Spatial light modulator
First Claim
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1. A spatial light modulator, comprising:
- (a) a plurality of pixels;
(b) each of said pixels includingi. an electrostatically deflectable reflecting element over an addressing electrode, andii. a plurality of supports for said element, said supports constraining deflection of said element to positions parallel to an undeflected position.
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Abstract
An electrostatically deflectable plate spatial light modulator with light reflecting plates (106) composed of aluminum alloy and with symmetrically located supporting hinges (108) connecting the plates (106) to support posts (104); this provides a thick stiff plate and a thin compliant hinges with deflection perpendicular to the plane of the plates.
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Citations
6 Claims
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1. A spatial light modulator, comprising:
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(a) a plurality of pixels; (b) each of said pixels including i. an electrostatically deflectable reflecting element over an addressing electrode, and ii. a plurality of supports for said element, said supports constraining deflection of said element to positions parallel to an undeflected position. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification