Optical measuring device using a spectral modulation sensor having an optically resonant structure

• US 4,945,230 A
• Filed: 06/04/1987
• Issued: 07/31/1990
• Est. Priority Date: 07/06/1984
• Status: Expired due to Term

• Current Assignee: NetTest North America, Inc. (Anritsu Corporation)
• Original Assignee: MetriCor, Inc. (Constellation Software Incorporated)
• Inventors: Hartl, James C., Saaski, Elric W.
• Primary Examiner(s): Nelms, David C.
• Application Number:
  US07/058,150
• Time in Patent Office: 1,153 Days
• Field of Search: 250/226, 250/227, 250/231 R, 250/231 D, 73/705, 73/717, 73/722, 356/352, 356/134, 356/135, 356/136
• US Class Current: 250/227.21
• CPC Class Codes: G01D 5/268 using optical fibres G01D5/28 - G01D5/38 take precedence
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01K 11/12 using changes in colour, translucency or reflectance
• CPC Class Codes: G01N 2021/0385 Diffusing membrane; Semipermeable membrane
• CPC Class Codes: G01N 21/45 using interferometric methods; using Schlieren methods
• CPC Class Codes: G01N 21/75 Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated systems in which material is burnt in a flame or plasma G01N21/72, G01N21/73
• CPC Class Codes: G01N 21/7703 using reagent-clad optical fibres or optical waveguides using measurement of total internal reflection or attenuated total reflection G01N21/552; optical fibres or waveguides per se G02B
• CPC Class Codes: G01N 21/7746 the waveguide coupled to a cavity resonator
• CPC Class Codes: G01N 21/80 Indicating pH value
• CPC Class Codes: G01N 21/81 Indicating humidity

Abstract

Physical changes induced in the spectral modulation sensor'"'"'s optically resonant structure by the physical parameter being measured cause microshifts of its reflectivity and transmission curves, and of the selected operating segment(s) thereof being used, as a function of the physical parameter being measured. The operating segments have a maximum length and a maximum microshift of less than about one resonance cycle in length for unambiguous output from the sensor. The input measuring light wavelength(s) are selected to fall within the operating segment(s) over the range of values of interest for the physical parameter being measured. The output light from the sensor'"'"'s optically resonant structure is spectrally modulated by the optically resonant structure as a function of the physical parameter being measured. The spectrally modulated output light is then converted into analog electrical measuring output signals by detection means. In one form, a single optical fiber carries both input light to and output light from the optically resonant structure. When more than one input measuring light wavelength is used, means may also be provided to divide the input light wavelengths into two portions and then take the ratio thereof. This provides several advantages simultaneously, such as enabling longer operating segments and microshifts to be used for greater sensitivity or detection range, and also eliminates certain errors caused by fluctuations in input light intensity or by changes in light intensity caused by optical fiber bending and optical fiber connectors.

Claims

1. An optical measuring device for measuring a range of values for a sensed physical parameter, wherein said optical measuring device comprises:

light source means for emitting input measuring light of at least two wavelengths;

optically resonant structure means;

detection means; and

light transmission means;

wherein said optically resonant structure means has a reflectivity curve and a transmission curve, and has at least one operating segment on at least one of said reflectivity curve and said transmission curve;

wherein said optically resonant structure means has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said changes of said optically sensitive physical characteristic microshift said at least one operating segment as a function of said sensed physical parameter;

wherein said optically resonant structure means are for spectrally modulating said input measuring light as a function of said microshifts to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said at least one operating segment is selected to be less than about one resonance cycle in length for said range of values for said sensed physical parameter;

wherein said at least one operating segment is microshifted less than about one resonance cycle over said range of values for said sensed physical parameter;

wherein said wavelengths of said input measuring light are selected to fall at least substantially within said at least one operating segment over said range of values for said sensed physical parameter;

wherein said at least one operating segment and said wavelengths of said input measuring light are selected such that over said range of values for said sensed physical parameter said spectrally modulated output light bears a unique one-to-one relationship to said sensed physical parameter;

