Monitoring a plurality of identical process parameters
First Claim
1. A system for monitoring a plurality of processes which are identical with respect to at least one process parameter, employing a plurality of sensors each connected for monitoring the at least one process parameter of a respective process, each sensor having a response and the sensors all having identical responses to the at least one process parameter, comprising:
- sampling means connected to the sensors for deriving a succession of sensor response samples, each successive sample being associated with a respective sensor;
monitoring means connected to said sampling means for receiving each sample in succession and for evaluating a predetermined characteristic of the sensor response represented by each sample to produce an evaluating result, said monitoring means defining a processing path having an input to which all samples are applied in series and having an output for providing an indication of the evaluating result for each sample; and
diagnosing means connected for receiving and interpreting the indication of the evaluating result of each sample in order to provide an indication of status of each process.
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Accused Products
Abstract
A method and apparatus for monitoring a plurality of processes which are identical with respect to at least one process parameter, employing a plurality of sensors each disposed for monitoring the one process parameter of a respective process, the sensors all having identical responses to the one process parameter. Monitoring is performed by: deriving (2-10) from the sensor responses a succession of response samples each derived from a respective sensor. Then each sample is monitored in succession and a predetermined characteristic of the sensor response represented by each sample is evaluated, the monitoring step being carried out in a processing path having an input to which all samples are supplied in series and providing an output indication of the evaluating result for each sample. Finally, the indication of the evaluating result of each sample is interpreted in order to provide an indication of the status of each process.
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Citations
19 Claims
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1. A system for monitoring a plurality of processes which are identical with respect to at least one process parameter, employing a plurality of sensors each connected for monitoring the at least one process parameter of a respective process, each sensor having a response and the sensors all having identical responses to the at least one process parameter, comprising:
- sampling means connected to the sensors for deriving a succession of sensor response samples, each successive sample being associated with a respective sensor;
monitoring means connected to said sampling means for receiving each sample in succession and for evaluating a predetermined characteristic of the sensor response represented by each sample to produce an evaluating result, said monitoring means defining a processing path having an input to which all samples are applied in series and having an output for providing an indication of the evaluating result for each sample; and
diagnosing means connected for receiving and interpreting the indication of the evaluating result of each sample in order to provide an indication of status of each process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
- sampling means connected to the sensors for deriving a succession of sensor response samples, each successive sample being associated with a respective sensor;
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12. A method for monitoring a plurality of processes which are identical with respect to at least one process parameter, employing a plurality of sensors each connected for monitoring the at least one process parameter of a respective process, each sensor having a response and the sensors all having identical responses to the at least one process parameter, comprising:
- deriving from the sensor responses a succession of response samples each derived from a respective sensor;
monitoring each sample in succession and evaluating a predetermined characteristic of the sensor response represented by each sample to produce an output indication, said monitoring step being carried out in a processing path having an input to which all samples are applied in series and providing an output indication of the evaluating result for each sample; and
interpreting the indication of the evaluating result of each sample in order to provide an indication of status of each process. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
- deriving from the sensor responses a succession of response samples each derived from a respective sensor;
Specification