Method of generating discretization grid for finite-difference simulation
First Claim
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1. A method of evaluating the characteristics of a semiconductor device, comprising the steps of:
- (a) representing a cross section of the semiconductor device by a polygonal figure;
(b) generating rectangular grids to locate one grid intersection point over each vertex of the polygonal figure;
(c) generating additional rectangular grids in order to locate one grid point over each intersection of rectangular grids generated at step (b) and segments of the polygonal figure which are not parallel to lines of the rectangular grids generated at step (b); and
(d) evaluating the characteristics of the semiconductor device on the grid points of the rectangular grids generated at steps (b) and (c).
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Abstract
A method of generating a discretization grid for a finite-difference simulation capable of simulating an object with a complex cross-sectional configuration accurately is disclosed. The method includes the step of generating grid through each vertex of the polygonal figure representing the cross-sectional configuration, and the step of generating additional grid through each intersection of the grid and the segments of the polygonal figure not parallel to the grid.
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18 Claims
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1. A method of evaluating the characteristics of a semiconductor device, comprising the steps of:
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(a) representing a cross section of the semiconductor device by a polygonal figure; (b) generating rectangular grids to locate one grid intersection point over each vertex of the polygonal figure; (c) generating additional rectangular grids in order to locate one grid point over each intersection of rectangular grids generated at step (b) and segments of the polygonal figure which are not parallel to lines of the rectangular grids generated at step (b); and (d) evaluating the characteristics of the semiconductor device on the grid points of the rectangular grids generated at steps (b) and (c). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification