Light beam positioning system

• US 4,941,082 A
• Filed: 04/25/1988
• Issued: 07/10/1990
• Est. Priority Date: 04/25/1988
• Status: Expired due to Term

• Current Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Original Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Inventors: Goetz, Howard V., Edson, Bruce E., Pailthorp, Robert M., Bortnem, Mark A.
• Primary Examiner(s): Ruggiero, Joseph
• Application Number:
  US07/185,414
• Time in Patent Office: 806 Days
• Field of Search: 364/167.01, 364/571.01-571.08, 364/559, 346/108, 346/109, 219/121.78-121.82, 369/44, 369/45, 250/491.1, 318/640, 350/6.5, 356/123, 356/375, 356/399
• US Class Current: 700/57
• CPC Class Codes: B23K 26/04 Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
• CPC Class Codes: B23K 26/043 along the beam path, i.e. alignment of laser beam axis relative to laser beam apparatus
• CPC Class Codes: G05B 19/4015 going to a reference at the beginning of machine cycle, e.g. for calibration

Abstract

A light beam positioning system (10) has the capability of generating accurately positioned beam paths at programmed velocities between any two positions on a target surface (18). The beam positions correspond to beam position and velocity command data processed by a system control computer (22). The invention employs an error correction processor (52) that receives X and Y position coordinate signals (X and Y signals) produced by a conventional position data generator and develops compensated X and Y position coordinate signals (X_c and Y_c signals) for delivery to a light beam positioner (12). The X_c and Y_c signals are derived from a calibration map of an addressable field representing the positions to which the light beam can be commanded on the target surface. The X_c and Y_c signals represent polynominal functions of the X and Y signals and offset beam position errors resulting from the light-directing properties of the system optical components (26, 28, 30). The error correction processor allows the use of a single command data file in the system control computer,

which is capable of controlling different systems of the same model type. This can be accomplished simply by loading the error correction processor with the pertinent field correction coefficients to the particular light beam positioner in use. Such flexibility is achievable with no changes to software files in the system control computer.

Claims

1. A light beam position error correction system employing plural optical components for directing the propagation path of the light beam in response to beam position command data, comprising:

light source means to produce a beam of light propagating along a beam path;

beam positioning means receiving the beam to direct its path of propagation toward a position on a target surface;

position data generating means receiving beam position command data to generate position coordinate signals corresponding to a preselected position on the target surface; and

error correction processing means receiving the position coordinate signals to develop compensated position coordinate signals for delivery to the beam positioning means, the compensated position coordinate signals modifying the position coordinate signals to correct for light beam positioning errors introduced by the system optical components so that the beam positioning means directs the light beam to the preselected position on the target surface, the position coordinate signals having an X signal and a Y signal that indicate the instantaneous commanded position of the light beam, and the compensated position coordinate signals include an X_c signal and a Y_c signal, the X_c signal being a function of polynomial

space="preserve" listing-type="equation">B.sub.1 X+C.sub.1 X.sup.2 +D.sub.1 X.sup.3 +E.sub.1 Y+F.sub.1 Y.sup.2 +G.sub.1 XY+H.sub.1 XY.sup.2

and the Y_c position signal being a function of the polynomial

space="preserve" listing-type="equation">B.sub.2 Y+C.sub.2 Y.sup.2 +D.sub.2 Y.sup.3 +E.sub.2 X+F.sub.2 X.sup.2 +G.sub.2 XY +H.sub.2 YX.sup.2,

where B₁, C₁, D₁, E₁, F₁, G₁, H₁, B₂, C₂, D₂, E₂, F₂, G₂, and H₂ represent field correction coefficients of constant values that correspond to the light directing optical properties of the system components.

2. The system of claim 1 in which the term A₁ is added to the polynomial of which X_c is a function and the term A₂ is added to the polynomial of which Y_c is a function, the A₁ and A₂ terms representing respective X- and Y-axis offsets in an X-Y coordinate system.

3. The system of claim 1 further comprising calibration data file means in data communication with the error correction processing means selectively to store field correction coefficients that characterize the particular light directing properties of a specific system.

