Process for formation of metal oxide film

• US 4,960,618 A
• Filed: 01/08/1990
• Issued: 10/02/1990
• Est. Priority Date: 01/07/1987
• Status: Expired due to Term

• Current Assignee: Tokyo OHKA Kogyo Company Limited
• Original Assignee: Tokyo OHKA Kogyo Company Limited
• Inventors: Sato, Yoshimi, Tanitsu, Katsuya, Nakayama, Muneo
• Primary Examiner(s): Lawrence, Evan
• Application Number:
  US07/461,873
• Time in Patent Office: 267 Days
• Field of Search: 106/287.18, 106/287.19, 106/287.2, 106/287.23, 106/287.24, 427/126.3, 427/126.4, 427/126.5, 427/126.6, 427/245, 427/287, 427/384, 427/226
• US Class Current: 427/226
• CPC Class Codes: C23C 18/1216 Metal oxides C23C18/1212 takes precedence
• CPC Class Codes: G02F 1/133345 Insulating layers G02F1/1335, G02F1/1337, G02F1/135, G02F1/136 take precedence
• CPC Class Codes: H01L 21/02164 the material being a silicon oxide, e.g. SiO2
• CPC Class Codes: H01L 21/02178 the material containing aluminium, e.g. Al2O3
• CPC Class Codes: H01L 21/02183 the material containing tantalum, e.g. Ta2O5
• CPC Class Codes: H01L 21/02288 printing, e.g. ink-jet printing per se B41J
• CPC Class Codes: H01L 21/316 composed of oxides or glassy oxides or oxide based glass

Abstract

A process for the formation of a metal oxide film on a substrate by coating the substrate with a coating solution and heating the substrate to a temperature of at least 100° C. The coating solution is composed of (a) a β-diketone, (b) at least one element or compound selected from the group consisting of elements capable of forming complexes with said β-diketone, salts of the elements and hydrolysates of alkoxides of the elements, and (c) an aprotic polar solvent. As an alternative, it is composed of a metal complex of a β-diketone and an aprotic polar solvent.

Claims

1. A process for the formation of a metal oxide film, which comprises the following consecutive steps:

(i) coating a substrate with a coating solution for use in the formation of the metal oxide film, said solution comprising;

(a) a β

-diketone;

(b) at least one element or compound selected from the group consisting of elements capable of forming complexes with said β

-diketone, salts of the elements and hydrolysates of alkoxides of the elements; and

(c) an aprotic polar solvent; and

(ii) subjecting the thus-coated substrate to a heat treatment at a temperature of at least 100°

C.

2. The process as claimed in claim 1, wherein the coating is effected by printing.