Acceleration sensor

• US 4,967,598 A
• Filed: 08/18/1988
• Issued: 11/06/1990
• Est. Priority Date: 08/18/1987
• Status: Expired due to Fees

• Current Assignee: Fujitsu Limited
• Original Assignee: Fujitsu Limited
• Inventors: Wakatsuki, Noboru, Kurashima, Shigemi, Tanaka, Akira, Shimizu, Nobuyoshi, Endoh, Michiko
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US07/233,428
• Time in Patent Office: 810 Days
• Field of Search: 73/517 R, 73/DIG. 3, 324/208, 360/113, 338/32 H
• US Class Current: 73/514.12
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/105 by magnetically sensitive devices
• CPC Class Codes: G01P 2015/0817 for pivoting movement of the mass, e.g. in-plane pendulum
• CPC Class Codes: Y10S 73/03 Hall effect

Abstract

An acceleration sensor including a cantilever beam having a free end to which a permanent magnet is attached. A pair of magnetic sensors, each comprising a barber-pole type magnetoresistive sensing element, is arranged in symmetrically spaced and opposed relationship and in a common plane extending parallel to the magnetic flux of the permanent magnet with respect to respective, opposite sides of the magnet. The cantilever is bent and the magnet is moved accordingly in response to an acceleration force, which is detected as outputs from the magnetoresistive sensing elements.

Claims

1. An acceleration sensor comprising:

a base;

a deformable beam comprising a first portion rigidly secured to the base and a second portion movable, by deformation of the beam in response to an acceleration force exerted thereon, from a predetermined initial position relative to the first portion to a second position displaced from the initial position by an amount proportional to the exerted acceleration force, and returnable to the initial position upon cessation of the acceleration force;

a permanent magnet attached to the second portion of the deformable beam for common movement therewith;

first and second magnetic sensors respectively comprising;

first and second zig-zag patterns of magnetic think film lying substantially in a common plane, each film pattern comprising a first plurality of spaced, parallel segments extending in a first direction and a second plurality of spaced, parallel segments extending in a second direction transverse to the first direction and respectively, integrally interconnecting the adjacent first segments at the opposite ends thereof in an alternating sequence in accordance with the zig-zag pattern;

the respective first segments of the first and second zig-zag patterns being in interdigitized and parallel, spaced relationship and with the respective, second segments thereof being in spaced and parallel, aligned relationship;

the first and second zig-zag patterns of magnetic thin films having respective, first ends defining corresponding input terminal pads and respective, second ends connected together to form a common output terminal pad;

first and second patterns of parallel, spaced line segments conductive material having a higher conductivity than that of the magnetic thin film, formed on the respective first and second zig-zag patterns of magnetic thin film, the first conductive pattern line segments being angularly inclined, relatively to the first plurality of parallel segments of the first zig-zag pattern, in a first sense, and the second conductive line segments being angularly inclined, relatively to the first plurality of parallel segments of the second, zig-zag pattern in a second, opposite sense, the first and second conductive material line segment patterns producing respective, first and second net bias current flow paths in the corresponding first and second magnetic thin film patterns which are angularly inclined with respect to each other;

the first and second magnetic sensors being fixedly mounted on the base at predetermined positions substantially symmetrically spaced from the magnet relative to the initial position of the deformable beam and with the common plane thereof parallel to the magnetic flux of the permanent magnet, the magnetic sensors producing respective outputs which are proportional to the extent of movement of the permanent magnet and correspondingly of the second portion of the deformable beam from the predetermined initial position thereof and thus to the acceleration force exerted thereon; and

an electrical circuit receiving the respective outputs of the magnetic sensors the producing an output indication of the acceleration force.

2. An acceleration sensor as set forth in claim 1, wherein said deformable beam comprises a cantilever having a first end corresponding to the first beam portion rigidly secured to said base and a second, free end corresponding to the second beam portion to which said permanent magnet is attached.