wherein said light transmission means are for conveying said input measuring light from said light source means to said optically resonant structure means and for conveying said spectrally modulated output light from said optically resonant structure means to said detection means;

wherein said detection means are for deriving two electrical signals corresponding to any two different portions of said spectrally modulated output light; and

are for taking the ratio of said two electrical signals to provide an output measuring electrical signal which is a function of said sensed physical parameter, to null errors in the measurement of the sensed physical parameter and to help to maximize both the useable length and the useable microshift of said at least one operating segment over said range of values for said sensed physical parameter;

wherein said optically resonant structure means comprises a body defining a cavity having a pair of opposed reflective surfaces;

wherein at least one of said reflective surfaces bows as a function of said sensed physical parameter; and

wherein said optically sensitive physical characteristic comprises the distance between said pair of opposed reflective surfaces and is a function of said bowing; and

wherein said sensed physical parameter comprises a sensed chemical species;

wherein at least a portion of said body is permeable to said sensed chemical species; and

wherein said cavity is at least partially filled with a sensitive media which is responsive to said sensed chemical species and which responds to said sensed chemical species by changing its volume to cause said bowing of said at least one of said reflective surfaces as a function of said sensed chemical species.

2. An optical measuring device for measuring a range of values for a sensed physical parameter, wherein said optical measuring device comprises:

light source means for emitting input measuring light of at least two wavelengths;

optically resonant structure means;

detection means; and

light transmission means;

wherein said optically resonant structure means has a reflectivity curve and a transmission curve, and has at least one operating segment on at least one of said reflectivity curve and said transmission curve;

wherein said optically resonant structure means has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said changes of said optically sensitive physical characteristic microshift said at least one operating segment as a function of said sensed physical parameter;

wherein said optically resonant structure means are for spectrally modulating said input measuring light as a function of said microshifts to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said at least one operating segment is selected to be less than about one resonance cycle in length for said range of values for said sensed physical parameter;

wherein said at least one operating segment is microshifted less than about one resonance cycle over said range of values for said sensed physical parameter;

wherein said wavelengths of said input measuring light are selected to fall at least substantially within said at least one operating segment over said range of values for said sensed physical parameter;

wherein said at least one operating segment and said wavelengths of said input measuring light are selected such that over said range of values for said sensed physical parameter said spectrally modulated output light bears a unique one-to-one relationship to said sensed physical parameter;

wherein said light transmission means are for conveying said input measuring light from said light source means to said optically resonant structure means and for conveying said spectrally modulated output light from said optically resonant structure means to said detection means;

wherein said detection means are for deriving two electrical signals corresponding to any two different portions of said spectrally modulated output light; and

are for taking the ratio of said two electrical signals to provide an output measuring electrical signal which is a function of said sensed physical parameter, to null errors in the measurement of the sensed physical parameter and to help to maximize both the useable length and the useable microshift of said at least one operating segment over said range of values for said sensed physical parameter;

wherein said optically resonant structure means comprises a body defining a cavity having a pair of opposed reflective surfaces;

wherein at least one of said reflective surfaces bows as a function of said sensed physical parameter; and

wherein said optically sensitive physical characteristic comprises the distance between said pair of opposed reflective surfaces and is a function of said bowing; and

wherein said sensed physical parameter comprises a sensed chemical species;

wherein at least a portion of said body comprises a semipermeable membrane;

wherein said cavity is at least partially filled with a sensitive media which is responsive to said sensed chemical species;

wherein said sensitive media comprises at least one of a solvent and a solvent/solute solution; and

wherein said sensitive media responds to said sensed chemical species by changing its volume to an osmotic pressure difference across said permeable membrane to cause said bowing of said at least one of said reflective surfaces.

