Laser beam scanner and its fabricating method

• US 4,957,336 A
• Filed: 11/10/1988
• Issued: 09/18/1990
• Est. Priority Date: 07/31/1985
• Status: Expired due to Term

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Hasegawa, Shin-ya, Ikeda, Hiroyuki, Kato, Masayuki, Yamagishi, Fumio, Inagaki, Takefumi
• Primary Examiner(s): Arnold, Bruce Y.
• Assistant Examiner(s): Lerner, Martin
• Application Number:
  US07/269,412
• Time in Patent Office: 677 Days
• Field of Search: 350/3.71, 350/3.72, 350/3.70, 350/3.76, 350/3.83
• US Class Current: 359/17
• CPC Class Codes: G02B 26/106 having diffraction gratings as scanning elements, e.g. holographic scanners holographic optical elements G02B5/32, holography G03H
• CPC Class Codes: Y10S 359/90 Methods

Abstract

A high precision laser beam scanner is provided which is able to shape a beam generated by a laser, suppress the influence of jitter of a scanning beam due to mode hopping of a semiconductor laser, and reduce aberration of the scanning beam. A beam source generates a semiconductor laser beam, which is diffracted by a rotary hologram, forming a scanning beam on a surface to be scanned. An aberration correcting stationary hologram is disposed between the beam source and the rotary hologram. The stationary hologram is constructed with an object wave and a reference wave, which interfere on a stationary hologram substrate subject so that an aberration of the scanning beam on the surface to be scanned shall be corrected. The object wave is a spherical wave which has an aberration, a wave length shorter than that of the semiconductor laser beam, and an incident angle which is not vertical but is inclined with respect to the stationary hologram substrate. A method for fabricating the laser beam scanner is also provided.

Claims

1. A laser beam scanner apparatus comprising:

a beam source for generating a semiconductor laser beam having a first wavelength;

a rotary hologram with variable spatial frequency for diffracting said semiconductor laser beam to form a scanning beam on a surface to be scanned;

a light source and lens for generating a spherical object wave having an aberration and a second wavelength shorter than said first wavelength; and

an aberration correcting stationary hologram formed on a stationary hologram substrate by construction beams having a wavelength shorter than a reconstruction beam, said aberration correcting stationary hologram being disposed between said beam source and said rotary hologram and said construction beam including the object wave, which is inclined at a non-vertical angle with respect to the stationary hologram substrate, and a reference wave which interfere on the stationary hologram substrate, so that the laser beam diffracted through said aberration correcting stationary hologram, in which a wave having a predetermined aberration is recorded, has a predetermined aberration by which an aberration of said scanning beam on the surface to be scanned shall be corrected, wherein said semiconductor laser beam diverged from said beam source irradiates said stationary hologram directly, and

wherein said reference wave is a spherical wave having a required aberration.

2. An apparatus as claimed in claim 1, wherein said required aberration is formed by a convex lens disposed in an optical path of said spherical wave.

3. An apparatus as claimed in claim 1, wherein said semiconductor laser beam diverging from said beam source irradiates said stationary hologram through an optical lens which converts said semiconductor laser beam into a plane wave.

4. An apparatus as claimed in claim 3, wherein said reference wave for constructing the halogram is a plane wave.

5. An apparatus as claimed in claim 3 or 4, wherein said object wave for forming the hologram is a divergent spherical wave having an aberration.

6. An apparatus as claimed in claim 1, wherein said stationary hologram is inclined with respect to said rotary hologram for scanning.

7. An apparatus as claimed in any one of claims 1 and 2 to 6, wherein said object wave for constituting the hologram is a convergent spherical wave having a predetermined aberration which is made incident to the hologram substrate through a concave lens.

8. An apparatus as claimed in claim 1, wherein said aberration for the entire scanning region of said scanning beam is uniformly corrected.

9. An apparatus as claimed in claim 1, wherein said object wave for forming the hologram is a divergent spherical wave having an aberration.

