Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control

• US 4,941,753 A
• Filed: 04/07/1989
• Issued: 07/17/1990
• Est. Priority Date: 04/07/1989
• Status: Expired due to Term

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Wickramasinghe, Hemantha K.
• Primary Examiner(s): Cuchlinski, Jr., William A.
• Assistant Examiner(s): GUTIERREZ, DIEGO F
• Application Number:
  US07/334,833
• Time in Patent Office: 466 Days
• Field of Search: 374/6, 374/45, 374/120, 374/124, 374/137, 374/141, 374/163, 374/183, 374/210, 250/306, 250/307, 324/158 R, 324/158 D, 324/451, 324/452
• US Class Current: 374/120
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01B 7/023 for measuring distance between sensor and object G01B7/082 and G01B7/102 take precedence
• CPC Class Codes: G01Q 60/12 STS [Scanning Tunnelling Spectroscopy]
• CPC Class Codes: Y10S 977/852 for detection of specific nanostructure sample or nanostructure-related property
• CPC Class Codes: Y10S 977/867 Scanning thermal probe

Abstract

High resolution absorption microscopy, spectroscopy and similar applications are implemented by providing for a measurement tip which is maintained spaced from a sample under investigation sufficiently close so as to equalize thermal levels in the tip and the sample; generally within about 10 Angstroms. Energy is applied to the sample being investigated and either a steady state or dynamic junction potential is measured. The junction potential is representative of local sample temperature. The close separation can be maintained by techniques employed in scanning tunneling microscopy, atomic force microscopy or capacitance microscopy. In the event the close separation is maintained using scanning tunneling microscopy techniques, then a switching arrangement is provided for connecting a conductive film (either of the sample or supported on a sample) to either a suitable potential or ground and simultaneously connecting the STM tip either in a feedback loop or to a device for measuring the junction potential. The feedback loop, in addition to conventional operational amplifier components, includes a sample and hold element to maintain the input voltage to an operational amplifier in the feedback loop during those times that the measurement tip is connected to the junction potential measurement device, as opposed to being connected in the STM feedback loop. The spectroscopy application uses similar architecture, althrough the energy source is tunable.

Claims

1. Apparatus for absorption measurements comprising:

a sample with a conductive surface,

means for supporting said sample for measurement,

means for directing energy onto said sample to cause local heating of the sample,

a thermal measurement tip,

support means for maintaining said thermal measurement tip within about 10 A°

of said conductive surface, and

measurement means coupled to said thermal measurement tip for measuring a junction potential between said thermal measurement tip and said conductive surface.

2. Apparatus as recited in claim 1 wherein said sample is non conductive and said conductive surface comprises a thin conductive film supported by said sample and lying between said sample and said thermal measurement tip.

3. Apparatus as recited in claim 1 wherein said means for supporting said sample comprises a substrate transparent to said energy and interposed between said means for directing energy and said sample.

4. Apparatus as recited in claim 1 wherein said sample is non conductive, said means for supporting said sample comprises a support with said conductive surface, said means for directing said energy and said thermal measurement tip are located adjacent one surface of said sample and said conductive surface is adjacent a different surface of said sample.

5. Apparatus as recited in claim 1 further comprising mapping means supporting the thermal measurement tip and the support means for providing relative movement between the thermal measurement tip and the sample so as to scan a region of the sample.

6. Apparatus as recited in claim 1 wherein said support means comprises tunneling current means for maintaining separation between said thermal measurement tip and said sample, said tunneling current means including:

a piezoelectric drive for controlling movement of said thermal measurement tip toward and away from said sample,

a two position switch,

an operational amplifier with an output coupled to said piezoelectric drive, said operational amplifier having an input connected through said two position switch, in a first position, to said thermal measurement tip for conducting tunneling current from said thermal measurement tip, and

wherein said measurement means comprises

a current detector, an amplifier with an output connected to said current detector and an input connected through said two position switch, in a second position, to said thermal measurement tip.

7. Apparatus as recited in claim 1 wherein

said means for directing energy directs time modulated energy onto said sample and wherein

said measurement means detects an AC junction potential between said thermal measurement tip and said conductive surface.

8. Apparatus as recited in claim 7 which further includes timing means for enabling said means for directing energy and for controlling the position of said two position switch.

9. Apparatus as recited in claim 1 for absorption spectroscopy wherein said means for directing energy includes tuning means for varying a wavelength of energy directed onto said sample as a function of time.

10. A method or effecting absorption measurements comprising:

(a) supporting a sample with a conductive surface for measurement,

(b) directing energy onto said sample to cause local heating of the sample,

(c) supporting a thermal measurement tip sufficiently close to said conductive surface to equalize Fermi levels between said tip and surface, and

(d) measuring a junction potential between said thermal measurement tip and said conductive surface.

11. A method as recited in claim 10 wherein said step (c) maintains a separation between said thermal measurement tip and said conductive surface of about 10 Angstroms.

12. A method as recited in claim 10 or 11 wherein said step (b) further includes tuning a wavelength of the energy directed at said sample as a function of time.

13. A method as recited in claim 10 or 11 wherein said step (a) includes providing a substrate transparent to said energy and directing said energy through said substrate to said sample.

14. A method as recited in claim 10 or 11 wherein said sample is non conductive, said step (a) includes providing a support with said conductive surface, said step (b) includes directing said energy toward one surface of said sample and maintaining said conductive surface adjacent a different surface of said sample.

15. A method as recited in claim 10 which further includes mapping said the thermal measurement tip relative to the sample so as to scan a region of the sample.

16. A method as recited in claim 11 wherein said step (c) includes (ci) generating tunneling current between said thermal measurement tip and the sample, and (cii) monitoring said tunneling current to maintain said separation.

17. A method as recited in claim 16 wherein said monitoring step is interrupted when said measurement of step (d) is effected.

18. A method as recited in claim 10 or 11 wherein said step (b) includes time modulating said energy and said step (d) includes detecting an AC junction potential between said thermal measurement tip and said conductive surface

19. A method as recited in claim 18 wherein said step (c) includes (ci) generating tunneling current between said thermal measurement tip and the sample, and (cii) monitoring said tunneling current to maintain said separation.

20. A method as recited in claim 19 wherein said monitoring step is interrupted when said measurement of step (d) is effected.

21. A method as recited in claim 12 wherein said step a) includes providing a substrate transparent to said energy and directing said energy through said substrate to said sample.

22. A method as recited in claim 12 wherein said sample is non conductive, said step (a) includes providing a support with said conductive surface, said step (b) includes directing said energy toward one surface of said sample and maintaining said conductive surface adjacent a different surface of said sample.