Process control interface system for managing measurement data

• US 4,967,381 A
• Filed: 07/06/1989
• Issued: 10/30/1990
• Est. Priority Date: 04/30/1985
• Status: Expired due to Term

• Current Assignee: Tencor Instruments (KLA Corporation)
• Original Assignee: Prometrix Corp (KLA Corporation)
• Inventors: Kumagi, Shoji, Perloff, David S., Lane, Leslie A., Lybeck, Lynn V.
• Primary Examiner(s): Lall, Parshotam S.
• Assistant Examiner(s): Cosimano, Edward R.
• Application Number:
  US07/375,898
• Time in Patent Office: 481 Days
• Field of Search: 364/200, 364/146, 364/188, 364/192, 364/550, 364/900, 364/551.01, 364/485, 364/486, 364/487
• US Class Current: 702/81
• CPC Class Codes: G05B 15/02 electric
• CPC Class Codes: G05B 2219/31318 Data analysis, using different formats like table, chart
• CPC Class Codes: G05B 2219/36122 Operator menu with submenu for each item

Abstract

A system and method for computer control of machine processes. The system and method provide a set of predefined data management or data analysis tasks which an operator of the system can use when using the system to run a selected process.

Measurement data structures for storing data measured during the running of processes, and related data, for a multiplicity of processes are defined and stored. Data is added to these data structures each time a process is run, and this data is automatically accessed when the operator requests data analysis on the data collected during previous uses of a selected process.

Access to measurement data for detailed data management tasks is provided graphically through the use of trend charts and statistical quality control charts. These charts depict trends in the measurement data for selected processes. By pointing at any data point in the chart, the user can access the corresponding record of data for detailed data analysis or for use in a data management task.

Claims

1. In a method of using a programmed digital computer to control the measurement, storage and analysis of a multiplicity of measurements, said computer having data storage means for storing measurement data, and means for controlling the operation of an apparatus coupled to said computer, said apparatus including means for performing a multiplicity of measurements and communicating the resulting measurement values to said computer, the steps of:

establishing a set of processes which can be run under the control of said computer, each process having a predefined set of process parameters which control the operation of said apparatus;

establishing a multiplicity of process definition data structures, including a measurement definition data structure within each process definition data structure;

establishing a set up program for interactively performing the steps of;

selecting one of said processes;

defining for said selected process, a subset of the measurements which said apparatus can perform, and storing a representation of the selected subset in said measurement definition data structure for said selection process;

wherein said set up program includes means for defining different subsets of measurements for each selected process; and

establishing an operator process control program for enabling interactive computer controlled performance of the steps of;

selecting one of said processes;

running said selected process, and storing the measurement values conveyed by the apparatus to said computer in said data storage means;

wherein said processes each include means for accessing the corresponding measurement definition data structure and for controlling the operation of the apparatus so that only the measurements specified in said measurement definition data structure are performed and so that only the measurement values corresponding to the measurements specified in said measurement definition data structure are stored in said data storage means.

2. The method of claim 1, wherein

said defining step in said set up program includes the steps of:

defining a plurality of trend chart definitions for said selected process, each said trend chart definition including a specification of a quantity to be tracked, wherein said quantity is a predefined function of at least one of said measurements which said apparatus can perform;

and storing in said measurement definition data structure for said selected process a representation of all of the measurements included in said trend chart definitions;

said method further including the step of displaying a trend chart depicting a sequence of data points, each data point representing a predefined function of at least one of said measurements stored in said data storage means in accordance with a specified one of said trend chart definitions;

whereby only the measurements specified in said trend chart definitions for said selected process are performed and only the measurement values corresponding to the measurements specified in said trend chart definitions are stored in said data storage means.

3. The method of claim 1, wherein

said defining step in said set up program includes the steps of:

defining a plurality of analysis tasks for said selected process, including denoting in an analysis definition data structure a predefined analysis task to be performed and a specification of a quantity to be analyzed, wherein said quantity is a predefined function of at least one of said measurements which said apparatus can perform;

and storing a representation in said measurement definition data structure for said selected process a representation of all of the measurements included in said analysis definition structures;

said operator process control program includes means for enabling interactive computer controlled performance of the steps of;

selecting one of said analysis tasks for said selected process, and automatically, in response to said selection, performing the corresponding analysis task as denoted in the corresponding analysis definition data structure.

