Capacitive sensor with minimized dielectric drift

• US 4,954,925 A
• Filed: 12/30/1988
• Issued: 09/04/1990
• Est. Priority Date: 12/30/1988
• Status: Expired due to Term

• Current Assignee: VTI Holding Oy
• Original Assignee: United Technologies Corporation (Raytheon Technologies Corporation d/b/a RTX)
• Inventors: Wiegand, Walter J. Jr., Bullis, Robert H., Swindal, James L., Meyer, Harold D., Brahm, Charles B.
• Primary Examiner(s): Griffin, Donald A.
• Application Number:
  US07/292,282
• Time in Patent Office: 613 Days
• Field of Search: 73/718, 73/724, 361/283
• US Class Current: 361/283.1
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm

Abstract

Pressure sensors utilizing capacitance variations to sense pressure variations of the silicon-on-silicon type in which dielectric drift, which occurs in such sensors due to the changing characteristics primarily of the dielectric wall support layer (16) extending up from the silicon substrate (12) between it and the silicon diaphragm (11), is minimized by in turn minimizing the contribution of the dielectric layer to the total capacitance of the sensor (10), reducing the dielectric contribution of the capacitance from, for example, about fifty (50%) percent down to a range of no more than about twenty to twenty-five (20-25%) percent and down typically to sixteen to about ten (16%-10%) percent of the total capacitance or lower. Three exemplary approaches are illustrated, namely, etching the outer edges of the dielectric layer, making the wall(s) it form(s) thinner (FIG. 2); reducing the horizontal thickness of the effective peripheral, lower edge(s) of the silicon diaphragm where it interfaces in contact with the wall(s) formed by the dielectric layer (FIG. 3); and/or reducing the horizontal thickness of the effective peripheral, upper edge(s) of the silicon base or substrate where it interfaces with the wall(s) formed by the dielectric layer (FIUG. 4); and/or a combination of one or more of these approaches or any other approach that minimizes the effective capacitive contribution of the peripheral dielectric layer to the total capacitance of the sensor and hence to long term drift.

Claims

1. A capacitive sensor of the silicon-dielectric-silicon type used to sense physical changes, such as, for example, pressure changes, comprising:

a conductive silicon substrate;

a conductive, elastic, flexible silicon diaphragm having an exterior side, said diaphragm being capable of flexing movement due to physical changes being sensed; and

a non-conductive, dielectric wall spacer layer between said silicon substrate and said silicon diaphragm, said layer providing peripheral wall(s) extending substantially above said silicon substrate and joining said silicon substrate and said silicon diaphragm together;

an evacuated, closed, hermetically sealed chamber being formed between said silicon substrate and said silicon diaphragm and being closed off at the sides above said substrate by said wall(s) formed by said dielectric layer between said silicon substrate and said silicon diaphragm;

the flexing movement of said silicon diaphragm due to the physical changes being sensed causing the capacitance of the sensor to vary;

the capacitance contribution of said dielectric layer to the total capacitance of the sensor being no more than about twenty-to-twenty-five percent of the total capacitance of the sensor.

2. The capacitive sensor of claim 1, wherein the lateral wall thickness of said dielectric layer is substantially less than thirty-six thousandths of an inch.

3. The capacitive sensor of claim 2, wherein said lateral wall thickness is no more than about ten thousandths of an inch.

4. The capacitive sensor of claim 1, wherein there is a radial, interfacing, peripheral contact area between said dielectric layer and said diaphragm, and wherein said radial, interfacing, peripheral contact area between said dielectric layer and said diaphragm is no more than about ten thousandths of an inch, while said diaphragm extends laterally out past said wall a significant amount.

5. The capacitive sensor of claim 1, wherein said silicon diaphragm is no thicker at its peripheral edges in contact with said spacer wall than it is in its center.

6. The capacitive sensor of claim 5, wherein said diaphragm is of uniform thickness across its lateral extent.

7. The capacitive sensor of claim 1, wherein there is included said percentage is no more than about sixteen percent of the total.

8. The capacitive sensor of claim 1, wherein said diaphragm has a peripheral area whose lowermost extent is spaced above said spacer wall.

9. The capacitive sensor of claim 1, wherein said silicon substrate has a peripheral area which is lower than a more inner portion which is under said spacer wall.

10. A method of minimizing the dielectric drift of a capacitive, silicon-dielectric-silicon sensor used to sense physical changes, such as, for example, pressure changes, which sensor includes

a conductive silicon substrate;

a conductive, elastic, flexible, silicon diaphragm having an exterior side, said diaphragm being capable of flexing movement due to he physical changes being sensed; and

a non-conductive, dielectric wall spacer layer between said silicon substrate and said silicon diaphragm, said layer providing peripheral wall(s) extending substantially above said silicon substrate and joining said silicon substrate and said silicon diaphragm together;

an evacuated, closed, hermetically sealed chamber being formed between said silicon substrate and said silicon diaphragm and being closed off at the sides above said substrate by said wall(s) formed by said kielectric layer between said silicon substrate and said silicon diaphragm;

the flexing movement of said silicon diaphragm due to the physical changes being sensed causing the capacitance of the sensor to vary;

comprising the following step(s);

limiting the capacitive contribution of said dielectric wall spacer layer to the total capacitance of the sensor to no more than about twenty to twenty-five percent of the total capacitance of the sensor.

11. The method of claim 10, wherein there is included the following step(s):

limiting the wall thickness of said dielectric support wall layer to substantially less than thirty-six thousandths of an inch.

12. The method of claim 11, wherein in the step of claim 11, there is included the following step(s):

limiting the wall thickness of said dielectric support wall layer to no more than about ten thousandths of an inch.

13. The method of claim 10, wherein there is included the following step(s):

limiting the radial, interfacing, peripheral contact area between said dielectric wall layer and said diaphragm to no more than about ten thousandths of an inch, while said diaphragm extends laterally out past said dielectric wall a significant amount.

14. The method of claim 10, wherein there is further included the following step(s):

in the process of manufacturing said sensor, etching away an exterior, side portion of said dielectric spacer wall, significantly reducing its lateral thickness.

15. The method of claim 10, wherein there is further included the following step(s):

removing a peripheral, edge portion of said diaphragm, reducing the amount of interfacing contact area between the diaphragm and its supporting dielectric wall layer.

16. The method of claim 10, wherein there is further included the following step(s):

removing a peripheral, upper, edge portion of said substrate, increasing the effective separation distance between the peripheral edge portion of said substrate and the diaphragm and producing a area smaller in thickness than a more inner portion of said substrate which is under said spacer wall layer, decreasing the interfacing area between said diaphragm and said substrate which has said dielectric wall layer directly in line between them.