Pressure transducer apparatus

• US 4,942,767 A
• Filed: 06/02/1989
• Issued: 07/24/1990
• Est. Priority Date: 11/19/1986
• Status: Expired due to Fees

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Mehregany, Mehran, Senturia, Stephen D., Warkentin, David J., Haritonidis, Joseph H.
• Primary Examiner(s): Woodiel, Donald O.
• Application Number:
  US07/360,325
• Time in Patent Office: 417 Days
• Field of Search: 73/705, 73/723, 73/753, 250/231 P, 250/231 R, 250/226, 356/352, 356/357, 356/358, 29/569 L
• US Class Current: 73/705
• CPC Class Codes: H04R 23/008 using optical signals for detecting or generating sound

Abstract

A micromachined diaphragm is positioned across a gap from an end of an optic fiber. The optic fiber and the diaphragm are integrally mounted. The end of the optic fiber provides a local reference plane which splits light carried through the fiber toward the diaphragm. The light is split into a transmitted part which is subsequently reflected from the diaphragm, and a locally reflected part which interferes with the subsequently diaphragm reflected part. The interference of the two reflective parts forms an interference light pattern carried back through the fiber to a light detector. The interference pattern provides an indication of diaphragm deflection as a function of applied pressure across the exposed side of the diaphragm. A detection of magnitude and direction of diaphragm deflection is provided by use of a second fiber positioned across the gap from the diaphragm. The second fiber provides an interference pattern in the same manner as the first fiber but with a phase shift. An opening allowing communication between ambient and the gap enables use of the interferometer sensor as a shear stress measuring device.

Claims

1. A pressure transducer comprising:

a diaphragm;

a source of coherent light;

an optic fiber assembly coupled to the diaphragm and having at least one single mode optic fiber with an end facing the diaphragm and an opposite end coupled to the source for receiving coherent light, the fiber end facing the diaphragm being fixed across a gap therefrom and splitting a coherent light beam carried by the fiber into a transmitted part and a reference part, the transmitted part being emitted from the fiber end across the gap to the diaphragm and reflected therefrom back to the fiber end, the reference part being formed by locally reflecting off the fiber end in a direction back through the fiber, the transmitted part after being reflected off the diaphragm intersecting the reference part at the fiber end, the intersection of parts forming an interference light wave indicative of diaphragm deflection and carried by the fiber in a direction away from the fixed fiber end; and

detection means including light detecting means, coupled to the fiber for receiving the interference light wave, and the detection means providing an indication of diaphragm deflection.

2. A pressure transducer as claimed in claim 1 wherein the optic fiber assembly is coupled to the diaphragm in a manner which provides through an opening, communication between the gap and area surrounding the diaphragm where forces to which the diaphragm is subjected exist;

the detection means further providing a measurement of shear stress from the sensed diaphragm deflection.

3. A pressure transducer as claimed in claim 1 wherein the optic fiber assembly comprises a second single mode optic fiber with one end facing the diaphragm and fixed across a cavity from the diaphragm, and an opposite end coupled to the source for receiving coherent light, the one end of the second fiber splitting a coherent light beam carried by the second fiber in a manner substantially similar to the diaphragm facing end of the first fiber splitting coherent light carried by the first fiber such that the second fiber carries from its one end to the light detecting means an interference light wave indicative of diaphragm deflection, the interference light wave of the second fiber being independent of the interference light wave of the first fiber, and the light detecting means being coupled to the first and second fibers for receiving respective interference light waves from the two fibers and therefrom the detection means providing measurements of magnitude and direction of diaphragm deflection.

4. A pressure transducer as claimed in claim 3 wherein the detecting means further include curve plotting means for plotting a closed loop Lissajous curve from the interference light waves received from the first and second optic fibers, direction of travel around the curve providing the direction of diaphragm deflection.

5. A pressure transducer as claimed in claim 3 wherein the detecting means further include a counting assembly for counting fringes in the received interference light waves to provide magnitude measurements of diaphragm deflection.

6. A pressure transducer comprising:

a diaphragm;

a first optic fiber and a second optic fiber, each optic fiber having a fixed end facing the diaphragm across a gap, the fixed ends and the diaphragm being integrally mounted to form a unit, the fixed end of the first fiber splitting coherent light carried by the first fiber into a reference part and a transmitted part, the reference part being locally reflected off the end of the first fiber and into the first fiber, and the transmitted part being reflected off the diaphragm across the gap into the first fiber to interfere with the locally reflected reference part in the first fiber end, the interference forming a light wave indicative of diaphragm deflection;

the fixed end of the second fiber splitting coherent light carried by the second fiber into a local reference part and a diaphragm reflected part, respectively similar to the reference part and transmitted part of the first fiber, which interfere in the fixed end of the second fiber to form therein a light wave indicative of diaphragm deflection similar to the light wave formed in the first fiber but shifted in phase;

detection means coupled to the first and second optical fibers for receiving the formed light waves and providing an indication of magnitude and direction of diaphragm deflection.