Force transducer etched from silicon

• US 4,945,773 A
• Filed: 03/06/1989
• Issued: 08/07/1990
• Est. Priority Date: 03/06/1989
• Status: Expired due to Term

• Current Assignee: University of Michigan
• Original Assignee: Ford Motor Company
• Inventors: Sickafus, Edward N.
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US07/319,495
• Time in Patent Office: 519 Days
• Field of Search: 73/517 AV, 73/862.59, 73/DIG. 1
• US Class Current: 73/862.59
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/132 with electromagnetic counterbalancing means
• CPC Class Codes: Y10S 73/01 Vibration

Abstract

An accelerometer fabricated by silicon etching techniques. A first suspended beam is formed having a first conductive portion, the beam being deflectable in response to an acceleration force. a second beam having second and third conductive portions is suspended over the first beam. Phased lock loop circuitry oscillates the second beam at resonance and provides an electrical signal proportional to the acceleration force.

Claims

1. An apparatus for sensing an applied force, comprising:

a first suspended beam being deflectable only in response to an orthogonal component of the applied force;

a second suspended beam positioned opposite said first suspended beam, said second suspended beam oscillating in response to application of electrical power and position of the first beam;

power means for applying said electrical power between said first suspended beam and said second suspended beam in relation to deflection of said first suspended beam; and

sensing means for sensing the applied force by sensing electrical power between said first suspended beam and said second suspended beam.

2. The apparatus recited in claim 1 wherein said power means comprises a phased lock loop having feedback from said sensing means for oscillating said second suspended beam at a resonant frequency.

3. An apparatus for sensing an applied force, comprising:

a first suspended beam etched from a silicon substrate, said first suspended beam having a first conductive portion and being deflectable only in response to the applied force;

a second suspended beam coupled to said substrate such that it is suspended opposite said first suspended beam, said second suspended beam including a second conductive portion and a third conductive portion both being positioned opposite said first conductive portion, said second suspended beam oscillating at a resonant frequency only in response to application of electrical power;

power means for applying said electrical power between said first conductive portion and said second conductive portion in relation to deflection of said first suspended beam to oscillate said second suspended beam at said resonant frequency; and

sensing means for sensing the applied force by sensing electrical power between said third conductive portion and said first conductive portion.

4. The apparatus recited in claim 3 wherein said power means includes a phased lock loop having feedback from said sensing means for oscillating said second suspended beam at its resonant frequency.

5. The apparatus recited in claim 3 wherein said first conductive portion is formed by doping a portion of said first suspended beam.

6. The apparatus recited in claim 3 wherein said first conductive portion is formed by coupling a conductive layer to a portion of said first suspended beam.

7. The apparatus recited in claim 3 wherein said second suspended beam is comprised of polysilicon.

8. The apparatus recited in claim 3 wherein said second suspended beam is comprised of silicon.

9. The apparatus recited in claim 3 wherein said second suspended beam is comprised of silicon oxide.

10. The apparatus recited in claim 3 wherein said second suspended beam is comprised of silicon nitride.

11. The apparatus recited in claim 3 wherein said second suspended beam is comprised of layers of silicon oxide and silicon nitride.

12. The apparatus recited in claim 3 wherein said second and said third conductive portions are formed by coupling conductive layers to said second suspended beam.

13. The apparatus recited in claim 12 wherein said conductive layers each comprise a conductive metal material.

14. The apparatus recited in claim 12 wherein said conductive layers each comprise a doped polysilicon material.

15. An apparatus for detecting an acceleration force, comprising:

a first suspended beam defined by a portion of a silicon substrate between a pair of cavities, said first suspended beam being deflectable only in response to the acceleration force and having a first conductive portion;

a pair of flexing means symmetrically positioned around said first suspended beam and integrally formed from said substrate for enabling deflection of said first suspended beam in response to the acceleration force;

a second suspended beam coupled to said substrate and suspended opposite said first suspended beam, said second suspended beam having a second conductive portion and a third conductive portion each positioned opposite said first conductive portion, said second suspended beam oscillating at a resonant frequency only in response to application of electrical power;

power means for applying said electrical power between said first conductive portion and said second conductive portion as a function of deflection of said first suspended beam to oscillate said second suspended beam at said resonant frequency; and

sensing means for sensing the acceleration force by sensing electrical power between said third conductive portion and said first conductive portion.

16. The apparatus recited in claim 15 wherein said power means includes a phased lock loop having feedback from said sensing means for oscillating said second suspended beam at its resonant frequency and wherein each of said conductive portions comprise capacitive plates.

17. The apparatus recited in claim 15 wherein said second suspended beam is comprised of polysilicon.

18. The apparatus recited in claim 15 wherein said second suspended beam is comprised of silicon nitride.

19. The apparatus recited in claim 15 wherein said second and said third conductive portions are formed by coupling conductive layers to said second suspended beam.

20. The apparatus recited in claim 19 wherein said conductive layers each comprise a conductive metal material.

21. The apparatus recited in claim 19 wherein said conductive layers each comprise a doped polysilicon material.