3. An optical measuring device for measuring a range of values for a sensed physical parameter, wherein said optical measuring device comprises:

light source means for emitting input measuring light of at least two wavelengths;

optically resonant structure means;

detection means; and

light transmission means;

wherein said optically resonant structure means has a reflectivity curve and a transmission curve, and has at least one operating segment on at least one of said reflectivity curve and said transmission curve;

wherein said optically resonant structure means has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said changes of said optically sensitive physical characteristic microshift said at least one operating segment as a function of said sensed physical parameter;

wherein said optically resonant structure means are for spectrally modulating said input measuring light as a function of said microshifts to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said at least one operating segment is selected to be less than about one resonance cycle in length for said range of values for said sensed physical parameter;

wherein said at least one operating segment is microshifted less than about one resonance cycle over said range of values for said sensed physical parameter;

wherein said wavelengths of said input measuring light are selected to fall at least substantially within said at least one operating segment over said range of values for said sensed physical parameter;

wherein said at least one operating segment and said wavelengths of said input measuring light are selected such that over said range of values for said sensed physical parameter said spectrally modulated output light bears a unique one-to-one relationship to said sensed physical parameter;

wherein said light transmission means are for conveying said input measuring light from said light source means to said optically resonant structure means and for conveying said spectrally modulated output light from said optically resonant structure means to said detection means;

wherein said detection means are for deriving two electrical signals corresponding to any two different portions of said spectrally modulated output light; and

are for taking the ratio of said two electrical signals to provide an output measuring electrical signal which is a function of said sensed physical parameter, to null errors in the measurement of the sensed physical parameter and to help to maximize both the useable length and the useable microshift of said at least one operating segment over said range of values for said sensed physical parameter;

wherein said sensed physical parameter comprises a sensed chemical species;

wherein said optically resonant structure means comprises a body defining a cavity having at least one reflective surface;

wherein said cavity is at least partially filled with a sensitive media which is responsive to said sensed chemical species and which responds to said sensed chemical species by changing its volume as a function of said sensed chemical species;

wherein said sensitive media has a reflective surface which is opposite said at least one reflective surface;

wherein said change in volume displaces said reflective surface of said sensitive media as a function of said sensed chemical species; and

wherein said optically sensitive physical characteristic comprises the distance between said opposed reflective surfaces and is a function of said displacement of said reflective surface of said sensitive media.

4. An optical measuring device according to claim 3, wherein said optically resonant structure means further comprises a reflective cover means extending over at least a portion of said reflective surface of said sensitive media.

5. An optical measuring device for measuring a range of values for a sensed physical parameter, wherein said optical measuring device comprises:

light source means for emitting input measuring light of at least two wavelengths;

optically resonant structure means;

detection means; and

light transmission means;

wherein said optically resonant structure means has a reflectivity curve and a transmission curve, and has at least one operating segment on at least one of said reflectivity curve and said transmission curve;

wherein said optically resonant structure means has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said changes of said optically sensitive physical characteristic microshift said at least one operating segment as a function of said sensed physical parameter;

wherein said optically resonant structure means are for spectrally modulating said input measuring light as a function of said microshifts to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said at least one operating segment is selected to be less than about one resonance cycle in length for said range of values for said sensed physical parameter;

wherein said at least one operating segment is microshifted less than about one resonance cycle over said range of values for said sensed physical parameter;

wherein said wavelengths of said input measuring light are selected to fall at least substantially within said at least one operating segment over said range of values for said sensed physical parameter;

wherein said at least one operating segment and said wavelengths of said input measuring light are selected such that over said range of values for said sensed physical parameter said spectrally modulated output light bears a unique one-to-one relationship to said sensed physical parameter;

wherein said light transmission means are for conveying said input measuring light from said light source means to said optically resonant structure means and for conveying said spectrally modulated output light from said optically resonant structure means to said detection means;

wherein said detection means are for deriving two electrical signals corresponding to any two different portions of said spectrally modulated output light; and