3. An acceleration sensor as set forth in claim 2, wherein said base comprises a silicon substrate having at least a first main surface, said first and second magnetic sensors being formed thereon in spaced relationship, the silicon substrate having an elongated opening extending therethrough transversely to the first main surface and having first and second, opposite ends, the second end of the opening extending between said first and second magnetic sensors, the cantilever being positioned within the opening, the first end thereof being rigidly secured to the silicon substrate base at the first end of the opening and the second, free end thereof being disposed adjacent the second end of the opening and, at the predetermined, initial position thereof, positioning the permanent magnet in spaced and substantially symmetrical relationship with respect to said first and second magnetic sensors.

4. An acceleration sensor as set forth in claim 1, wherein said first portion of said deformable beam comprises the respective opposite ends thereof, each opposite end being rigidly supported on the base, and the second portion comprises a central portion of the deformable beam, extending between the opposite end portions, and on which said permanent magnet is mounted.

5. An acceleration sensor as set forth in claim 1, wherein said base has at least two support members which serve as stoppers when said deformable beam is bent by abrupt shocks and prevent undesirable vibration.

6. An acceleration sensor as set forth in claim 1, further comprising a case formed of a magnetic shielding material and housing therewithin at least the base, the deformable beam, the permanent magnet, and the first and second magnetic sensors, the case being filled with oil and hermetically sealed so as to retain the oil therein.

7. An acceleration sensor as set forth in claim 6, wherein said case comprises a metal base portion and a metal cap portion which are hermetically sealed together.

8. An acceleration sensor as set forth in claim 7, wherein said case further comprises external electrical connection terminals extending through the metal base portion of the case in electrically insulated relationship therefrom, the terminals being connected to the magnetoresistive sensing elements within the case for transmitting the respective outputs thereof to the exterior of the case.

9. An acceleration sensor as recited in claim 1, wherein said base further comprises first and second support members symmetrically disposed at predetermined, spaced positions relative to the deformable beam at its predetermined initial position, the spacing thereof being selected to limit the extent of movement of the second portion of the beam and correspondingly of the deformation of the beam.

10. An acceleration sensor as set forth in claim 9, wherein the first and second magnetic sensors are mounted on the first and second support members respectively.

11. An acceleration sensor as recited in claim 1, wherein:

the first and second conductive segments are angularly inclined at approximately 45° and

in respective, first and second opposite senses relatively to the respective first pluralities of parallel segments of the first and second zigzag patterns of magnetic think film and correspondingly at approximately 90°

relatively to each other; and

the respective, net bias current flow paths in the first and second magnetic thin film zig-zag pattern are angularly inclined with respect to each other by approximately 90°

.

12. An acceleration sensor comprising:

a base;

a deformable beam member having a first portion rigidly secured to said base and a second portion movable from a predetermined, initial position relative to the base in response to and by an extent proportional to an acceleration force exerted thereon and returnable to said initial position when an acceleration is not exerted thereon;

a permanent magnet affixed to said deformable beam at said second portion;

said deformable beam and said permanent magnet being formed integrally and of a semirigid magnetic material;

a pair of magnetic sensors, each comprising a magnetoresistive sensing element, fixedly mounted on said base opposite to said magnet and arranged substantially symmetrically with respect to said magnet in the absence of any acceleration force being exerted thereon and thus at the initial position thereof; and

an electrical circuit for detecting the acceleration according to outputs from said magnetic sensors.

13. An acceleration sensor as set forth in claim 12, further comprising a second pair of magnetic sensors, each sensor comprising a magnetoresistive sensing element having a main surface and a sensing film disposed on the main surface, the second pair of magnetic sensors being fixedly mounted on the base at predetermined positions substantially symmetrically disposed in opposed relationship to respective, opposite sides of said magnet relative to the initial position of the deformable beam and with the respective main surfaces, and correspondingly the sensing films, in a common plane extending parallel to the magnetic flux of the permanent magnetic and perpendicular to the common plane of the first pair of sensors;

and

the electrical circuit receiving the respective outputs of the magnetic sensors of the first and second pairs thereof and producing an output indicating the value of the acceleration force.