Prealigner probe

• US 4,958,129 A
• Filed: 03/07/1989
• Issued: 09/18/1990
• Est. Priority Date: 03/07/1989
• Status: Expired due to Term

• Current Assignee: ADE Corporation (KLA Corporation)
• Original Assignee: ADE Corporation (KLA Corporation)
• Inventors: Poduje, Noel S., Mallory, Roy E.
• Primary Examiner(s): Eisenzopf, Reinhard J.
• Assistant Examiner(s): Regan, Maura K.
• Application Number:
  US07/320,237
• Time in Patent Office: 560 Days
• Field of Search: 324/61 R, 324/61 P, 324/158 F, 324/158 P, 324/662, 324/661, 324/690
• US Class Current: 324/661
• CPC Class Codes: G01B 7/023 for measuring distance between sensor and object G01B7/082 and G01B7/102 take precedence

Abstract

An edge detection system for measuring lateral position in the presence of height variations such as found in gauging the edge position of a wafer uses first and second capacitive probes formed of passive elements with the active components kept outside the probe and at a distance that permits a smaller, stabler and more economical probe to be located at the location of the wafer. The probes are instrumented in an electronic circuit having plural operational amplifiers that drive the probes to compensate the edge detection for wafer height effects.

Claims

1. A system for capacitive edge detection of a supported member comprising:

a member where the position of an edge of said member is to be detected;

a first probe positioned proximate to said member near the edge thereof and having a parameter varying as a function both of a distance from said probe to said member and displacement of a portion of said probe beyond the edge of said member;

a second probe positioned near said first probe and closer to an interior location of said member than said first probe, said second probe having a parameter varying with distance of said second probe from said member;

a first operational amplifier having the capacitance sensed by the electrode of the first probe in a feedback loop thereof;

a second operational amplifier having the capacitance sensed by the electrode of the second probe in an input circuit thereof and;

a source of A.C. excitation driving said first operational amplifier.

2. The system of claim 1 including means for supporting said member at the center thereof.

3. The system of claim 2 including means for rotating said member about its center.

4. The system of claim 3 further including means for repositioning said supported member on said support means in response to said indication of edge position to be more centered on said support means.

5. The system of claim 2 wherein said support means includes a vacuum chuck.

6. The system of claim 1 wherein said member is a semiconductor wafer.

7. The system of claim 1 wherein said first probe includes a capacitance sensing electrode.

8. The system of claim 7 wherein said second probe includes a capacitance sensing electrode.

9. The system of claim 8 wherein said first and second probe electrodes have a surface area facing said member of approximately the same effective area.

10. The system of claim 8 further including a guard around each said capacitance sensing electrode.

11. The system of claim 10 further including means for maintaining a virtually identical potential on each said guard and associated electrode.

12. The system of claim 1 further including a third operational amplifier connected to receive an output of said second operational amplifier.

13. The system of claim 12 further including a coupling between said second and third amplifiers compensating for errors sensed by said second probe.

14. The system of claim 1 further including means for compensating an output of said second operational amplifier for differences in distances between said member and said first and second probes respectively.

15. A system for capacitively gauging distance comprising:

a first capacitance sensing electrode spaced a distance from a member at a location adjacent to an edge thereof;

a second capacitance sensing electrode spaced a distance from the member at location interior to the edge thereof;

an operational amplifier connected to said first electrode;

a source of A.C. excitation connected to said second electrode, said second electrode providing an output representative of distance from said second electrode to the member for input to a non-inverting input of said operational amplifier;

said operational amplifier providing an output signal varying directly with the displacement of said first electrode from an edge of the member.

16. The system of claim 15 wherein said first electrode includes a guard and means for driving said guard at the virtual potential of said first electrode.

17. The system of claim 15 further including circuit means for compensating said output for effects attributable to stray capacitance.

18. The system of claim 15 further including circuit means for compensating said output for effects attributable to less than infinite gain of said operational amplifier.

19. An edge detection system comprising:

first probe means at a first location for providing a first output representation of its distance from a member;

second probe means at a second location for providing a second output representation of its distance from said member in combination with its displacement from an edge of said member;

means for compensating said second output with an estimate of what said first output would be if said first output were provided at the second location of said second probe means.