5. The system of claim 1, in which the correction coefficients are determined in accordance with a least square algorithm.

4. A light beam position error correction system employing plural optical components for directing the propagation path of the light beam in response to beam position command data, comprising:

light source means to produce a beam of light propagating along a beam path;

beam positioning means receiving the beam to direct its path of propagation toward a position on a target surface;

position data generating means receiving beam position command data to generate position coordinate signals corresponding to a preselected position on the target surface; and

error correction processing means receiving the position coordinate signals to develop compensated position coordinate signals for delivery to the beam positioning means, the compensated position coordinate signals modifying the position coordinate signals to correct for light beam positioning errors introduced by the system optical components so that the beam positioning means directs the light beam to the preselected position on the target surface, the position coordinate signals having an X signal and a Y signal that indicate the instantaneous commanded position of the light beam, and the compensated position coordinate signals include an X_c signal and a Y_c signal, the X_c and Y_c signals being proportional to polynomials that include the respective terms G₁ XY and G₂ YX to correct for position errors resulting from wedge angle distortion and the respective terms H₁ XY² and H₂ X² Y to correct for position errors resulting from parabolic curvature distortion.

6. A light beam position error correction system employing plural optical components for directing the propagation path of the light beam in response to beam positioning command data, comprising:

light source means to produce a beam of light propagating along a beam path;

beam positioning means receiving the beam to direct its path of propagation toward a position on a target surface;

system control computer means responsive to a first set of instructions to provide the beam position command data;

position data generating means receiving the beam position command data to generate position coordinate signals corresponding to a preselected position on the target surface;

calibration data source means providing previously acquired calibration data to correct for light beam positioning errors introduced into the system; and

error correction processing means responsive to a second set of instructions to receive the position coordinate signals and the calibration data, apply the calibration data to transform the position coordinate signals into compensated position coordinate signals to correct for light beam positioning errors introduced into the system, and provide to the beam positioning means the compensated position coordinate signals so that the beam positioning means directs the light beam to the preselected position on the target surface.

8. The system of claim 6 in which the compensated position coordinate signals comprise an X_c signal and a Y_c signal and in which the beam positioning means comprises a pair of first and second independently movable light reflecting surfaces that receive the light beam, the first and second light reflecting surfaces receiving the X_c and Y_c signals to move the light beam in respective first and second orthogonal directions along the target surface to position the light beam at the preselected position.

9. The system of claim 8 in which the beam positioning means further comprises a lens.

10. The system of claim 9 in which the lens is of the F-Θ

type.

11. The system of claim 6 in which the light source means comprises a laser.

12. The system of claim 6, further comprising calibration data generating means to develop the previously acquired calibration data at system initialization by determining an actual beam position on the target surface and the corresponding position coordinate signals.

13. The system of claim 6, in which the beam position command data comprises a read only memory.

7. A method of positioning a light beam, comprising:

acquiring and storing calibration data that are characteristic of the optical properties of a light beam positioning system such that the acquisition of the calibration data includes selecting an array of calibration points in an addressable field of a target surface, scanning the field until the light beam strikes each one of the calibration points, and determining the position coordinate signals required to position the light beam at the calibration points;

providing beam position command data from a system computer, the beam position command data corresponding to an intended position to which a light beam is to be directed on a target surface;

converting the beam position command data into position coordinate signals that correspond to the intended position on the target surface so that the position signals can be used by a beam positioner;

using the stored calibration data to transform the beam position command data into compensated position coordinate signals; and

providing the compensated position coordinate signals to a beam positioner to direct the light beam to the intended position on the target surface.

14. The method of claim 7, in which the compensated position coordinate signals comprise an X_c signal and a Y_c signal and in which the beam positioner comprises a pair of first and second independently movable light reflecting surfaces that receive the light beam, the first and second light reflecting surfaces receiving the X_c and Y_c signals to move the light beam in respective first and second orthogonal directions along the target surface to position the light beam at the intended position.

15. The method of claim 7, in which the light beam is generated from a laser source and in which the beam position command data is obtained from read only memory.