×

Electrostatic micromotor

  • US 4,943,750 A
  • Filed: 07/03/1989
  • Issued: 07/24/1990
  • Est. Priority Date: 05/20/1987
  • Status: Expired due to Term
First Claim
Patent Images

1. An electrostatic machine comprising:

  • a stator formed by surface micromachining sacrificial layers on a substrate surface;

    a moveable member positioned for movement relative to the stator free of contact thereto, the moveable member formed and positioned with respect to the substrate surface during the surface micromachining that formed the stator;

    means for generating and sustaining an electrostatic field about the moveable member across a gaseous gap between the stator and moveable member, facing surfaces of the surface micromachined stator and moveable member across the gaseous gap being free of contact with each other and sufficiently smooth to support a field strength above about 108 V/m without electrostatic breakdown, the distance between the stator and moveable member across the gaseous gap being about 5 micrometers or less.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×