Prealigner probe
First Claim
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1. A system for capacitive edge detection of a supported member comprising:
- a member where the position of an edge of said member is to be detected;
a first probe positioned proximate to said member near the edge thereof and having a parameter varying as a function both of a distance from said probe to said member and displacement of a portion of said probe beyond the edge of said member;
a second probe positioned near said first probe and closer to an interior location of said member than said first probe, said second probe having a parameter varying with distance of said second probe from said member;
a first operational amplifier having the capacitance sensed by the electrode of the first probe in a feedback loop thereof;
a second operational amplifier having the capacitance sensed by the electrode of the second probe in an input circuit thereof and;
a source of A.C. excitation driving said first operational amplifier.
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Abstract
An edge detection system for measuring lateral position in the presence of height variations such as found in gauging the edge position of a wafer uses first and second capacitive probes formed of passive elements with the active components kept outside the probe and at a distance that permits a smaller, stabler and more economical probe to be located at the location of the wafer. The probes are instrumented in an electronic circuit having plural operational amplifiers that drive the probes to compensate the edge detection for wafer height effects.
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Citations
19 Claims
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1. A system for capacitive edge detection of a supported member comprising:
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a member where the position of an edge of said member is to be detected; a first probe positioned proximate to said member near the edge thereof and having a parameter varying as a function both of a distance from said probe to said member and displacement of a portion of said probe beyond the edge of said member; a second probe positioned near said first probe and closer to an interior location of said member than said first probe, said second probe having a parameter varying with distance of said second probe from said member; a first operational amplifier having the capacitance sensed by the electrode of the first probe in a feedback loop thereof; a second operational amplifier having the capacitance sensed by the electrode of the second probe in an input circuit thereof and; a source of A.C. excitation driving said first operational amplifier. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A system for capacitively gauging distance comprising:
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a first capacitance sensing electrode spaced a distance from a member at a location adjacent to an edge thereof; a second capacitance sensing electrode spaced a distance from the member at location interior to the edge thereof; an operational amplifier connected to said first electrode; a source of A.C. excitation connected to said second electrode, said second electrode providing an output representative of distance from said second electrode to the member for input to a non-inverting input of said operational amplifier; said operational amplifier providing an output signal varying directly with the displacement of said first electrode from an edge of the member. - View Dependent Claims (16, 17, 18)
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19. An edge detection system comprising:
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first probe means at a first location for providing a first output representation of its distance from a member; second probe means at a second location for providing a second output representation of its distance from said member in combination with its displacement from an edge of said member; means for compensating said second output with an estimate of what said first output would be if said first output were provided at the second location of said second probe means.
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Specification