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Precision liquid dispenser

  • US 4,950,134 A
  • Filed: 12/27/1988
  • Issued: 08/21/1990
  • Est. Priority Date: 12/27/1988
  • Status: Expired due to Term
First Claim
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1. In a system for dispensing liquids used in the manufacture of components which require a layer of liquid to be placed thereon, a precision liquid dispenser for dispensing precise amounts of a pumped liquid at controlled rates comprising:

  • a positive displacement liquid pump having a flexible diaphragm, a pump chamber and a driving chamber on opposite sides of said diaphragm;

    an inlet channel and an outlet channel, each being capable of fluid communication with said pump chamber;

    valve means for selectively putting said inlet channel in fluid communication between a source of liquid to be dispensed and said pump chamber, and for selectively putting said outlet channel in fluid connection between said pump chamber and a dispensing port;

    a hydraulic driving system for selectively deforming said diaphragm;

    means for controlling said valve means in coordination with said means for controlling said hydraulic system;

    means for controlling said hydraulic system;

    said hydraulic system including a piston adjacent to said driving chamber for maintaining a driving liquid in fluid communication with said diaphragm;

    said means for controlling said hydraulic system including a reversible stepping motor, motion converting means for changing rotative output motion of said motor into axial motion of said piston to provide bi-directional linear motion of said piston;

    said motion converting means comprising a threaded coupling between said motor and said piston;

    and a source of electrical signals for controlling said motor.

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