4. In a method of using a programmed digital computer to control the measurement, storage and analysis of a multiplicity of measurements, said computer having data storage means for storing measurement data, and means for controlling the operation of an apparatus coupled to said computer, said apparatus including means for performing a multiplicity of measurements and communicating the resulting measurement values to said computer, the steps of:

defining a test data structure which denotes a set of measurements that can be performed by said apparatus;

said test data structure denoting a hierarchy of said set of measurements in which said measurements are divided into a multiplicity of groups of said measurements, and a plurality of said groups of measurements include a plurality of subgroups of said measurements;

establishing a multiplicity of measurement definition data structures;

denoting in each said measurement definition data structure a hierarchically arranged mask corresponding to said hierarchy denoted in said test data structure, said mask denoting selected ones of said groups of said measurements denoted in said test data structure, and selected ones of said subgroups of said measurements;

selecting one of said measurement definition data structures;

performing the set of measurements denoted by said selected measurement definition data structure, said performing step including the step of performing only those groups and subgroups of measurements denoted as selected by said selected measurement definition data structure; and

storing measurement values conveyed by said apparatus to said computer in said data storage means;

wherein only measurement values corresponding to the measurements specified in said measurement definition data structure are stored in said data storage means.

5. The method of claim 4, wherein

said denoting step includes the steps of:

defining a plurality of trend chart definitions, each said trend chart definition including a specification of a quantity to be tracked, wherein said quantity is a predefined function of at least one of said measurements denoted in said test data structure;

and storing in said measurement definition data structure a mask denoting only the measurements included in said trend chart definitions;

said method further including the step of displaying a trend chart depicting a sequence of data points, each data point representing a predefined function of at least one of said measurements stored in said data storage means in accordance with a specified one of said trend chart definitions;

whereby only the measurements specified in said trend chart definitions are performed and only the measurement values corresponding to the measurements specified in said trend chart definitions are stored in said data storage means.

6. The method of claim 4, wherein

said denoting step includes the steps of:

defining a plurality of trend chart definitions, each said trend chart definition including a specification of a quantity to be tracked, wherein said quantity is a predefined function of at least one of said measurements denoted in said test data structure;

and storing in said measurement definition data structure a mask denoting the measurements included in said trend chart definitions;

said method further including the step of displaying a trend chart depicting a sequence of data points, each data point representing a predefined function of at least one of said measurements stored in said data storage means in accordance with a specified one of said trend chart definitions;

whereby the measurements specified in said trend chart definitions are performed and the measurement values corresponding to the measurements specified in said trend chart definitions are stored in said data storage means.

7. The method of claim 4, wherein

said denoting step includes the steps of:

defining a plurality of measurement analysis tasks, including denoting in each of a plurality of analysis definition data structures a measurement analysis task to be performed and a specification of a quantity to be analyzed, wherein said quantity is a predefined function of at least one of said measurements denoted in said test data structure;

and storing in said measurement definition data structure a mask denoting the measurements included in said analysis definition data structures;

said method further including the step of enabling interactive computer controlled performance of the steps of;

selecting one of said measurement analysis tasks for a selected one of said measurement definition data structures, and automatically, in response said selection, performing the corresponding measurement analysis task, as denoted in the corresponding analysis definition data structure, on measurements values stored in said data storage means.

8. In a method of using a programmed digital computer to control the measurement, storage and analysis of a multiplicity of measurements, said computer having data storage means for storing measurement data, and means for controlling the operation of an apparatus coupled to said computer, said apparatus including means for performing a multiplicity of measurements and communicating the resulting measurement values to said computer, the steps of:

defining a test data structure which denotes a set of measurements that can be performed by said apparatus;

said test data structure denoting a hierarchy of said set of measurements in which said measurements are divided into a multiplicity of groups of said measurements, and a plurality of said groups of measurements include a plurality of subgroups of said measurements;

establishing a multiplicity of measurement definition data structure;

denoting in each said measurement definition data structure a hierarchically arranged mask corresponding to said hierarchy denoted in said test data structure, said mask denoting selected ones of said groups of said measurements denoted in said test data structure, selected ones of said subgroups of said measurements, and selected ones of said individual measurements;

selecting one of said measurement definition data structures;

performing the set of measurements denoted by said selected measurement definition data structure, said performing step including the step of performing only those groups of measurements denoted as selected by said selected measurement definition data structure, performing only those subgroups of measurements which correspond to selected groups of measurements and which are denoted as selected by said selected measurement definition data structure, and performing only those individual measurements which correspond to selected groups and subgroups of measurements and which are denoted as selected by said selected measurement definition data structure; and

storing measurement values conveyed by said apparatus to said computer in said data storage means;

wherein only measurement values corresponding to the measurements specified in said measurement definition data structure are stored in said data storage means.

9. The method of claim 8, wherein

said denoting step includes the steps of:

defining a plurality of trend chart definitions, each said trend chart definition including a specification of a quantity to be tracked, wherein said quantity is a predefined function of at least one of said measurements denoted in said test data structure;

and storing in said measurement definition data structure a mask denoting only the measurements included in said trend chart definitions;

said method further including the step of displaying a trend chart depicting a sequence of data points, each data point representing a predefined function of at least one of said measurements stored in said data storage means in accordance with a specified one of said trend chart definitions;

whereby only the measurements specified in said trend chart definitions are performed and only the measurement values corresponding to the measurements specified in said trend chart definitions are stored in said data storage means.

