Method and apparatus for evaluating surface and subsurface features in a semiconductor

• US 4,952,063 A
• Filed: 05/15/1989
• Issued: 08/28/1990
• Est. Priority Date: 03/01/1985
• Status: Expired due to Term

• Current Assignee: The Therma-Wave Incorporated (KLA Corporation)
• Original Assignee: The Therma-Wave Incorporated (KLA Corporation)
• Inventors: Opsal, Jon, Rosencwaig, Allan, Smith, Walter L.
• Primary Examiner(s): Rosenberger, Richard A.
• Application Number:
  US07/351,540
• Time in Patent Office: 470 Days
• Field of Search: 356/432, 356/432 T, 356/433, 356/445
• US Class Current: 356/432
• CPC Class Codes: G01N 21/171 with calorimetric detection, e.g. with thermal lens detection
• CPC Class Codes: G01R 31/2656 using non-ionising electromagnetic radiation, e.g. optical radiation

Abstract

A method and apparatus are disclosed for evaluating surface and subsurface features in a semiconductor sample. In operation, a periodic energy source is applied to the surface of the semiconductor sample to generate a periodic electron-hole plasma. This plasma interacts with features in the sample as it diffuses. The plasma affects the index of refraction of the sample and the changing plasma density is monitored using a radiation probe. In the preferred embodiment, the radiation probe measures the plasma induced periodic changes of reflectivity of the surface of the sample to yield information about the sample, such as ion dopant concentrations, residue deposits and defects.

Claims

1. An apparatus for evaluating surface and subsurface conditions in a semiconductor sample comprising:

a periodic excitation source for supplying energy to the surface of the sample sufficient to create an electron-hole plasma having a density sufficient to cause changes in the optical reflectivity of the sample;

a probe for emitting a beam of radiation of a fixed wavelength shorter than the wavelength corresponding to the band-gap energy of the sample;

means for directing the radiation probe beam within a portion of the surface of the sample which has been periodically excited in a manner such that said probe beam is reflected;

means for monitoring the modulated intensity changes in said reflected probe beam resulting from the variations in the optical reflectivity of the sample due principally to the presence of the electron-hole plasma; and

means for processing the measured intensity changes of the reflected probe beam to evaluate the sample.

2. An apparatus as recited in claim 1 wherein said probe beam is directed toward the center of the area on the surface of the sample which has been the periodically excited.

3. An apparatus as recited in claim 1 wherein the monitoring means includes a photodetector.

4. An apparatus as recited in claim 1 wherein the processing means function to compare the monitored changes of the probe beam with predetermined changes of the probe beam associated with a known reference sample whereby variations in surface and subsurface conditions in the sample can be monitored.

5. An apparatus as recited in claim 1 further including a means for rastering the sample with respect to both the excitation source and radiation probe such that a two dimensional evaluation can be made.

6. An apparatus as recited in claim 1 wherein said probe beam is defined by a laser.

7. An apparatus as recited in claim 1 further including a means for controlling the modulation frequency (ω

) of the excitation source.

8. An apparatus as recited in claim 7 wherein the modulation frequency (ω

) of said excitation source is set such that the period between cycles is less than the time (τ

) required for electron-hole pairs to recombine (ω

τ

greater than

     1) whereby critically damped plasma waves are generated.

9. An apparatus as recited in claim 8 wherein changes in the probe beam are monitored as the modulation frequency (ω

) of the energy source is varied to provide information about subsurface characteristics of the sample.

10. An apparatus as recited in claim 9 wherein monitored changes in the probe beam are compared with predetermined changes of the probe beam associated with a known reference sample whereby variations in subsurface conditions of the sample can be monitored.

11. A method for evaluating surface and subsurface conditions in a semiconductor sample comprising the steps of:

supplying periodic energy to the surface of the sample to excite electrons and create an electron-hole plasma having a density sufficient to cause changes in the optical reflectivity of the sample;

directing a radiation probe beam on a portion of the area on the surface of the sample which has been periodically excited in a manner such that the probe beam is reflected, said probe beam being of a fixed wavelength and shorter than the wavelength corresponding to the band-gap energy of the sample;

monitoring changes in the modulated intensity of the reflected probe beam resulting from the changes in the optical reflectivity of the sample due principally to the presence of the electron-hole plasma; and

processing the monitored intensity changes of the probe beam to evaluate the sample.

12. A method as recited in claim 11 wherein said radiation probe is directed towards the center of the area on the surface of the sample which has been periodically excited.

13. A method as recited in claim 11 wherein during said processing step, the changes of said probe beam are compared with predetermined changes of the probe beam associated with a known reference sample, whereby variations in the surface and subsurface conditions in the sample can be monitored.

