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Vibrating force sensor

  • US 4,947,694 A
  • Filed: 03/09/1989
  • Issued: 08/14/1990
  • Est. Priority Date: 03/16/1988
  • Status: Expired due to Term
First Claim
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1. A vibrational force sensor, comprising:

  • a strip having three metallic coplanar beams spaced side by side;

    capacitive means for driving the beams into flexural vibration in a plane normal to the common plane of the beams;

    capacitive means for detecting changes in the frequency of the flexural vibrations of the beams in response to changes in tension applied to the sensor, said capacitive driving and detecting means including drive and detect electrodes, a shielding layer of conductive material having a surface, an intermediate insulating layer having a surface and being located on the surface of the shielding layer, said drive and detect electrodes being formed on the surface of the intermediate insulating layer;

    a feedback oscillator circuit having an input to which the detect electrode is connected, and an output to which the drive electrode is connected, said oscillator circuit being operative for generating an output signal for driving said drive electrode; and

    converter means connected to the output of said feedback oscillator circuit for converting said output signal into a weight signal.

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