10. The method of claim 8, wherein

said denoting step includes the steps of:

defining a plurality of trend chart definitions, each said trend chart definition including a specification of a quantity to be tracked, wherein said quantity is a predefined function of at least one of said measurements denoted in said test data structure;

and storing in said measurement definition data structure a mask denoting the measurements included in said trend chart definitions;

said method further including the step of displaying a trend chart depicting a sequence of data points, each data point representing a predefined function of at least one of said measurements stored in said data storage means in accordance with a specified one of said trend chart definitions;

whereby the measurements specified in said trend chart definitions are performed and the measurement values corresponding to the measurements specified in said trend chart definitions are stored in said data storage means.

11. The method of claim 8, wherein

said denoting step includes the steps of:

defining a plurality of measurement analysis tasks, including denoting in each of a plurality of analysis definition data structures a measurement analysis task to be performed and a specification of a quantity to be analyzed, wherein said quantity is a predefined function of at least one of said measurements denoted in said test data structure;

and storing in said measurement definition data structure a mask denoting the measurements included in said analysis definition data structures;

said method further including the step of enabling interactive computer controlled performance of the steps of;

selecting one of said measurement analysis tasks for a selected one of said measurement definition data structures, and automatically, in response to said selection, performing the corresponding measurement analysis task, as denoted in the corresponding analysis definition data structure, on measurements values stored in said data storage means.

12. In a method of using a programmed digital computer to control the measurement, storage and analysis of a multiplicity of measurements on semiconductor wafers, said computer having data storage means for storing measurement data, and means for controlling the operation of an apparatus coupled to said computer, said apparatus including means for performing a multiplicity of measurements on semiconductor wafers and communicating the resulting measurement values to said computer, the steps of:

defining a test data structure which denotes a set of measurements that can be performed by said apparatus on a semiconductor wafer;

said test data structure denoting a hierarchy of said set of measurements in which said measurements are divided into a plurality of chips, each said chip including a plurality of modules, each said module including a plurality of said measurements;

establishing a multiplicity of measurement definition data structure;

denoting in each said measurement definition data structure a hierarchically arranged mask corresponding to said hierarchy denoted in said test data structure, said mask denoting selected ones of said chips denoted in said test data structure, and selected ones of said modules;

selecting one of said measurement definition data structure;

performing the set of measurements denoted by said selected measurement definition data structure, said performing step including the step of performing measurements only on those chips denoted as selected by said selected measurement definition data structure, and performing measurements only on those modules which correspond to selected chips and which are denoted as selected by said selected measurement definition data structure; and

storing measurement values conveyed by said apparatus to said computer in said data storage means;

wherein only measurement values corresponding to the measurements specified in said measurement definition data structure are stored in said data storage means.

13. The method of claim 12, wherein

said denoting step includes the steps of:

defining a plurality of trend chart definition, each said trend chart definition including a specification of a quantity to be tracked, wherein said quantity predefined function of at least one of said measurements denoted in said test data structure;

and storing in said measurement definition data structure a mask denoting only the measurements included in said trend chart definitions;

said method further including the step of displaying a trend chart depicting a sequence of data points, each data point representing a predefined function of at least one of said measurement stored in said data storage means in accordance with a specified one of said trend chart definitions;

whereby only the measurements specified in said trend chart definitions are performed and only the measurement values corresponding to the measurements specified in said trend chart definitions are stored in said data storage means.

14. The method of claim 12, wherein

said denoting step includes the steps of:

defining a plurality of trend chart definitions, each said trend chart definition including a specification of a quantity to be tracked, wherein said quantity is a predefined function of at least one of said measurements denoted in said test data structure;

and storing in said measurement definition data structure a mask denoting the measurements included in said trend chart definitions;

said method further including the step of displaying g a trend chart depicting a sequence of data points, each data point representing a predefined function of at least one of said measurements stored in said data storage means in accordance with a specified one of said trend definitions;

whereby the measurements specified in said trend chart definitions are performed and the measurement values corresponding to the measurements specified in said trend chart definitions are stored in said data storage means.

15. The method of claim 12, wherein

said denoting step includes the steps of:

defining a plurality of measurement analysis tasks, including denoting in each of a plurality of analysis definition data structures a predefined measurement analysis task to be performed and a specification of a quantity to be analyzed, wherein said quantity is a predefined function of at least one of said measurements denoted in said test data structure;

and storing in said measurement definition data structure a mask denoting the measurements included in said analysis definition data structures;

said method further including the step of enabling interactive computer controlled performance of the steps of;

selecting one of said measurement analysis tasks for a selected one of said measurement definition data structures, and automatically, in response to said selection, performing the corresponding measurement analysis task, as denoted in the corresponding analysis definition data structure, on measurements values stored in said data storage means.