Stacked wafer electronic package
First Claim
Patent Images
1. An electronic package comprising:
- at least first and second support plates and a bottom support plate, each of said support plates having a support surface thereon, a semiconductor wafer directly supported on said support surface of each of said support plates, each of said support plates having a plenum formed therein, said first and second support plates and said bottom support plate being stacked so that said first support plate is on tope of said second support plate so that said plenum of said first support plate directly faces said support surface of said second support plate;
a top plate engaging on and covering said first support plate and a bottom plate beneath and covering the bottom of said bottom support plate, said top plate, said support plates and said bottom plate being stacked;
a plurality of webs formed in each of said plenums so that aid webs extend toward the support surface of the facing support plate to lie closely adjacent said semiconductor wafer supported on said facing support surface, a resilient adhesive between said webs and said semiconductor wafer so that said semiconductor wafer is supported by said webs on the side of said semiconductor wafer away from said support surface and said webs and said adhesive enclose channels through each plenum over said semiconductor wafers;
a fluid opening in said bottom plate, a fluid opening in said top plate, said plenums being arranged so that fluid entering one of said openings passes through said plenums to the other of said openings so that said wafers on said support surfaces are directly in contact with fluid and are cooled by fluid passing through said plenums.
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Accused Products
Abstract
The electronic package (10) is comprised of a plurality of support plates (12-24), each of which has a plenum therein and preferably webs extending into the plenum for fluid flow control and heat transfer. A wafer (104) is mounted in a recess (100) in the support plate (12) so that fluid in the plenum (52) directly cools the wafer. Electrical connection is by flexible cable (108) to an exterior printed wiring board (40). The package may have any selected number of support plates, and each support plate may carry one full-sized wafer for compact packaging.
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Citations
21 Claims
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1. An electronic package comprising:
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at least first and second support plates and a bottom support plate, each of said support plates having a support surface thereon, a semiconductor wafer directly supported on said support surface of each of said support plates, each of said support plates having a plenum formed therein, said first and second support plates and said bottom support plate being stacked so that said first support plate is on tope of said second support plate so that said plenum of said first support plate directly faces said support surface of said second support plate; a top plate engaging on and covering said first support plate and a bottom plate beneath and covering the bottom of said bottom support plate, said top plate, said support plates and said bottom plate being stacked; a plurality of webs formed in each of said plenums so that aid webs extend toward the support surface of the facing support plate to lie closely adjacent said semiconductor wafer supported on said facing support surface, a resilient adhesive between said webs and said semiconductor wafer so that said semiconductor wafer is supported by said webs on the side of said semiconductor wafer away from said support surface and said webs and said adhesive enclose channels through each plenum over said semiconductor wafers; a fluid opening in said bottom plate, a fluid opening in said top plate, said plenums being arranged so that fluid entering one of said openings passes through said plenums to the other of said openings so that said wafers on said support surfaces are directly in contact with fluid and are cooled by fluid passing through said plenums. - View Dependent Claims (2, 3, 4, 5)
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6. An electronic package comprising:
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a top plate and a bottom plate, said top and bottom plates having an inlet opening and an outlet opening; a plurality of support plates each having a first side and a second side, said support plates being positioned between said top and bottom plates to form a stack of support plates, said top and bottom plates and said support plates being secured together to form a separable unitary structure; each of said support plates having a wafer support surface on the first side thereof, a wafer mounted on each said support surface, each of said support plates having a recess in the second side thereof forming a plenum, a plurality of webs formed in each said plenum, said support plates being stacked so that said plenum, said support plates being stacked so that said plenum in one said support plate faces said support surface of and adjacent said support plate, said webs being sufficiently long so that they substantially engage said wafers to substantially enclose channels through each plenum between said webs, said support plates each having at least one opening therethrough so that fluid entering said inlet and passing out of said outlet passes through said plenums for cooling wafers supported on said support surfaces and facing said plenums. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. An electronic package comprising:
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a top plate and a bottom plate, said top and bottom plates having an inlet opening and an outlet opening; a plurality of support plates, each said support plate having a first side and a second side, said support plates being positioned between said top and bottom plates to form a stack of support plates, said top and bottom plates and said support plates being secured together to form a separable unitary structure; each of said support plates having a wafer support surface on the first side thereof and an integrated surface wafer directly mounted on each said wafer support surface, each of said support plates having a recess in the second side thereof forming a plenum so that said plenum on one said support plate faces said semiconductor wafer on said support surface on an adjacent said support plate, said support plates each having at least one opening therethrough so that fluid entering said inlet and passing out of said outlet passes through said plenums for cooling said semiconductor wafers supported on said support surfaces and facing said plenum; an interconnection board mounted on said package, a plurality of flexible cables each having a board end and a wafer end, each of said flexible cables having a plurality of conductors therein with said conductors at said board end of said cables being connected to said interconnection board and said conductors on said wafer end being connected to said semiconductor wafers, said flexible cables extending between said support plates with their conductors extending into said plenums, said flexible cables being sealed with respect to said support plates so that said plenums are enclosed.
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Specification