3D imaging of a substrate using perpendicular scanning directions

• US 4,965,665 A
• Filed: 10/25/1989
• Issued: 10/23/1990
• Est. Priority Date: 10/25/1989
• Status: Expired due to Term

• Current Assignee: American Telephone & Telegraph Company (AT&T, Inc.), Bell Telephone Laboratories, Inc. (Nokia Corporation)
• Original Assignee: AT&T, Inc.
• Inventors: Amir, Israel
• Primary Examiner(s): Kostak, Victor R.
• Application Number:
  US07/426,366
• Time in Patent Office: 363 Days
• Field of Search: 358/101, 358/106, 358/107, 358/89, 358/88, 250/563, 356/373, 356/375, 356/376, 356/378, 356/379, 356/380, 356/381, 382/8
• US Class Current: 382/154
• CPC Class Codes: G01B 11/2518 Projection by scanning of the object
• CPC Class Codes: G06T 7/521 from laser ranging, e.g. using interferometry; from the projection of structured light
• CPC Class Codes: H05K 3/0082 characterised by the exposure method of radiation-sensitive masks

Abstract

A system (10) for obtaining a three-dimensional image of a substrate (12) comprises a linescan camera (20) trained on the substrate normal to the plane of its surface to capture the image of a strip of area (S_y) running along a first axis. A reflective member (38), driven by a motor (39), spans a line of light (36) generated by a laser (30) at an angle across the surface of the substrate so each of a plurality of strips of area (S_a,S_b,S_c. . . ), including the strip (S_y) imaged by the camera, is successively illuminated. A processing device (26) is coupled both to the camera (20) and to the motor (39) to synchronize them so that the camera captures the image of the strip within its field of view each time a successive one of the strips (S_a,S_b,S_c. . . S_y) is illuminated. The processing device (26) further serves to process the successively captured images of the strip (S_y) within the field of view of the camera to obtain a three-dimensional image of the strip. A relative motion is imparted between the linescan camera (20) and the substrate (12) by a slide to enable a three-dimensional image of the substrate to be obtained.

Claims

1. A method for obtaining a three-dimensional image of a substrate comprising the steps of:

(a) training a linescan camera onto the surface of a substrate normal to its plane so that a strip of area, running across the surface of the substrate parallel to a first axis, is within the field of view of the camera so the camera may capture the image thereof;

(b) spanning the substrate, along a second axis perpendicular to the first axis, with a line of light parallel to the first axis, the line of light being directed at the surface of the substrate at an angle to successively illuminate each of a plurality of contiguous strips of area, including the strip within the field of view of the linescan camera;

(c) simultaneously capturing the image of the strip within the field of view of the camera each time a successive one of the plurality of strips is illuminated by the line of light;

(d) processing the successive images captured by the linescan camera to establish a three-dimensional image of the strip within its field of view; and

(e) imparting a relative motion between the linescan camera and the substrate along the second axis to obtain a three-dimensional image of the substrate.

2. The method according to claim 1 wherein the spanning step comprises the steps of:

(a) directing a beam of light into a circular focusing means to produce a line of light focused on a reflective member;

(b) positioning the reflective member to direct the line of light onto the surface of the substrate; and

(c) rotating the reflective member with a motor to span the line of light across the surface of the substrate.

3. The method according to claim 2 wherein the motor driving the reflective member is stepped at the same time the linescan camera is rendered operative to capture the image of the strip in its field of view.

4. The method according to claim 1 wherein the step of processing the successive images obtained by the linescan camera comprises the steps of:

(a) establishing the intensity of the light reflected from each of a separate one of a plurality of regions within the strip lying within the field of view of the linescan camera each time the camera successively captures the image of the strip;

(b) storing each of the intensity values, obtained upon initial capture of the image of the strip, in a separate one of a plurality of separate storage locations and according each initial intensity value a predetermined index;

(c) comparing each of the stored intensity values to the next successively established intensity value for the corresponding region in the strip in the field of view of the camera;

(d) replacing each stored intensity value with the next successively established intensity value for the corresponding region in the strip and adjusting the index associated with the stored value in accordance with the identity of the strip being illuminated if the next successively established intensity value is greater;

(e) repeating the steps of (a), (b), (c) and (d) until all of the stored image values are compared; and

(f) computing the height of the attribute appearing in each region in accordance with the index value associated with each stored intensity value.

5. The method according to claim 1 wherein the step of imparting a relative motion between the substrate and the linescan camera comprises the step of displacing the substrate relative to the camera.

6. Apparatus for obtaining a three-dimensional image of a substrate comprising:

a linescan camera trained onto a substrate such that the camera has its optical axes normal to the plane of the substrate surface so that a strip of area running along the substrate surface along a first axis is within the field of view of the camera;

means for spanning the substrate along a second axis, perpendicular with the first axis, with a line of light, parallel to the first axis, to successively illuminate each of a plurality of strips of area on the substrate surface, including the strip within the field of view of the linescan camera;

processing means for synchronizing the linescan camera to the spanning means so that the camera successively captures the image of the strip of area within its field of view each time a successive one of the strips is illuminated by the spanning means, and for processing the successive images captured by the camera to establish a three-dimensional image of each attribute, if any, within the strip imaged by the camera; and

means for imparting a relative motion between the linescan camera and the substrate to establish a three-dimensional image of the substrate.

7. The apparatus according to claim 6 wherein the spanning means comprises:

means for producing a beam of light;

a circular focusing element for focusing the beam of light generated by the beam-producing means into a line of light;

a reflective member for reflecting the line of light onto the substrate at an angle thereto so the line is parallel to the first axis;

a motor for rotating the reflective member to span the line of light across the substrate a predetermined distance along the second axis.

8. The apparatus according to claim 6 wherein the processing means comprises:

a synchronizing generator coupled to the spanning means and the linescan camera for supplying each with a periodic signal which causes the spanning means to span a successive one of the plurality of strips of surface area and which causes the camera to successively capture the image of the strip within its field of view;

a counter coupled to the synchronizing generator for providing a count indicative of the particular one of the strips spanned by the spanning means;

a first storage array for storing information from the linescan camera indicative of the intensity of light reflected from each of a separate one of a plurality of regions within the strip in the field of view of the camera;

a second storage array for storing information from the linescan camera indicative of the intensity of light reflected from each of separate one of a plurality of regions within the strip in the field of view of the camera;

a third storage array for storing the count of the counter; and

an image processor coupled to each of the first, second and third storage arrays for processing the data stored therein to establish the vertical position of an attribute, if any, within the strip imaged by the linescan camera.

9. The apparatus according to claim 6 wherein the means for imparting a relative motion between the substrate and the linescan camera comprises a slide for displacing the substrate along the second axis.