are for taking the ratio of said two electrical signals to provide an output measuring electrical signal which is a function of said sensed physical parameter, to null errors in the measurement of the sensed physical parameter and to help to maximize both the useable length and the useable microshift of said at least one operating segment over said range of values for said sensed physical parameter;

wherein said sensed physical parameter comprises a sensed chemical species;

wherein said optically resonant structure means comprises a body defining a cavity having at least one reflective surface;

wherein said cavity is at least partially filled with a sensitive media which is responsive to said sensed chemical species and which responds to said sensed chemical species by changing its index of refraction as a function of said sensed chemical species;

wherein said sensitive media has a reflective surface which is opposite said at least one reflective surface; and

wherein said optically sensitive physical characteristic comprises said index of refraction.

6. An optical measuring device according to claim 5, wherein said optically resonant structure means further comprises a reflective cover means extending over at least a portion of said reflective surface of said sensitive media.

7. An optical measuring device for measuring a range of values for a sensed physical parameter, wherein said optical measuring device comprises:

light source means for emitting input measuring light of at least two wavelengths;

optically resonant structure means;

detection means; and

light transmission means;

wherein said optically resonant structure means has a reflectivity curve and a transmission curve, and has at least one operating segment on at least one of said reflectivity curve and said transmission curve;

wherein said optically resonant structure means has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said changes of said optically sensitive physical characteristic microshift said at least one operating segment as a function of said sensed physical parameter;

wherein said optically resonant structure means are for spectrally modulating said input measuring light as a function of said microshifts to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said at least one operating segment is selected to be less than about one resonance cycle in length for said range of values for said sensed physical parameter;

wherein said at least one operating segment is microshifted less than about one resonance cycle over said range of values for said sensed physical parameter;

wherein said wavelengths of said input measuring light are selected to fall at least substantially within said at least one operating segment over said range of values for said sensed physical parameter;

wherein said at least one operating segment and said wavelengths of said input measuring light are selected such that over said range of values for said sensed physical parameter said spectrally modulated output light bears a unique one-to-one relationship to said sensed physical parameter;

wherein said light transmission means are for conveying said input measuring light from said light source means to said optically resonant structure means and for conveying said spectrally modulated output light from said optically resonant structure means to said detection means;

wherein said detection means are for deriving two electrical signals corresponding to any two different portions of said spectrally modulated output light; and

are for taking the ratio of said two electrical signals to provide an output measuring electrical signal which is a function of said sensed physical parameter, to null errors in the measurement of the sensed physical parameter and to help to maximize both the useable length and the useable microshift of said at least one operating segment over said range of values for said sensed physical parameter;

wherein said sensed physical parameter comprises the density of a gas;

wherein said optically resonant structure means comprises a body defining a cavity having a pair of opposed reflective surfaces, and further comprises a conduit means for providing fluid communication for said gas with said cavity;

wherein said optically sensitive physical characteristic is the index of refraction of said gas in said cavity and is a function of the density of said gas.

8. An optical measuring device for measuring a range of values for a sensed physical parameter, wherein said optical measuring device comprises:

light source means for emitting input measuring light of at least two wavelengths;

optically resonant structure means;

detection means; and

light transmission means;

wherein said optically resonant structure means has a reflectivity curve and a transmission curve, and has at least one operating segment on at least one of said reflectivity curve and said transmission curve;

wherein said optically resonant structure means has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said changes of said optically sensitive physical characteristic microshift said at least one operating segment as a function of said sensed physical parameter;

wherein said optically resonant structure means are for spectrally modulating said input measuring light as a function of said microshifts to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said at least one operating segment is selected to be less than about one resonance cycle in length for said range of values for said sensed physical parameter;

wherein said at least one operating segment is microshifted less than about one resonance cycle over said range of values for said sensed physical parameter;

wherein said wavelengths of said input measuring light are selected to fall at least substantially within said at least one operating segment over said range of values for said sensed physical parameter;

wherein said at least one operating segment and said wavelengths of said input measuring light are selected such that over said range of values for said sensed physical parameter said spectrally modulated output light bears a unique one-to-one relationship to said sensed physical parameter;