10. An apparatus as claimed in claim 13, wherein said object wave is a divergent spherical wave having a predetermined aberration which is passed through a convex lens.

11. An apparatus as claimed in claim 1, wherein said reference wave for constructing the hologram is a convergent spherical wave having an aberration.

12. An apparatus as claimed in claim 11 wherein said reference wave is a convergent spherical wave having a predetermined aberration which is made incident to the hologram substrate through a concave lens.

13. An apparatus as claimed in claim 1, wherein a position of said beam source of the semiconductor laser beam is adjustable with respect to said stationary hologram in an optical axis direction.

14. An apparatus as claimed in claim 1, wherein said stationary hologram is fabricated such that a shift of an incident position of the diffracted beam to said rotary hologram is brought within a predetermined extent with respect to a specified variation of wavelength of said semiconductor laser beam.

19. An apparatus as claimed in any one of claims 1, 9, and 10 and 18, wherein said reference wave for fabricating the hologram is a divergent spherical wave which is passed through an aberration correcting lens to have a required aberration, said wave with the aberration being changed to a conjugate wave through a telescopic optical system, and said conjugate wave being made incident to the hologram substrate.

15. A laser beam scanner apparatus comprising:

a beam source for generating a semiconductor laser beam;

a rotary hologram with variable spatial frequency for diffracting said semiconductor laser beam to form a scanning beam on a surface to be scanned; and

an aberration correcting stationary hologram disposed between said beam source and said rotary hologram, wherein said stationary hologram is constructed with an object wave and a reference wave which interfere with each other on a stationary hologram substrate, so that the laser beam diffracted through said aberration correcting stationary hologram, in which a wave having a predetermined aberration is recorded, has a predetermined aberration which corrects an aberration of said scanning beam on the surface to be scanned, said object wave being a spherical wave having an aberration, a wave length shorter than that of said semiconductor laser beam, and an incident angle which is inclined with respect to said stationary hologram substrate,

wherein said stationary hologram is inclined with respect to said rotary hologram for scanning, and

said stationary hologram is inclined with respect to said rotary hologram by an angle with which a positional shift of said scanning beam due to the variation of wavelength is prevented.

16. A laser beam scanner apparatus comprising:

a beam source for generating a semiconductor laser beam;

a rotary hologram with variable spatial frequency for diffracting said semiconductor laser beam to form a scanning beam on a surface to be scanned; and

an aberration correcting stationary hologram disposed between said beam source and said rotary hologram, wherein said stationary hologram is constructed with an object wave and a reference wave which interfere with each other on a stationary hologram substrate, so that the laser beam diffracted through said aberration correcting stationary hologram, in which a wave having a predetermined aberration is recorded, has a predetermined aberration which corrects an aberration of said scanning beam on the surface to be scanned, said object wave being a spherical wave having an aberration, a wave length shorter than that of said semiconductor laser beam, and an incident angle which is inclined with respect to said stationary hologram substrate,

wherein said semiconductor laser beam diverged from said beam source irradiates said stationary hologram directly,

said reference wave is a spherical wave having a required aberration, and

said reference wave for fabricating the hologram has an astigmatism and a predetermined aberration.

17. An apparatus as claimed in claim 16, wherein said astigmatism of the reference wave is formed by using a cylindrical lens.

18. A laser beam scanner apparatus comprising:

a beam source for generating a semiconductor laser beam;

a rotary hologram with variable spatial frequency for diffracting said semiconductor laser beam to form a scanning beam on a surface to be scanned; and

an aberration correcting stationary hologram disposed between said beam source and said rotary hologram, wherein said stationary hologram is constructed with an object wave and a reference wave which interfere with each other on a stationary hologram substrate, so that the laser beam diffracted through said aberration correcting stationary hologram, in which a wave having a predetermined aberration is recorded, has a predetermined aberration which corrects an aberration of said scanning beam on the surface to be scanned, said object wave being a spherical wave having an aberration, a wave length shorter than that of said semiconductor laser beam, and an incident angle which is inclined with respect to said stationary hologram substrate,

wherein said stationary hologram is inclined with respect to said rotary hologram for scanning, and

said stationary hologram is fabricated on a plane side of a plane-convex lens.

