being such that the center-to-center spacing between adjacent wafers in the array is substantially equal to one-half the object wavelength; and

etching away the affixed material to leave a spaced transducer array with a substantially one-half object wavelength center-to-center spacing.

2. A method as claimed in claim 1 wherein said forming step includes mounting a means to the wafers to maintain their spacing after the affixed material has been etched away.

3. A method as claimed in claim 2 wherein said means mounted to the wafers is a backing layer.

4. A method as claimed in claim 1 including the step performed at a time after the forming step of cutting the spaced array apart in the elevation direction to form a plurality of transducer arrays.

5. A method as claimed in claim 4 including the step of connecting leads to each transducer array.

6. A method as claimed in claim 1 including the step of bonding a backing layer to the underside of the spaced wafer array.

7. A method as claimed in claim 6 including the steps of providing gaps between the backing layer and the array, and filling the gaps with a material which reduces the acoustic coupling between the elements and between the elements and the backing.

8. A method as claimed in claim 7 wherein said providing gaps step includes the step performed before the bonding the backing layer step of affixing etchable material to the underside of the array in a predetermined pattern, and the step performed after the bonding step of etching away said material.

9. A method as claimed in claim 7 wherein said filling the gaps step includes the step of filling the gaps with a substance which is composed at least primarily of air.

10. A method as claimed in claim 1 including the step of bonding a matching layer to the top surface of the block of piezoelectric material before it is cut into wafers.