Spatial light modulator
First Claim
Patent Images
1. A spatial light modulator, comprising:
- (a) a plurality of pixels formed in a layered structure;
(b) said layered structure including a substrate, a spacer layer on said substrate, a reflecting layer on said spacer layer, and electrical addressing circuitry;
(c) each of said pixels includingi. an electrostatically deflectable element formed in said reflecting layer andii. a well formed in said spacer and located beneath said deflectable element plus adjacent portions of said reflecting layer, said well characterized by formation by plasma etching of said spacer between said substrate and said reflecting layer with said spacer on said substrate; and
(d) said reflecting layer made of conductive material.
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Abstract
A deflectable beam spatial light modulator formed from a structure of a reflecting layer, typically metal, on a spacer layer, typically photoresist, which in turn is on a substrate containing electronic addressing circuitry is disclosed. Also, the method of fabrication including a plasma etch after dicing of the substrate into chips is disclosed.
744 Citations
30 Claims
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1. A spatial light modulator, comprising:
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(a) a plurality of pixels formed in a layered structure; (b) said layered structure including a substrate, a spacer layer on said substrate, a reflecting layer on said spacer layer, and electrical addressing circuitry; (c) each of said pixels including i. an electrostatically deflectable element formed in said reflecting layer and ii. a well formed in said spacer and located beneath said deflectable element plus adjacent portions of said reflecting layer, said well characterized by formation by plasma etching of said spacer between said substrate and said reflecting layer with said spacer on said substrate; and (d) said reflecting layer made of conductive material. - View Dependent Claims (2, 3, 4)
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5. A spatial light modulator, comprising:
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(a) a plurality of pixels formed in a layered structure; (b) said layered structure including a substrate, a spacer layer on said substrate, a reflecting layer on said spacer layer, and electrical addressing circuitry; (c) each of said pixels including (i) an electrostatically deflectable element formed in said reflecting layer and (ii) a well formed in said spacer layer and located beneath said deflectable element plus adjacent portions of said reflecting layer; and (d) said spacer layer of a planarizing spun-on material.
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6. A spatial light modulator, comprising:
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(a) a plurality of pixels formed in a layered structure; (b) said layered structure including a substrate, a spacer layer on said substrate, a reflecting layer on said spacer layer, and electrical addressing circuitry; (c) each of said pixels including (i) an electrostatically deflectable element formed in said reflecting layer and (ii) a well formed in said spacer layer and located beneath said deflectable element plus adjacent portions of said reflecting layer; and (d) said addressing circuitry including for each of said pixels an electrode on said substrate at the bottom of said well and located away from the portion of said bottom closest to said deflectable element during electrostatic deflection. - View Dependent Claims (11)
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7. A spatial light modulator, comprising:
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(a) a plurality of pixels formed in a layered structure; (b) said layered structure including a substrate, a spacer layer on said substrate, a reflecting layer on said spacer layer, and electrical addressing circuitry; (c) each of said pixels including (i) an electrostatically deflectable element formed in said reflecting layer, said deflectable element of essentially square shape with connections on each of two diagonally opposed corners to the remainder of said reflecting layer, and (ii) a well formed in said spacer layer and located beneath said deflectable element plus adjacent portions of said reflecting layer; and (d) said addressing circuitry including for each of said pixels an electrode on said substrate at the bottom of said well and located under a portion of said deflectable element on one side of the diagonal through said connections. - View Dependent Claims (12)
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8. A spatial light modulator, comprising:
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(a) a plurality of pixels formed in a layered structure; (b) said layered structure including a substrate, a planarizing spacer layer on said substrate, a reflecting layer on said spacer layer, and electrical addressing circuitry; (c) each of said pixels including (i) an electrostatically deflectable element formed in said reflecting layer, and (ii) a well formed in said spacer layer and located beneath said deflectable element plus adjacent portions of said reflecting layer; and (d) the bottom of said reflecting layer and the bottom of said well both electrical conductors. - View Dependent Claims (13)
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9. A spatial light modulator, comprising:
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(a) a plurality of pixels formed in a layered structure; (b) said layered structure including a substrate, a spacer layer on said substrate, a reflecting layer on said spacer layer, and electrical addressing circuitry; (c) each of said pixels including (i) an electrostatically deflectable element formed in said reflecting layer, and (ii) a well formed in said spacer layer and located beneath said deflectable element plus adjacent portions of said reflecting layer; (d) said reflecting layer including at least a first sublayer of a first material on a second sublayer;
said(e) said well including deposits of said first material characteristic of essentially uniform deposition of said first material on said second layer subsequent to the formation of said wells. - View Dependent Claims (14)
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10. A spatial light-modulator, comprising:
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(a) a plurality of pixels formed in a layered structure; (b) said layered structure including a substrate, a planarizing spacer layer on said substrate, a reflecting layer on said spacer layer, and electrical addressing circuitry; (c) each of said pixels including (i) an electrostatically deflectable element formed in said reflecting layer, and (ii) a well formed in said spacer layer and located beneath said deflectable element plus adjacent portions of said reflecting layer; (d) said deflectable element characterized by an essentially square portion connected by a hinge portion to the remainder of said reflecting layer, said hinge portion of length measured from said square portion to said remainder greater than the width of said hinge portion. - View Dependent Claims (15)
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16. A spatial light modulator, comprising:
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(a) a plurality of pixels formed in a layered structure; (b) said layered structure including a bottom layer, a planarizing middle layer on said bottom layer, and a conductive reflecting layer on said middle layer; (c) each of said pixels including; i. a deflectable element formed in said reflecting layer; ii. an addressing electrode between said middle layer and said bottom layer and extending beneath said deflectable element; and iii. a well formed in said middle layer, said well extending from said deflectable element to said electrode. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24)
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25. A spatial light modulator, comprising:
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(a) a plurality of pixels formed in a layered structure; (b) said layered structure including a bottom layer, a plurality of addressing electrodes on said bottom layer, a planarizing spacer layer on said electrodes and said bottom layer, and a conductive reflecting layer on said spacer layer; (c) each of said pixels including; i. a deflectable element formed in said reflecting layer; ii. one of said addressing electrodes and extending beneath said deflectable element; and iii. a well formed in said spacer layer, said well extending from said deflectable element to said one addressing electrode and of width greater than the width of said deflectable element. - View Dependent Claims (26, 27, 28, 29, 30)
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Specification