20. A laser beam scanner apparatus comprising:

a beam source for generating a semiconductor laser beam;

a rotary hologram with variable spatial frequency for diffracting said semiconductor laser beam to form a scanning beam on a surface to be scanned; and

an aberration correcting stationary hologram disposed between said beam source and said rotary hologram, wherein said stationary hologram is constructed with an object wave and a reference wave which interfere with each other on a stationary hologram substrate, so that the laser beam diffracted through said aberration correcting stationary hologram, in which a wave having a predetermined aberration is recorded, has a predetermined aberration which corrects an aberration of said scanning beam on the surface to be scanned, said object wave being a spherical wave having an aberration, a wave length shorter than that of said semiconductor laser beam, and an incident angle which is inclined with respect to said stationary hologram substrate,

wherein said stationary hologram is fabricated such that a shift of an incident position of the diffracted beam to said rotary hologray is brought within a predetermined extent with respect to a specified variation of wavelength of said semiconductor laser beam

wherein said semiconductor laser beam diverging from said beam source irradiates said stationary hologram through an optical lens which converts said semiconductor laser beam into a plane wave.

21. A method for forming a laser beam scanner which comprises a beam source for generating a semiconductor laser beam, a rotary hologram for diffracting said semiconductor laser beam to form a scanning beam on a surface to be scanned, and an aberration correcting stationary hologram disposed between said beam source and said rotary hologram, wherein said stationary hologram is constructed with an object wave and a reference wave being interfered on a stationary hologram substrate subject that an aberration of said scanning beam on said surface to be scanned shall be corrected, said object wave being a spherical wave having an aberration, a wavelength shorter than that of said semiconductor laser beam, and an incident angle which is not vertical but inclined with respect to said stationary hologram substrate.

22. A laser beam scanner apparatus comprising:

a beam source for generating a semiconductor laser beam having a first wave length;

a rotary hologram with variable spatial frequency for diffracting said semiconductor laser beam to form a scanning beam on a surface to be scanned;

a light source and lens for generating a spherical object wave having an aberration and a second wavelength shorter then said first wavelength; and

an aberration correcting stationary hologram formed on an stationary hologram substrate, said aberration correcting stationary hologram being disposed between said beam source and said rotary hologram and being constructed with the object wave, which is inclined at a non-vertical angle with respect to the stationary hologram substrate, and a reference wave which interfere on the stationary hologram substrate, so that the laser beam diffracted through said aberration correcting stationary hologram, in which a wave having a predetermined aberration is recorded, has a predetermined aberration by which an aberration of said scanning beam on the surface to be scanned shall be corrected, wherein said semiconductor laser beam diverging from said beam source irradiates said stationary hologram through an optical lens which converts said semiconductor laser beam into a plane wave.

23. An apparatus as claimed in claim 22, wherein said stationary hologram is inclined with respect to said rotary hologram for scanning.

24. An apparatus as claimed in claim 23, wherein said stationary hologram is inclined with respect to said rotary hologram by an angle with which a positional shift of said scanning beam due to the variation of wavelength is prevented.

25. An apparatus as claimed in claim 22, wherein said stationary hologram is fabricated such that a shift of an incident position of the diffracted beam to said rotary hologram is brought within a predetermined extent with respect to a specified variation of wavelength of said semiconductor laser beam.

