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Magnetically filtered low loss scanning electron microscopy

  • US 4,962,306 A
  • Filed: 12/04/1989
  • Issued: 10/09/1990
  • Est. Priority Date: 12/04/1989
  • Status: Expired due to Fees
First Claim
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1. An electron apparatus including, in combination:

  • means for producing an electron beam,means for directing said beam to a sample to be examined,means for producing a magnetic field in which said sample is immersed, anda detector for detecting electrons scattered from said sample, said detector being located in said magnetic field at a location such that only low-loss electrons scattered from said sample reach said detector.

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