14. A method as recited in claim 11 further including the step of setting the modulation frequency (ω

) of the periodic energy source such that the period between cycles is less than the time (τ

) required for electron-hole pairs to recombine whereby critically damped plasma waves are generated.

15. A method as recited in claim 14 further including the step of monitoring changes in the probe beam as the modulation frequency (ω

) of the energy source is varied to provide information about subsurface characteristics of the sample.

16. A method as recited in claim 15 further including the step of comparing the measured changes in the probe beam to predetermine changes of the probe beam associated with a known reference sample, whereby variations in the subsurface conditions of the sample can be monitored.

17. A method as recited in claim 11 further including the step of rastering the sample with respect to the probe and energy beams to permit a two-dimensional analysis.

18. An apparatus for evaluating surface and subsurface conditions in a semiconductor sample comprising:

an intensity modulated laser energy beam for supplying energy to the surface of the sample sufficient to create an electron-hole plasma having a density sufficient to cause changes in the optical reflectivity of the sample;

a laser probe for emitting a beam of radiation of a fixed wavelength shorter than the wavelength corresponding to the band-gap energy of the sample;

means for directing the radiation probe beam within a portion of the surface of the sample which has been periodically excited in a manner such that said probe beam is reflected;

means for monitoring variations in the modulated intensity of said reflected probe beam resulting from changes in the optical reflectivity of the sample due principally to the presence of the electron-hole plasma; and

means for processing the measured intensity changes of the reflected probe beam to evaluate the sample.

19. An apparatus as recited in claim 18 wherein the probe beam is directed towards the center of the area on the surface of the sample which has been periodically excited.

20. An apparatus as recited in claim 18 wherein the monitoring means includes a photodetector.

21. An apparatus as recited in claim 18 wherein the processing means functions to compare the monitored changes of the probe beam with predetermined changes of the probe beam associated with a known reference sample, whereby variations in the surface and subsurface conditions in the sample can be monitored.

22. An apparatus as recited in claim 18 further including a means for rastering the sample with respect to both the excitation source and the radiation probe such that a two-dimensional evaluation can be made.

23. An apparatus as recited in claim 18 further including a means for controlling the modulation frequency (ω

) of the excitation source.

24. An apparatus as recited in claim 23, wherein the modulation frequency (ω

) of said excitation source is set such that the period between cycles is less than the time (τ

) required for electron-hole pairs to recombine whereby critically damped plasma waves are generated.

25. An apparatus as recited in claim 24, wherein changes in the probe beam are monitored as the modulation frequency (ω

) of the laser energy beam is varied to provide information about the surface and subsurface characteristics of the sample.

26. An apparatus as recited in claim 25, wherein monitored changes in the probe beam are compared with predetermined changes of the probe beam associated with a known reference sample, whereby variations in subsurface conditions of the sample can be monitored.

27. An apparatus as recited in claim 18 further including a focusing lens and wherein both said intensity modulated laser energy beam and said probe laser beam are focused normal to the surface of the sample through said lens.

28. A method for evaluating surface and subsurface conditions in a semiconductor sample comprising the steps of:

directing a periodic laser beam at the surface of the sample having an input energy sufficient to excite electrons and create an electron-hole plasma having a density sufficient to cause changes in the optical reflectivity of the sample;

directing a laser probe beam on a portion of the area on the surface of the sample which has been periodically excited in a manner such that the probe beam is reflected, said probe beam being of a fixed wavelength and shorter than the wavelength corresponding to the band-gap energy of the sample;

monitoring changes in the modulated intensity of the reflected probe beam resulting from the changes in the optical reflectivity of the sample due principally to the presence of the electron-hole plasma; and

processing the monitored intensity changes of the probe beam to evaluate the sample.

29. A method as recited in claim 28 wherein said radiation probe is directed towards the center of the area on the surface of the sample which has been periodically excited.

30. A method as recited in claim 28 wherein during said processing step, the changes of said probe beam are compared with predetermined changes of the probe beam associated with a known reference sample, whereby variations in the surface and subsurface conditions in the sample can be monitored.

31. A method as recited in claim 28 further including the step of setting the modulation frequency (ω

) of the periodic laser beam such that the period between cycles is less than the time (τ

) required for electron-hole pairs to recombine whereby critically damped plasma waves are generated.

32. A method as recited in claim 31 further including the step of monitoring changes in the probe beam as the modulation frequency (ω

) of the periodic laser beam is varied to provide information about subsurface characteristics of the sample.

33. A method as recited in claim 28 further including the step of rastering the sample with respect to the probe and energy beams to permit a two-dimensional analysis.

34. A method as recited in claim 28 further including the step of focusing the periodic laser beam and the probe laser beam normal to the surface of the sample through the same optical element.