26. A laser beam scanner apparatus comprising:

a beam source for generating a semiconductor laser beam having a first wave length;

a rotary hologram with variable spatial frequency for diffracting said semiconductor laser beam to form a scanning beam on a surface to be scanned;

a light source and lens for generating a spherical object wave having an aberration and a second wavelength shorter then said first wavelength; and

an aberration correcting stationary hologram formed on an stationary hologram substrate, said aberration correcting stationary hologram being disposed between said beam source and said rotary hologram and being constructed with the object wave, which is inclined at a non-vertical angle with respect to the stationary hologram substrate, and a reference wave which interfere on the stationary hologram substrate, so that the laser beam diffracted through said aberration correcting stationary hologram, in which a wave having a predetermined aberration is recorded, has a predetermined aberration by which an aberration of said scanning beam on the surface to be scanned shall be corrected, wherein said object wave for constructing the hologram is a convergent spherical wave having a predetermined aberration which is made incident to the hologram substrate through a concave lens.

27. A laser beam scanner apparatus comprising:

a beam source for generating a semiconductor laser beam having a first wave length;

a rotary hologram with variable spatial frequency for diffracting said semiconductor laser beam to form a scanning beam on a surface to be scanned;

a light source and lens for generating a spherical object wave having an aberration and a second wavelength shorter then said first wavelength; and

an aberration correcting stationary hologram formed on an stationary hologram substrate, said aberration correcting stationary hologram being disposed between said beam source and said rotary hologram and being constructed with the object wave, which is inclined at a non-vertical angle with respect to the stationary hologram substrate, and a reference wave which interfere on the stationary hologram substrate, so that the laser beam diffracted through said aberration correcting stationary hologram, in which a wave having a predetermined aberration is recorded, has a predetermined aberration by which an aberration of said scanning beam on the surface to be scanned shall be corrected, wherein said reference wave for fabricating the hologram is a divergent spherical wave which is passed through an aberration correcting lens to have a required aberration, said wave with the aberration being changed to a conjugate wave through a telescopic optical system, and said conjugate wave being made incident to the hologram substrate.

28. A laser beam scanner apparatus comprising:

a beam source for generating a semiconductor laser beam having a first wave length;

a rotary hologram with variable spatial frequency for diffracting said semiconductor laser beam to form a scanning beam on a surface to be scanned;

a light source and lens for generating a spherical object wave having an aberration and a second wavelength shorter then said first wavelength; and

an aberration correcting stationary hologram formed on an stationary hologram substrate, said aberration correcting stationary hologram being disposed between said beam source and said rotary hologram and being constructed with the object wave, which is inclined at a non-vertical angle with respect to the stationary hologram substrate, and a reference wave which interfere on the stationary hologram substrate, so that the laser beam diffracted through said aberration correcting stationary hologram, in which a wave having a predetermined aberration is recorded, has a predetermined aberration by which an aberration of said scanning beam on the surface to be scanned shall be corrected, wherein a position of said beam source of the semiconductor laser beam is adjustable with respect to said stationary hologram in an optical axis direction.

29. A laser beam scanner apparatus comprising:

a beam source for generating a semiconductor laser beam having a first wave length;

a rotary hologram with variable spatial frequency for diffracting said semiconductor laser beam to form a scanning beam on a surface to be scanned;

a light source and lens for generating a spherical object wave having an aberration and a second wavelength shorter then said first wavelength; and

an aberration correcting stationary hologram formed on an stationary hologram substrate, said aberration correcting stationary hologram being disposed between said beam source and said rotary hologram and being constructed with the object wave, which is inclined at a non-vertical angle with respect to the stationary hologram substrate, and a reference wave which interfere on the stationary hologram substrate, so that the laser beam diffracted through said aberration correcting stationary hologram, in which a wave having a predetermined aberration is recorded, has a predetermined aberration by which an aberration of said scanning beam on the surface to be scanned shall be corrected, wherein said reference wave for constructing the hologram is a convergent spherical wave having an aberration, and

wherein said reference wave is a convergent spherical wave having a predetermined aberration which is made incident to the hologram substrate through a concave lens.