Vibration cancellation system for scanning electron microscopes

• US 4,948,971 A
• Filed: 11/14/1988
• Issued: 08/14/1990
• Est. Priority Date: 11/14/1988
• Status: Expired due to Term

• Current Assignee: AMRAY, Inc. (KLA Corporation)
• Original Assignee: AMRAY, Inc. (KLA Corporation)
• Inventors: Vogen, Wayne V., Mannion, Martin D.
• Primary Examiner(s): Berman, Jack I.
• Application Number:
  US07/270,369
• Time in Patent Office: 638 Days
• Field of Search: 250/310, 250/306, 250/307, 250/311
• US Class Current: 250/310
• CPC Class Codes: H01J 37/02 Details
• CPC Class Codes: H01J 37/1474 Scanning means

Abstract

A method and system to reduce the sensitivity of instruments such as scanning electron microscopes to vibrations and similar disturbances. In the preferred embodiment, the system includes at least two velocity sensors connected to the specimen stage of the microscope to detect vibrations in two independent directions, integrators to integrate output signals from the velocity sensors to indicate displacement of the specimen stage in the two directions, and a beam steering device that receives signals from the integrators and adjusts the normal scanning pattern of the electron beam of the microscope to reduce the effect of vibrations.

Claims

1. A system for adjusting the scanning pattern of an electron beam in a scanning electron microscope to decrease image sensitivity to vibrations, comprising:

at least one velocity sensor means comprising a seismometer means having a resonant frequency less than about thirty hertz connected to the scanning electron microscope to sense vibrations in at least one direction;

integrator means for integrating output signals from the velocity sensor means;

beam steering means connected to receive the integrated signals from the velocity sensor means and operative, in response to the received signals, to adjust the normal scanning pattern of the electron beam of the microscope in a way that reduces the effects of the sensed vibrations on images provided by the scanning electron microscope.

2. A system according to claim 1 wherein the velocity sensor means includes at least two seismometers.

3. A system according to claim 2 wherein each of the at least two seismometers is of the type having a moving coil within a magnet.

4. A system according to claim 1 further including a variable gain amplifier to adjustably increase the amplitude of output signals from the integrator means.

5. A system according to claim 1 wherein at least one of the velocity sensor means is arranged to detect vibrations in a first direction and one other of the velocity sensor means is arranged to detect vibrations in a second direction which is not parallel to the first direction.

6. A system to adjust the scanning pattern of an electron beam in scanning electron microscopes to decrease image sensitivity to vibrations, comprising:

velocity sensor means connected to the scanning electron microscope to sense vibrations in at least one direction, the velocity sensor means comprising seismometer means having a resonant frequency less than about thirty hertz;

integrator means to integrate output signals from the velocity sensor means, thereby to indicate displacement of the specimen stage;

beam steering means connected to receive displacement signals from the integrator means and operative to adjust the normal scanning pattern of the electron beam of the microscope in a way that reduces the effects of the sensed vibrations on images provided by the microscope.

7. A system according to claim 6 further including a variable gain amplifier to adjustably increase the amplitude of the output of the integrator means.

8. A system according to claim 6 wherein at least two of the velocity sensor means are provided, and one of the velocity sensor means is arranged to detect vibrations in a first direction and another of the velocity sensor means is arranged to detect vibrations in a second direction which is not parallel to the first direction.

9. A system to adjust the scanning pattern of an electron beam in scanning electron microscopes to decrease image sensitivity to vibrations, comprising:

a first velocity sensor connected to the specimen stage of the scanning electron microscope to sense vibrations of the stage in a first direction, the first velocity sensor means comprising seismometer means having a resonant frequency less than about thirty hertz;

a second velocity sensor connected to the specimen stage of the scanning electron microscope to sense vibrations in a second direction which is not parallel to the first direction, the second velocity sensor means also comprising seismometer means having a resonant frequency less than about thirty hertz;

first integrator means to integrate output signals from the first velocity sensor to indicate displacement of the first sensor in the first direction;

second integrator means to integrate output signals from the second velocity sensor to indicate displacement of the second sensor in the second direction;

first beam steering means connected to receive output signals from the first integrator means and operative to adjust the scanning pattern of the electron beam of the microscope in a way which reduces the effects of vibrations on the electron beam scanning pattern in the first direction;

second beam steering means connected to receive output signals from the second integrator means and operative to adjust the scanning pattern of the electron beam in a way which reduces the effects of vibrations on the electron beam scanning pattern in the second direction.

10. A system according to claim 9 further including first and second variable gain amplifiers that are connected to adjustably increase the amplitude of the outputs of the first and second velocity sensors, respectively.

11. A system according to claim 9 wherein the first direction is generally perpendicular to the second direction.

12. A system to adjust the scanning pattern of an electron beam in scanning electron microscopes to decrease image sensitivity to vibrations, comprising:

first and second velocity sensors connected, respectively, to the specimen stage and body of a scanning electron microscope to sense vibrations of the stage relative to the body in a first direction, the first and second velocity sensors each comprising a seismometer means having a resonant frequency less than about thirty hertz;

third and fourth velocity sensors connected, respectively, to the specimen stage and body of the scanning electron microscope to sense vibrations of the stage relative to the microscope body in a second direction not aligned with the first direction, the third and fourth velocity sensors having a resonant frequency less than about thirty hertz;

first amplifier means to provide outputs proportional to differences in magnitude of the outputs of the first and second velocity sensors;

second amplifier means to provide outputs proportional to differences in magnitude of the outputs of the third and fourth velocity sensors;

first integrator means to integrate output signals from the first amplifier means to indicate relative displacement in the first direction between the first and second velocity sensors;

second integrator means to integrate output signals for the second amplifier means to indicate relative displacement in the second direction between the third and fourth velocity sensors;

first steering adjustment means connected to receive amplified output signals from the first integrator means and operative to adjust the scanning pattern of the electron beam of the microscope to reduce the effects of vibrations on images in the first direction; and

second steering means connected to receive output signals from the second integrator means and operative to adjust the scanning pattern of the electron beam of the microscope to reduce the effects of vibrations on images in the second direction.

13. A system according to claim 12 further including first and second variable gain amplifiers which are connected to adjustably increase the amplitude of the output of the respective first and second integrator means.

14. A system according to claim 12 wherein the first direction is generally perpendicular to the second direction.

15. A system to decrease the image sensitivity of scanning electron microscopes to vibrations, comprising:

velocity sensor means connected to the scanning electron microscope to sense vibrations in at least one direction, the velocity sensor means comprising a seismometer means having a resonant frequency less than about thirty hertz;

integrator means to integrate output signals from the velocity sensor means, thereby to indicate displacement of the specimen stage; and

adjustment means connected to receive displacement signals from the integrator means and operative to store and adjust image information provided by the microscope in a way which reduces the effects of sensed vibrations.

16. A system according to claim 15 wherein the adjustment means operates to adjust the position at which image information is stored.

17. A system according to claim 15 wherein the adjustment means operates in real time to adjust the scanning pattern of the electron beam in the microscope.