wherein said light transmission means are for conveying said input measuring light from said light source means to said optically resonant structure means and for conveying said spectrally modulated output light from said optically resonant structure means to said detection means;

wherein said detection means are for deriving two electrical signals corresponding to any two different portions of said spectrally modulated output light; and

are for taking the ratio of said two electrical signals to provide an output measuring electrical signal which is a function of said sensed physical parameter, to null errors in the measurement of the sensed physical parameter and to help to maximize both the useable length and the useable microshift of said at least one operating segment over said range of values for said sensed physical parameter;

wherein said optically resonant structure comprises a layer of sensitive media having opposed reflective surfaces; and

wherein said optically sensitive physical characteristic comprises the index of refraction of said sensitive media.

9. An optical measuring device according to claim 8, wherein said sensed physical parameter comprises temperature;

and wherein said sensitive media has an index of refraction which is a function of temperature.

10. An optical measuring device according to claim 8, wherein said sensed physical parameter comprises a sensed chemical species;

and wherein said sensitive media has an index of refection which is a function of said sensed chemical species.

11. A spectral modulation sensor for sensing a range of values for a sensed physical parameter;

wherein said spectral modulation sensor comprises an optically resonant structure means;

wherein said optically resonant structure means is adapted to receive input measuring light from a light source means;

wherein said optically resonant structure means has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said optically resonant structure means are for generally modulating said input measuring light as a function of said optically sensitive physical characteristic to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said optically resonant structure comprises a layer of sensitive media having opposed first reflective surfaces;

wherein said spectral modulation sensor further comprises second reflective surface means adjacent the opposed first surfaces of said layer of sensitive media to increase the sensitivity of said spectral modulation sensor; and

wherein said optically sensitive physical characteristic comprises the index of refraction of said sensitive media.

12. A spectral modulation sensor according to claim 11, wherein said sensed physical parameter comprises temperature;

and wherein said sensitive media has an index of refraction which is a function of temperature.

13. A spectral modulation sensor according to claim 11, wherein said sensed physical parameter comprises a sensed chemical species;

and wherein said sensitive media has an index of refraction which is a function of said sensed chemical species.

14. A spectral modulation sensor for sensing a range of values for a sensed physical parameter;

wherein said spectral modulation sensor comprises an optically resonant structure means;

wherein said optically resonant structure means is adapted to receive input measuring light from a light source means;

wherein said optically resonant structure means has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said optically resonant structure means are for generally modulating said input measuring light as a function of said optically sensitive physical characteristic to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said optically resonant structure comprises a layer of sensitive media having opposed first reflective surfaces;

wherein said spectral modulation sensor further comprises second reflective surface means adjacent the opposed first surfaces of said layer of sensitive media to increase the sensitivity of said spectral modulation sensor; and

wherein said optically sensitive physical characteristic comprises the distance between said opposed reflective surfaces.

15. A spectral modulation sensor according to claim 14, wherein said sensed physical parameter comprises temperature;

wherein said layer of sensitive media has a thickness which is a function of the temperature to which it is exposed; and

wherein said distance is a function of the temperature to which said layer of sensitive media is exposed.

16. A spectral modulation sensor according to claim 14, wherein said sensed physical parameter comprises pH;

wherein said layer of sensitive media has a thickness which is a function of the pH to which it is exposed; and

wherein said distance is a function of the pH to which said layer of sensitive media is exposed.

17. A spectral modulation sensor according to claim 14, wherein said sensed physical parameter comprises a sensed chemical species;

wherein said layer of sensitive media has a thickness which is a function of said sensed chemical species to which it is exposed; and

wherein said distance is a function of said sensed chemical species to which it is exposed.

