Pendular non-servoed tuning beam accelerometer

• US 4,939,935 A
• Filed: 02/21/1989
• Issued: 07/10/1990
• Est. Priority Date: 02/22/1988
• Status: Expired due to Fees

• Current Assignee: Societe D'Applications Generales D'Electricite et de Mecanique Sagem
• Original Assignee: Societe D'Applications Generales D'Electricite et de Mecanique Sagem
• Inventors: Amand, Yvon
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US07/312,753
• Time in Patent Office: 504 Days
• Field of Search: 73/517 AV, 73/DIG. 1, 73/DIG. 4, 310/329
• US Class Current: 73/514.29
• CPC Class Codes: G01P 1/006 used for thermal compensation
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 2015/0817 for pivoting movement of the mass, e.g. in-plane pendulum
• CPC Class Codes: G01P 2015/0828 the mass being of the paddle type being suspended at one of its longitudinal ends
• CPC Class Codes: Y10S 73/01 Vibration

Abstract

A low-cost pendular non-serviced accelerometer comprises a base, a pendular seismic mass connected to the base by a hinged connection for pivotal movement of the seismic mass about an axis along a sense direction perpendicular to the hinged connection and a sensor connecting the seismic mass to the base. The sensor comprises at least two vibrating beams of piezo-electric material, each connected to the base at an end thereof and to the seismic mass at the other end thereof, and each provided with electrodes for vibrating the respective beam at a tuning frequency thereof. The beams are directed orthogonally to the sense axis and are located symmetrically with respect to the seismic mass on both sides of the hinged connection, whereby any acceleration along the sense axis creates tractive stresses in one beam and compression stresses in the other beam. A circuit connected to the electrodes and is arranged for delivering a signal which is responsive to the difference between the resonant frequencies of the two beams when the seismic mass is subjected to an acceleration.

Claims

1. Pendular accelerometer comprising a base, a pendular seismic mass of flat shape connected to the base by a flexure hinged connection for pivotal movement of said seismic mass about a hinge axis perpendicular to major surfaces of said pendular seismic mass, along a sense direction perpendicular to the hinge axis of the hinged connection and sensor means connecting the seismic mass to the base, wherein said sensor means comprises:

at least two vibrating beams of piezo-electric material, each connected to the base at an end thereof and to the seismic mass at the other end thereof, and each provided with electrode means for vibrating the respective beam at a tuning frequency thereof, said beams being directed orthogonally to the same axis and being located symmetrically with respect to the seismic mass on both sides of the hinge axis of the hinged connection, whereby any acceleration along the sense axis creates tractive stresses in one beam and compression stresses in the other beam, and

circuit means connected to the electrodes and arranged for delivering a signal which is responsive to the difference between the resonant frequencies of the two beams when said seismic mass is subjected to an acceleration.

2. Accelerometer according to claim 1, wherein said seismic mass, said vibrating beams and said base are integral with a frame surrounding said seismic mass and said vibrating beams to constitute a flat part of constant thickness.

3. Accelerometer according to claim 1, wherein said hinge connection consists of a single hinge and wherein said two beams straddle the width of said seismic mass.

4. Accelerometer according to claim 3, wherein said beams and seismic mass constitute a unitary body obtained by machining a quartz wafer.

5. Accelerometer according to claim 1, wherein said seismic mass has a heavy metal coating.

6. Pendular accelerometer comprising:

a base;

a pendular seismic mass of flat shape connected to the base by a hinged connection for pivotal movement of said seismic mass about a hinge axis perpendicular to major surfaces of said seismic mass, along a sense direction perpendicular to the hinge axis of the hinged connection; and

two vibrating beams of piezo-electric material, each connected to the base at an end thereof and to the seismic mass at the other end thereof, and each provided with electrode means for vibrating the respective beam at a tuning frequency thereof, said beams being directed orthogonally to the sense axis and being located symmetrically with respect to the seismic mass on both sides of the hinge axis of the hinged connection, whereby any acceleration along the sense axis creates tractive stresses in one beam and compression stresses in the other beam,

wherein said seismic mass consists of mutually connected portions of three sheets of said piezoelectric material stacked in the direction of said hinge axis, the end ones of said sheets being formed with respective mutually aligned hinges constituting said hinge connection and the central one of said sheets being integral with said vibrating beams.

7. Accelerometer according to claim 6, wherein each of said sheets constitutes a unitary body including one of said portions and a frame surrounding the respective portion.