Cascade arc plasma torch and a process for plasma polymerization
First Claim
1. A process for plasma polymerization at low pressure comprising the steps:
- (a) creating a plasma in a cascade arc generator to form a plasma torch which is directed into a low pressure zone;
(b) injecting a monomeric gas into a central passage upstream of said plasma torch; and
(c) directing the plasma torch resulting from step (b) onto a substrate to form a film thereon by plasma polymerization.
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Abstract
The present invention is directed to an arrangement of cascade arc plasma torches in a process for plasma polymerization. The arrangement is utilized in low temperature plasma polymerization coating and utilizes a plasma reactor with concentric electroconductive rings separated by insulator rings. The rings are positioned between electrode connectors and form a central passage through the plasma reactor. A voltage supply source provides a voltage across the plasma reactor so as to initiate and continue the polymerization coating process. Downstream of the plasma reactor, an arrangement is provided by which monomeric gas is fed into a passage at a downstream end of the reactor so as to enable plasma polymerization.
78 Citations
21 Claims
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1. A process for plasma polymerization at low pressure comprising the steps:
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(a) creating a plasma in a cascade arc generator to form a plasma torch which is directed into a low pressure zone; (b) injecting a monomeric gas into a central passage upstream of said plasma torch; and (c) directing the plasma torch resulting from step (b) onto a substrate to form a film thereon by plasma polymerization. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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- 8. A cascade arc plasma torch apparatus for use in low temperature plasma polymerization coating, comprising means for vacuum generation and, in association therewith at least one plasma reactor including concentric electroconductive rings separated by insulator rings, said electroconductive rings and said insulator rings being arranged between electrode connectors and forming a central passage through said plasma reactor, a voltage supply source providing a voltage across said plasma reactor, and supply means for introducing an inert gas into said central passage, and further including conduit means for directing monomeric gas enabling plasma polymerization into a torch generated at the downstream end of said central passage.
- 12. A cascade arc plasma torch apparatus for use in low temperature plasma polymerization coating, comprising means for vacuum generation and, in association therewith a plasma reactor including concentric electroconductive rings separated by insulator rings, said electroconductive rings and said insulator rings being arranged between electrode connectors and forming a central passage through said plasma reactor, a voltage supply source providing a voltage across said plasma reactor, and supply means for introducing an inert gas into said central passage, further including injector means positioned at a downstream end of the plasma reactor for injecting monomeric gas into said central passage at the downstream end thereof so as to permit plasma polymerization.
Specification