Process for formation of metal oxide film
First Claim
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1. A process for the formation of a metal oxide film, which comprises the following consecutive steps:
- (i) coating a substrate with a coating solution for use in the formation of the metal oxide film, said solution comprising;
(a) a β
-diketone;
(b) at least one element or compound selected from the group consisting of elements capable of forming complexes with said β
-diketone, salts of the elements and hydrolysates of alkoxides of the elements; and
(c) an aprotic polar solvent; and
(ii) subjecting the thus-coated substrate to a heat treatment at a temperature of at least 100°
C.
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Abstract
A process for the formation of a metal oxide film on a substrate by coating the substrate with a coating solution and heating the substrate to a temperature of at least 100° C. The coating solution is composed of (a) a β-diketone, (b) at least one element or compound selected from the group consisting of elements capable of forming complexes with said β-diketone, salts of the elements and hydrolysates of alkoxides of the elements, and (c) an aprotic polar solvent. As an alternative, it is composed of a metal complex of a β-diketone and an aprotic polar solvent.
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Citations
2 Claims
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1. A process for the formation of a metal oxide film, which comprises the following consecutive steps:
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(i) coating a substrate with a coating solution for use in the formation of the metal oxide film, said solution comprising; (a) a β
-diketone;(b) at least one element or compound selected from the group consisting of elements capable of forming complexes with said β
-diketone, salts of the elements and hydrolysates of alkoxides of the elements; and(c) an aprotic polar solvent; and (ii) subjecting the thus-coated substrate to a heat treatment at a temperature of at least 100°
C. - View Dependent Claims (2)
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Specification