18. An optical measuring device for measuring a range of values for a sensed physical parameter, wherein said optical measuring device comprises:

light source means for emitting input measuring light of at least two wavelengths;

optically resonant structure means;

detection means; and

light transmission means;

wherein said optically resonant structure means has a reflectivity curve and a transmission curve, and has at least one operating segment on at least one of said reflectivity curve and said transmission curve;

wherein said optically resonant structure means has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said changes of said optically sensitive physical characteristic microshift said at least one operating segment as a function of said sensed physical parameter;

wherein said optically resonant structure means are for spectrally modulating said input measuring light as a function of said microshifts to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said at least one operating segment is selected to be less than about one resonance cycle in length for said range of values for said sensed physical parameter;

wherein said at least one operating segment is microshifted less than about one resonance cycle over said range of values for said sensed physical parameter;

wherein said wavelengths of said input measuring light are selected to fall at least substantially within said at least one operating segment over said range of values for said sensed physical parameter;

wherein said at least one operating segment and said wavelengths of said input measuring light are selected such that over said range of values for said sensed physical parameter said spectrally modulated output light bears a unique one-to-one relationship to said sensed physical parameter;

wherein said light transmission means are for conveying said input measuring light from said light source means to said optically resonant structure means and for conveying said spectrally modulated output light from said optically resonant structure means to said detection means;

wherein said detection means are for deriving two electrical signals corresponding to any two different portions of said spectrally modulated output light; and

are for taking the ratio of said two electrical signals to provide an output measuring electrical signal which is a function of said sensed physical parameter, to null errors in the measurement of the sensed physical parameter and to help to maximize both the useable length and the useable microshift of said at least one operating segment over said range of values for said sensed physical parameter;

wherein said optically resonant structure comprises a layer of sensitive media having opposed reflective surfaces; and

wherein said optically sensitive physical characteristic comprises the index of refraction of said sensitive media.

19. The device according to claim 18 wherein one of the bodies comprises said optical fiber.

20. A spectral modulation sensor for sensing a range of values for a sensed physical parameter;

wherein said spectral modulation sensor comprises an optically resonant structure means;

wherein said optically resonant structure means is adapted to receive input measuring light from a light source means;

wherein said optically resonant structure means has an optically sensitive physical characteristic which changes as a function of said sensed physical parameter;

wherein said optically resonant structure means are for generally modulating said input measuring light as a function of said optically sensitive physical characteristic to produce spectrally modulated output light which is spectrally modulated as a function of said sensed physical parameter;

wherein said optically resonant structure comprises a body defining a cavity in which a layer of sensitive media is disposed; and

wherein said optically sensitive physical characteristic comprises the index of refraction of said sensitive media.

21. The spectral modulation sensor of claim 20, wherein said layer of sensitive media includes opposed surfaces, and wherein said optically resonant structure further comprises:

cover means extending over at least a portion of said cavity; and

, interior reflective surface means facing at least one of said opposed surfaces of said layer of sensitive media.

22. The spectral modulation sensor of claim 21, wherein said interior reflective surface means face both of said opposed surfaces of said layer of sensitive media.

23. The spectral modulation sensor of claim 20, wherein said sensed physical parameter comprises a sensed chemical species, and wherein said sensitive media has an index of refraction which is a function of said sensed chemical species.

24. The spectral modulation sensor of claim 23, wherein said sensed chemical species comprises pH,

25. The spectral modulation sensor of claim 23, wherein said sensed chemical species comprises pCO₂.

26. A variable gap optical sensor device comprising:

a first body including a first reflective surface;

a second body mounted to the first body, the said second body including a cavity formed therein which has a second reflective surface opposite said first reflective surface;

at least one of said bodies being flexible so that the body can be deformed and the gap between the reflective surfaces can be varied, while the gap in the undeformed state is no greater than 30 um; and

a single optical fiber mounted with respect to the first and second reflective surfaces so that light from the core of said fiber will be incident on at least a portion of said surfaces, and light reflected from said surfaces will be incident on said core.

27. The variable gap optical sensor device of claim 26, wherein at least one of said first and second reflective surfaces comprises a reflecting coating element formed as part of said surface.