Crystal growth method in crucible with step portion

• US 4,946,542 A
• Filed: 12/05/1988
• Issued: 08/07/1990
• Est. Priority Date: 12/05/1988
• Status: Expired due to Term

• Current Assignee: American Telephone & Telegraph Company (AT&T, Inc.)
• Original Assignee: AT&T, Inc.
• Inventors: Clemans, Jim E.
• Primary Examiner(s): Andrews, Melvyn J.
• Application Number:
  US07/280,059
• Time in Patent Office: 610 Days
• Field of Search: 156/616.1, 156/616.2, 156/616.3, 156/616.4, 156/616.41, 156/607, 156/DIG. 70, 156/DIG. 93, 422/248, 164/122.2
• US Class Current: 117/83
• CPC Class Codes: C30B 11/002 Crucibles or containers for supporting the melt
• CPC Class Codes: C30B 29/40 AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
• CPC Class Codes: Y10S 117/90 Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating

Abstract

In a VGF process for growing a large single crystal 16'"'"' in a crucible 11, the problem of stress forces caused by a freezing liquid encapsulant are solved by using a step or indentation 21 around the inner surface of the crucible 11 at or near the top of the single crystal 16'"'"' being grown. As a consequence, the newly-frozen single crystal (e.g., InP)conforms to the shape of the indented inner surface of the crucible and therefore has a pronounced bulge 22 near its top. The bulge of the frozen semiconductor crystal then nests against the indentation on the periphery of the crucible, thereby to prevent any liquid encapsulant from flowing between the crystal and the wall of the crucible.

Claims

1. A process for making large single crystals of a semiconductor material comprising the steps of:

introducing into the bottom part of a crucible a relatively small monocrystalline seed crystal of the material;

introducing over the seed crystal a quantity of raw material from which the single crystal may be made and an encapsulant material;

heating the crucible to melt the raw material, the encapsulant material, and part of the seed crystal;

the molten encapsulant material having a lower density than the molten semiconductor material so as to float on the molten semiconductor material; and

freezing the semiconductor material such that it extends as substantially a single crystal from the seed crystal, wherein;

the inner surface of the crucible has a larger periphery portion and a smaller periphery portion defining therebetween a step portion extending around the periphery of the inner surface of the crucible;

at least part of the larger periphery portion is located between the molten encapsulation material, as it is supported on the frozen semiconductor material, and the smaller periphery portion;

the larger periphery portion causes the frozen large single crystal to have a bulge in a portion of its outer periphery, whereby, when the molten semiconductor material freezes, the bulge in the outer periphery of the frozen semiconductor crystal nests against the step portion around the inner surface of the crucible, thereby to prevent molten encapsulant material from flowing between the semiconductor crystal and the crucible.

2. The process of claim 1 wherein:

the portion of the crucible in which the step portion is made constitutes a section of a cylinder; and

the step portion is a ring-shaped indentation.

3. The process of claim 2 wherein:

the semiconductor material is a Group III-V material;

the encapsulant material is boric oxide; and

the crucible is made of quartz.

4. The process of claim 1 wherein:

the process for making large single crystals is a vertical gradient freeze process.

5. The process of claim 2 wherein:

the ring-shaped indentation is made by making a ring-shaped bulge around the wall of the crucible.

6. The process of claim 1 wherein:

the step portion is defined by a step between an upper cylindrical portion of the crucible and a lower cylindrical portion of the crucible of smaller inner diameter than the upper cylindrical portion.

7. The process of claim 6 wherein:

the semiconductor material is a Group III-V material;

the encapsulant is boric oxide; and

the crucible is made of pyrolitic boron nitride.

8. A VGF process for making large single crystals of a Group III-V semiconductor material comprising the steps of:

introducing into the bottom part of a crucible a monocrystalline seed crystal of the Group III-V material;

introducing over the seed crystal a quantity of Group III-V material in polycrystalline or amorphous form and a quantity of an encapsulant material, which in its liquid phase has a lower density than the liquid form of the Group III-V material;

heating the crucible to melt the quantity of Group III-V material, the encapsulant material and part of the seed crystal; and

freezing the Group III-V material such that it progressively freezes in a vertically upward direction, to form a crystal, the top of which is the last part thereof to freeze;

characterized in that;

the crucible is made to have a step portion extending around the periphery of its inner surface at a location near the top of the frozen Group III-V material crystal, the crucible having a larger cross-sectional area between the top of the frozen crystal and the step portion than in a downward direction from the step portion, whereby, when the Group III-V material freezes, it has a bulge near its top which, by gravity, nests against the step portion to seal a lower portion of the frozen Group III-V crystal from the liquid encapsulant and to prevent the liquid encapsulant from flowing between the newly-frozen crystal and the crucible.

9. The process of claim 8 further characterized in that:

the Group III-V material is indium phosphide; and

the encapsulant material is boric oxide.

10. The process of claim 9 further characterized in that:

the crucible is made of quartz; and

the step portion is defined by a bulge extending around a cylindrical portion of the crucible.

11. The process of claim 9 further characterized in that:

the crucible is made of pyrolitic boron nitride; and

the step portion is defined by a step between an upper cylindrical portion of the crucible and a lower cylindrical portion of the crucible of smaller inside diameter than the upper cylindrical portion.

12. The process of claim 8 further characterized in that:

the step portion is made by a reaction between the encapsulant and the crucible which dissolves part of the crucible wall.